Dynamic response of low aspect ratio piezoelectric microcantilevers actuated in different liquid environments (Englisch)
Nationallizenz
- Neue Suche nach: Vázquez, J
- Neue Suche nach: Rivera, M A
- Neue Suche nach: Hernando, J
- Neue Suche nach: Sánchez-Rojas, J L
- Neue Suche nach: Vázquez, J
- Neue Suche nach: Rivera, M A
- Neue Suche nach: Hernando, J
- Neue Suche nach: Sánchez-Rojas, J L
In:
Journal of Micromechanics and Microengineering
;
19
, 1
;
015020
;
2009
- Aufsatz (Zeitschrift) / Elektronische Ressource
-
Titel:Dynamic response of low aspect ratio piezoelectric microcantilevers actuated in different liquid environments
-
Beteiligte:Vázquez, J ( Autor:in ) / Rivera, M A ( Autor:in ) / Hernando, J ( Autor:in ) / Sánchez-Rojas, J L ( Autor:in )
-
Erschienen in:Journal of Micromechanics and Microengineering ; 19, 1 ; 015020
-
Erscheinungsdatum:01.01.2009
-
ISSN:
-
DOI:
-
Medientyp:Aufsatz (Zeitschrift)
-
Format:Elektronische Ressource
-
Sprache:Englisch
-
Datenquelle:
Inhaltsverzeichnis – Band 19, Ausgabe 1
Zeige alle Jahrgänge und Ausgaben
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
- 015001
-
A large-displacement thermal actuator designed for MEMS pitch-tunable gratingYang, Yu-Sheng / Lin, Yu-Hsin / Hu, Yi-Chiuen / Liu, Cheng-Hsien et al. | 2009
- 015002
-
Integration of RF-MEMS resonators on submicrometric commercial CMOS technologiesLopez, J L / Verd, J / Teva, J / Murillo, G / Giner, J / Torres, F / Uranga, A / Abadal, G / Barniol, N et al. | 2009
- 015003
-
Effects of the nanoimprint pattern on the performance of a MEMS-based micro direct methanol fuel cellZhang, Yi / Lu, Jian / Zhou, Haoshen / Itoh, Toshihiro / Maeda, Ryutaro et al. | 2009
- 015004
-
An electrofusion chip with a cell delivery system driven by surface tensionJu, Jongil / Ko, Jung-Moon / Cha, Hyeon-Cheol / Park, Joong Yull / Im, Chang-Hwan / Lee, Sang-Hoon et al. | 2009
- 015005
-
A novel process for circle-like 3D microstructures by two-step wet etchingJiang, Yurong / Liu, Guizhen / Zhou, Jian et al. | 2009
- 015006
-
A microactuator based on the decomposition of an energetic material for disposable lab-on-chip applications: fabrication and testArdila Rodríguez, Gustavo A / Suhard, Samuel / Rossi, Carole / Estève, Daniel / Fau, Pierre / Sabo-Etienne, Sylviane / Mingotaud, Anne Françoise / Mauzac, Monique / Chaudret, Bruno et al. | 2009
- 015007
-
A low temperature surface modification assisted method for bonding plastic substratesVlachopoulou, M-E / Tserepi, A / Pavli, P / Argitis, P / Sanopoulou, M / Misiakos, K et al. | 2009
- 015008
-
Competition between the thermal gradient and the bimorph effect in locally heated MEMS actuatorsJeppesen, C / Molhave, K / Kristensen, A et al. | 2009
- 015009
-
Optimization on hardness and internal stress of micro-electroformed NiCo/nano-Al2O3 composites with the constraint of low surface roughnessHung, Shih-Yu et al. | 2009
- 015010
-
The effect of thermal conductivity of the tool electrode in spark-assisted chemical engraving gravity-feed micro-drillingMousa, M / Allagui, A / Ng, H D / Wüthrich, R et al. | 2009
- 015011
-
Development of an indirect solid freeform fabrication process based on microstereolithography for 3D porous scaffoldsKang, Hyun-Wook / Seol, Young-Joon / Cho, Dong-Woo et al. | 2009
- 015012
-
The digital geometric phase technique applied to the deformation evaluation of MEMS devicesLiu, Z W / Xie, H M / Gu, C Z / Meng, Y G et al. | 2009
- 015013
-
Surface micromachined PDMS microfluidic devices fabricated using a sacrificial photoresist*Subramani, Balasubramanian Ganapathy / Selvaganapathy, Ponnambalam Ravi et al. | 2009
Preliminary results of this paper have been presented at the Canadian Workshop on MEMS and Microfluidics, Montréal, Canada, August 2007.
