High-sensitivity and low-power inertial MEMS-on-CMOS sensors using low-temperature-deposited poly-SiGe film for the IoT era (Englisch)
- Neue Suche nach: Tomizawa, Hideyuki
- Neue Suche nach: Kurui, Yoshihiko
- Neue Suche nach: Akita, Ippei
- Neue Suche nach: Fujimoto, Akira
- Neue Suche nach: Saito, Tomohiro
- Neue Suche nach: Kojima, Akihiro
- Neue Suche nach: Shibata, Hideki
- Neue Suche nach: Tomizawa, Hideyuki
- Neue Suche nach: Kurui, Yoshihiko
- Neue Suche nach: Akita, Ippei
- Neue Suche nach: Fujimoto, Akira
- Neue Suche nach: Saito, Tomohiro
- Neue Suche nach: Kojima, Akihiro
- Neue Suche nach: Shibata, Hideki
In:
2018 IEEE Symposium on VLSI Technology
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41-42
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2018
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ISBN:
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ISSN:
- Aufsatz (Konferenz) / Elektronische Ressource
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Titel:High-sensitivity and low-power inertial MEMS-on-CMOS sensors using low-temperature-deposited poly-SiGe film for the IoT era
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Beteiligte:Tomizawa, Hideyuki ( Autor:in ) / Kurui, Yoshihiko ( Autor:in ) / Akita, Ippei ( Autor:in ) / Fujimoto, Akira ( Autor:in ) / Saito, Tomohiro ( Autor:in ) / Kojima, Akihiro ( Autor:in ) / Shibata, Hideki ( Autor:in )
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Erschienen in:
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Verlag:
- Neue Suche nach: IEEE
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Erscheinungsdatum:01.06.2018
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Format / Umfang:2001671 byte
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ISBN:
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ISSN:
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DOI:
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Medientyp:Aufsatz (Konferenz)
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Format:Elektronische Ressource
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Sprache:Englisch
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Datenquelle:
Inhaltsverzeichnis Konferenzband
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Half-threshold bias Ioff reduction down to nA range of thermally and electrically stable high-performance integrated OTS selector, obtained by Se enrichment and N-doping of thin GeSe layersAvasarala, Naga Sruti / Donadio, G. L. / Witters, T. / Opsomer, K. / Govoreanu, B. / Fantini, A. / Clima, S. / Oh, H. / Kundu, S. / Devulder, W. et al. | 2018
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Highly Manufacturable Low Power and High Performance 11LPP Platform Technology for Mobile and GPU ApplicationsKim, H.-J. / Choi, B.H. / Lee, Y.H. / Ahn, J.H. / Bang, Y.S. / Lim, Y.D. / Do, J.H. / Jung, J.H. / Song, T.J. / Yasuda-Masuoka, Y. et al. | 2018
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A 12nm FinFET Technology Featuring 2nd Generation FinFET for Low Power and High Performance ApplicationsLo, H.C. / Choi, D. / Hu, Y. / Shen, Y. / Qi, Y. / Peng, J. / Zhou, D. / Mohan, M. / Yong, C. / Zhan, H. et al. | 2018
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8LPP Logic Platform Technology for Cost-Effective High Volume ManufacturingRhee, Hwasung / Kim, Ilryong / Jeong, Jaehun / Son, Nakjin / Hong, Heebum / Cho, Sungil / Park, Yongmin / Kim, Dongwoo / Choi, Yunki / Ahn, Jeonghoon et al. | 2018
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High Performance Mobile SoC Productization with Second-Generation 10-nm FinFET Technology and Extension to 8-nm ScalingYuan, Jun / Rim, Ken / Chen, Ying / Cai, Ming / Suh, Youseok / Choi, Jihong / Deng, Jie / Bao, Jerry / Song, Zhimin / Ge, Lixin et al. | 2018
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Hybrid 14nm FinFET - Silicon Photonics Technology for Low-Power Tb/s/mm2 Optical I/ORakowski, M. / Ban, Y. / De Heyn, P. / Pantano, N. / Snyder, B. / Balakrishnan, S. / Van Huylenbroeck, S. / Bogaerts, L. / Demeurisse, C. / Inoue, F. et al. | 2018
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VLSI Technology 2018 Preface| 2018
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VLSI Technology 2018 Foreword| 2018
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VLSI Technology 2018 Breaker Page| 2018