Fine motion control of a moving stage using a piezoactuator associated with a displacement amplifier (Englisch)
Nationallizenz
- Neue Suche nach: S B Choi
- Neue Suche nach: S S Han
- Neue Suche nach: Y S Lee
- Neue Suche nach: S B Choi
- Neue Suche nach: S S Han
- Neue Suche nach: Y S Lee
In:
Smart Materials and Structures
;
14
, 1
;
222-230
;
2005
-
ISSN:
- Aufsatz (Zeitschrift) / Elektronische Ressource
-
Titel:Fine motion control of a moving stage using a piezoactuator associated with a displacement amplifier
-
Weitere Titelangaben:Fine motion control of a moving stage using a piezoactuator associated with a displacement amplifier
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Beteiligte:
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Erschienen in:Smart Materials and Structures ; 14, 1 ; 222-230
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Verlag:
- Neue Suche nach: Institute of Physics
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Erscheinungsdatum:01.02.2005
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Format / Umfang:9 pages
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ISSN:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Datenquelle:
Inhaltsverzeichnis – Band 14, Ausgabe 1
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