On the hardness of a-C:H films prepared by methane plasma decomposition (Englisch)
- Neue Suche nach: Marques, F.C.
- Neue Suche nach: Marques, F.C.
- Neue Suche nach: Lacerda, R.G.
- Neue Suche nach: Odo, G.Y.
- Neue Suche nach: Lepienski, C.M.
In:
Thin solid films
;
332
, 1-2
; 113-117
;
1999
-
ISSN:
- Aufsatz (Zeitschrift) / Print
-
Titel:On the hardness of a-C:H films prepared by methane plasma decomposition
-
Beteiligte:
-
Erschienen in:Thin solid films ; 332, 1-2 ; 113-117
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Erscheinungsort:Amsterdam [u.a.] Elsevier
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Erscheinungsdatum:1999
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ISSN:
-
ZDBID:
-
Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
- Neue Suche nach: 33.68
- Weitere Informationen zu Basisklassifikation
- Neue Suche nach: 535/3485
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Schlagwörter:
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Klassifikation:
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Datenquelle:
Inhaltsverzeichnis – Band 332, Ausgabe 1-2
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