- 015013
-
Surface micromachined PDMS microfluidic devices fabricated using a sacrificial photoresistSubramani, B.G. / Selvaganapathy, P.R. et al. | 2009
- 15013
-
Surface micromachined PDMS microfluidic devices fabricated using a sacrificial photoresistfootnote pos="infobottom" id="*">Preliminary results of this paper have been presented at the Canadian Workshop on MEMS and Microfluidics, Montréal, Canada, August 2007.Subramani, Balasubramanian Ganapathy et al. | 2009
- 015014
-
Flexible Gd2O2S:Tb scintillators pixelated with polyethylene microstructures for digital x-ray image sensorsJung, Im Deok / Cho, Min Kook / Lee, Sang Min / Bae, Kong Myeong / Jung, Phill Gu / Lee, Chi Hoon / Lee, Jae Min / Yun, Seungman / Kim, Ho Kyung / Kim, Seong Sik et al. | 2009
- 015015
-
Packaging of silicon sensors for microfluidic bio-analytical applicationsWimberger-Friedl, Reinhold / Nellissen, Ton / Weekamp, Wim / Delft, Jan van / Ansems, Will / Prins, Menno / Megens, Mischa / Dittmer, Wendy / Witz, Christiane de / Iersel, Ben van et al. | 2009
- 015016
-
A resonant magnetic field microsensor with high quality factor at atmospheric pressureHerrera-May, A L / García-Ramírez, P J / Aguilera-Cortés, L A / Martínez-Castillo, J / Sauceda-Carvajal, A / García-González, L / Figueras-Costa, E et al. | 2009
- 015017
-
High-Q bulk-mode SOI square resonators with straight-beam anchorsKhine, L / Palaniapan, M et al. | 2009
- 015018
-
Fabrication of microlens arrays using a CO2-assisted embossing techniqueHuang, Tzu-Chien / Chan, Bin-Da / Ciou, Jyun-Kai / Yang, Sen-Yeu et al. | 2009
- 015019
-
Experimental and numerical study of the wall temperature of cylindrical micro combustorsLi, J / Chou, S K / Yang, W M / Li, Z W et al. | 2009
- 015020
-
Dynamic response of low aspect ratio piezoelectric microcantilevers actuated in different liquid environmentsVázquez, J / Rivera, M A / Hernando, J / Sánchez-Rojas, J L et al. | 2009
- 015021
-
Experimental investigation of parametric and externally forced motion in resonant MEMS sensorsHarish, K M / Gallacher, B J / Burdess, J S / Neasham, J A et al. | 2009
- 015022
-
An optical system for communication and sensing in millimetre-sized swarming microrobotsCorradi, P / Scholz, O / Knoll, T / Menciassi, A / Dario, P et al. | 2009
- 015023
-
Monolithic integration of capacitive sensors using a double-side CMOS MEMS post processSun, Chih-Ming / Wang, Chuanwei / Tsai, Ming-Han / Hsieh, Hsieh-Shen / Fang, Weileun et al. | 2009
- 015024
-
An absorptive single-pole four-throw switch using multiple-contact MEMS switches and its application to a monolithic millimeter-wave beam-forming networkLee, Sanghyo / Kim, Jong-Man / Kim, Yong-Kweon / Kwon, Youngwoo et al. | 2009
- 015025
-
Liquid transfer between two separating plates for micro-gravure-offset printingKang, Hyun Wook / Sung, Hyung Jin / Lee, Taik-Min / Kim, Dong-Soo / Kim, Chang-Jin et al. | 2009
- 015026
-
A tunable planar inverted-F antenna with an RF MEMS switch for the correction of impedance mismatch due to human hand effectsPark, Yong-Hee / Park, Jae-Hyoung / Kim, Yong-Dae / Lee, Hee-Chul / Kim, Hong-Teuk / Bu, Jonguk / Nam, Hyo-Jin et al. | 2009
- 015027
-
Analysis, simulation and fabrication of MEMS springs for a micro-tensile systemLiu, Rui / Wang, Hong / Li, Xueping / Tang, Jun / Mao, Shengping / Ding, Guifu et al. | 2009
- 015028
-
Analysis of vibration modes in a micromechanical square-plate resonatorHolmgren, Olli / Kokkonen, Kimmo / Veijola, Timo / Mattila, Tomi / Kaajakari, Ville / Oja, Aarne / Knuuttila, Jouni V / Kaivola, Matti et al. | 2009
- 015029
-
Experimental and theoretical analysis of DEP-based particle deflection for the separation of protein-bound particlesKim, Min-Soo / Kim, Jong-Ho / Lee, Yoon-Sik / Lim, Geon-Gyu / Lee, Hyang-Beom / Park, Jae-Hyoung / Kim, Yong-Kweon et al. | 2009
- 015030
-
Fabrication of a micrometer Ni–Cu alloy column coupled with a Cu micro-column for thermal measurementLin, J C / Chang, T K / Yang, J H / Jeng, J H / Lee, D L / Jiang, S B et al. | 2009
- 015031
-
A wet abrasive blasting process for smooth micromachining of glass by ductile-mode removalMineta, Takashi / Takada, Takehisa / Makino, Eiji / Kawashima, Takahiro / Shibata, Takayuki et al. | 2009
- 015032
-
High-voltage liquid-electrolyte microbatteries composed of serial unit cells defined by the surface-tension effectKim, Mun Cheol / Cho, Young-Ho et al. | 2009
- 015033
-
Investigation of ink transfer in a roller-reversal imprint processJiang, Weitao / Liu, Hongzhong / Ding, Yucheng / Tang, Yiping / Shi, Yongsheng / Yin, Lei / Lu, Bingheng et al. | 2009
- 015034
-
Boron impurity at the Si/SiO2 interface in SOI wafers and consequences for piezoresistive MEMS devicesNafari, A / Karlen, D / Rusu, C / Svensson, K / Enoksson, P et al. | 2009
- 015035
-
Low-temperature bonding of poly-(methyl methacrylate) microfluidic devices under an ultrasonic fieldLi, S W / Xu, J H / Wang, Y J / Lu, Y C / Luo, G S et al. | 2009
- 17001
-
NOTE: Determining the optimal process conditions of micro roller embossing for large-area patterning of green ceramic substratesShan, Xuechuan et al. | 2009
- 017001
-
Determining the optimal process conditions of micro roller embossing for large-area patterning of green ceramic substratesShan, Xuechuan / Chua, K M / Soh, Y C / Lu, C W et al. | 2009