The interplay of process parameters and influence on the AlN films on sapphire fabricated by DC magnetron sputtering and annealing (Englisch)
- Neue Suche nach: Liu, Huan
- Weitere Informationen zu Liu, Huan:
-
https://orcid.org/0000-0002-2026-8253
- Neue Suche nach: Guo, Wei
- Weitere Informationen zu Guo, Wei:
-
https://orcid.org/0000-0002-6233-0529
- Neue Suche nach: Liu, Huan
- Weitere Informationen zu Liu, Huan:
-
https://orcid.org/0000-0002-2026-8253
- Neue Suche nach: Guo, Wei
- Weitere Informationen zu Guo, Wei:
-
https://orcid.org/0000-0002-6233-0529
In:
Semiconductor Science and Technology
;
38
, 1
;
2023
- Aufsatz (Zeitschrift) / Elektronische Ressource
-
Titel:The interplay of process parameters and influence on the AlN films on sapphire fabricated by DC magnetron sputtering and annealing
-
Beteiligte:
-
Erschienen in:
-
Verlag:
- Neue Suche nach: IOP Publishing
-
Erscheinungsdatum:01.01.2023
-
Format / Umfang:9 pages
-
ISSN:
-
DOI:
-
Medientyp:Aufsatz (Zeitschrift)
-
Format:Elektronische Ressource
-
Sprache:Englisch
-
Schlagwörter:
-
Datenquelle:
Inhaltsverzeichnis – Band 38, Ausgabe 1
Zeige alle Jahrgänge und Ausgaben
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
-
LCINDEP: a novel technique for leakage reduction in FinFET based circuitsMushtaq, Umayia / Akram, Md Waseem / Prasad, Dinesh / Nagar, Bal Chand et al. | 2023
-
In-situ deposition of tungsten oxide hole-contact by Hot-Wire CVD and its application in dopant-free heterojunction solar cellsGuo, Cong / Li, Junjun / Liu, Run / Zhang, Dongdong / Qiu, Junyang / Zhuang, Zihan / Chen, Yang / Qiu, Qingqing / Liu, Wenzhu / Huang, Yuelong et al. | 2023
-
Influence of anti-reflection coatings on double GaAs/Si heterojunction layers in Si solar cellsSingh, Bhim / Gupta, Vivek et al. | 2023
-
Design of the GaN based CAVET with SiO2–InGaN hybrid current blocking layerLi, Haiou / Kang, Dongxu / Qu, Kangchun / Liu, Xingpeng / Wan, Rongqiao et al. | 2023
-
Low-temperature in situ deposited CuI-based hole-transporter for perovskite solar cells efficiency enhancementLi, Hang / Fu, Chao / Shi, Lei / Li, Chaorong / Pan, Jiaqi / Zhang, Wenjun et al. | 2023
-
Design and defect study of Cs2AgBiBr6 double perovskite solar cell using suitable charge transport layersAlkhammash, Hend I / Mottakin, M / Hossen, Md Mosaddek / Akhtaruzzaman, Md / Rashid, Mohammad Junaebur et al. | 2023
-
High responsivity n-ZnO nanorods/p-GaN heterojunction-based UV-A photodetectorsFrancis, Bellarmine / Sebastian, Reethu / Dixit, Tejendra / Ganapathi, K Lakshmi / Rao, M S Ramachandra et al. | 2023
-
Emission and capture characteristics of electron trap (E emi = 0.8 eV) in Si-doped β-Ga2O3 epilayerQu, Haolan / Chen, Jiaxiang / Zhang, Yu / Sui, Jin / Gu, Yitian / Deng, Yuxin / Su, Danni / Zhang, Ruohan / Lu, Xing / Zou, Xinbo et al. | 2023
-
The conductivity and electrophysical characteristics of Janus-like TaSi2/Si nanoparticlesTorkhov, N A / Nomoev, A V et al. | 2023
-
Charge-plasma based symmetrical-gate complementary electron–hole bilayer TFET with improved performance for sub-0.5 V operationAnam, Aadil / Kumar, Naveen / Amin, S Intekhab / Prasad, Dinesh / Anand, Sunny et al. | 2023
-
A first principles study of structural, electronic, elastic, thermal and optical properties of SiZr O3 and GeZr O3Ajay, G / Alam, Aftab / Sirajuddeen, M Mohamed Sheik et al. | 2023
-
Dependence of reverse leakage on the edge termination process in vertical GaN power deviceXie, Tailang / da Silva, Cláudia / Szabó, Nadine / Mikolajick, Thomas / Wachowiak, Andre et al. | 2023
-
The interplay of process parameters and influence on the AlN films on sapphire fabricated by DC magnetron sputtering and annealingLiu, Huan / Guo, Wei et al. | 2023
-
Role of gas flow direction on monolayer MoS2 growth on patterned surfaces via CVDAras, Fikret Gonca / Yeltik, Aydan et al. | 2023
-
Straightforward synthesis and mechanism insight of TiO2/α′-AgVO3 heterostructure with enhanced photocatalytic activityLiu, Yangbin / Liu, Nian / Lin, Minghua / Zhou, Yun / Ouyang, Xiaoping et al. | 2023
-
Engineering the insulator-to-metal transition by tuning the population of dopant defects: first principles simulations of Se hyperdoped SiDebernardi, Alberto et al. | 2023
-
Crystalline and optoelectronic properties of Ge1−x Sn x /high-Si-content-Si y Ge1−x−y Sn x double-quantum wells grown with low-temperature molecular beam epitaxyZhang, Shiyu / Shibayama, Shigehisa / Nakatsuka, Osamu et al. | 2023
-
Amalgamation of rare-earth neodymium ions with ZnO nanoparticles: extensive investigations into the microstructure and optical propertiesSenthil Kumari, S / Nirmala, W / Chidhambaram, N / Prabu, M / Gobalakrishnan, S / Thirumurugan, Arun et al. | 2023
-
Transitions in polycrystalline diamond probed by steady state, modulated and transient surface photovoltage spectroscopyDittrich, Thomas / Fengler, Steffen et al. | 2023
-
Sub-band gap infrared absorption in Si implanted with MgWang, Mao / Shaikh, M S / Kentsch, U / Heller, R / Zhou, Shengqiang et al. | 2023
-
Effects of post metallization annealing on Al2O3 atomic layer deposition on n-GaNTadmor, Liad / Brusaterra, Enrico / Treidel, Eldad Bahat / Brunner, Frank / Bickel, Nicole / Vandenbroucke, Sofie S T / Detavernier, Christophe / Würfl, Joachim / Hilt, Oliver et al. | 2023
-
Investigation of thermal stability and crystallization mechanism of Er0.03(GeTe)0.97 phase change materialGu, Han / Wu, Weihua / Xu, Shengqing / Zhou, Xiaochen / Shen, Bo / Zhai, Jiwei et al. | 2023