Discharges Modeling - Collisionless electron heating in microwave discharges (Französisch)
- Neue Suche nach: Aliev, Yu M.
- Neue Suche nach: Aliev, Yu M.
In:
Journal de physique / 4
;
8
, 7
; 53-60
;
1998
-
ISSN:
- Aufsatz (Zeitschrift) / Print
-
Titel:Discharges Modeling - Collisionless electron heating in microwave discharges
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Beteiligte:Aliev, Yu M. ( Autor:in )
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Erschienen in:Journal de physique / 4 ; 8, 7 ; 53-60
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Verlag:
- Neue Suche nach: EDP Sciences
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Erscheinungsort:Les Ulis
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Erscheinungsdatum:1998
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ISSN:
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ZDBID:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Französisch
- Neue Suche nach: 31.00 / 33.00
- Weitere Informationen zu Basisklassifikation
- Neue Suche nach: 250/3400
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Schlagwörter:
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Klassifikation:
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Datenquelle:
Inhaltsverzeichnis – Band 8, Ausgabe 7
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- 1
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Recent trends and developments of microwave dischargesMarec, J. et al. | 1998
- 21
-
Discharges Modeling - Modeling of microwave reactors: Microwave and kinetics in gas flow approachesGousset, G. et al. | 1998
- 33
-
Discharges Modeling - Calculation of spatially inhomogeneous electron distribution functionsAlves, L.L. et al. | 1998
- 43
-
Discharges Modeling - Self consistent modeling of surface wave sustained dischargesSchlüter, H. et al. | 1998
- 53
-
Discharges Modeling - Collisionless electron heating in microwave dischargesAliev, Yu M. et al. | 1998
- 61
-
Discharges Modeling - Modeling electromagnetic fields for the excitation of microwave discharges used for materials processingGrotjohn, T.A. et al. | 1998
- 83
-
Linear Discharges - Fundamentals and limitations of large area planar microwave discharges using slotted waveguidesOhl, A. et al. | 1998
- 99
-
Linear Discharges - Duo-plasmaline, a surface wave sustained linearly extended dischargeRäuchle, E. et al. | 1998
- 109
-
Linear Discharges - Linear field applicatorsZakrzewski, Z. et al. | 1998
- 121
-
Large Discharges - Recent developments in DECR plasmasLagarde, T. et al. | 1998
- 133
-
Large Discharges - Etching of thin films using magnetised plasmasMargot, J. et al. | 1998
- 145
-
Large Discharges - Modeling the transitions from capacitive to inductive to wave-sustained rf dischargesLieberman, M.A. et al. | 1998
- 165
-
Large Discharges - Control of power deposition profile for uniform plasma production in microwave and radio frequency rangesYasaka, Y. et al. | 1998
- 173
-
Large Discharges - Recent trends in the design of large RF, microwave and ECR ion sources for the production of broad ion beamsWartski, L. et al. | 1998
- 187
-
Large Discharges - Large microwave plasma reactor based on surface wavesBoisse-Laporte, C. et al. | 1998
- 195
-
Large Discharges - Holey-plate structure surface-wave plasma sourceYoshida, Y. et al. | 1998
- 207
-
Diagnostics and Reactors Control - Spectroscopical diagnostics of molecular microwave plasmasRöpcke, J. et al. | 1998
- 217
-
Diagnostics and Reactors Control - Diagnostics of deposition plasmasSchram, D.C. et al. | 1998
- 231
-
Diagnostics and Reactors Control - Mass spectrometry in plasma physicsSchmidt, M. et al. | 1998
- 241
-
Diagnostics and Reactors Control - ICP diagnostics with magnetic probesGodyak, V.A. et al. | 1998
- 257
-
Diagnostics and Reactors Control - Noise reduction in EEDF numerical differentiation techniqueDias, F.M. et al. | 1998
- 265
-
Diagnostics and Reactors Control - Infrared absorption analysis of organosilicon-oxygen plasmas in a microwave multipolar plasma excited by distributed electron cyclotron resonanceRaynaud, P. et al. | 1998
- 275
-
Pulsed Discharges - Pulsed discharges produced by strong microwavesVikharev, A.L. et al. | 1998
- 287
-
Pulsed Discharges - Time resolved temperature measurements in a H2 high power pulsed dischargeRousseau, A. et al. | 1998
- 297
-
Pulsed Discharges - Ignition phase of a pulsed microwave-excited oxygen plasmaBrockhaus, A. et al. | 1998
- 307
-
Pulsed Discharges - Pulsed waveguided dischargesGrozev, D. et al. | 1998
- 317
-
Pulsed Discharges - Pulsed discharges produced by surface wavesIvanov, O.A. et al. | 1998
- 327
-
Pulsed Discharges - Diagnostics on a pulsed surface-wave dischargeHimmel, G. et al. | 1998
- 339
-
High Pressure Discharges - Spectroscopic diagnostics of high pressure dischargesGamero, A. et al. | 1998
- 349
-
High Pressure Discharges - Microwave torch combined with conventional burnerJanca, J. et al. | 1998
- 357
-
High Pressure Discharges - High pressure discharges for chemical analysisHubert, J. et al. | 1998
- 369
-
Chemical Kinetics - Plasma chemistry of nonequilibrium microwave discharges. Status and tendencyLebedev, Yu A. et al. | 1998
- 381
-
Chemical Kinetics - Nitrogen-oxygen and hydrogen dischargesMatveyev, A.A. et al. | 1998
- 391
-
Chemical Kinetics - Role of the plasma composition at the surface on diamond growthFarhat, S. et al. | 1998
- 401
-
Chemical Kinetics - Microwave reactors for plasma chemistryJivotov, V. et al. | 1998
- 411
-
Chemical Kinetics - Plasma catalytic reaction in ammonia synthesis in the microwave dischargeMatsumoto, O. et al. | 1998
- 421
-
Index| 1998