Localized etching of polymer films using an atmospheric pressure air microplasma jet (Englisch)
Paper
- Neue Suche nach: Honglei Guo
- Neue Suche nach: Jingquan Liu
- Neue Suche nach: Bin Yang
- Neue Suche nach: Xiang Chen
- Neue Suche nach: Chunsheng Yang
- Neue Suche nach: Honglei Guo
- Neue Suche nach: Jingquan Liu
- Neue Suche nach: Bin Yang
- Neue Suche nach: Xiang Chen
- Neue Suche nach: Chunsheng Yang
In:
Journal of Micromechanics and Microengineering
;
25
, 1
;
015010
;
2015
-
ISSN:
- Aufsatz (Zeitschrift) / Elektronische Ressource
-
Titel:Localized etching of polymer films using an atmospheric pressure air microplasma jet
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Untertitel:Paper
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Weitere Titelangaben:Localized etching of polymer films using an atmospheric pressure air microplasma jet
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Beteiligte:Honglei Guo ( Autor:in ) / Jingquan Liu ( Autor:in ) / Bin Yang ( Autor:in ) / Xiang Chen ( Autor:in ) / Chunsheng Yang ( Autor:in )
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Erschienen in:Journal of Micromechanics and Microengineering ; 25, 1 ; 015010
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Verlag:
- Neue Suche nach: Institute of Physics
-
Erscheinungsdatum:01.01.2015
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Format / Umfang:10 pages
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ISSN:
-
DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
-
Sprache:Englisch
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Datenquelle:
Inhaltsverzeichnis – Band 25, Ausgabe 1
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