Metrology and Inspection - Optimization of Sample Plan for Overlay and Alignment Accuracy Improvement (Englisch)
- Neue Suche nach: Hong, Jinseog
- Neue Suche nach: Hong, Jinseog
- Neue Suche nach: Lee, Junghyeon
- Neue Suche nach: Park, Joonsoo
- Neue Suche nach: Cho, Hanku
- Neue Suche nach: Moon, Jootae
In:
Japanese journal of applied physics / 1
;
38
, 12
; 7164-7167
;
1999
-
ISSN:
- Aufsatz (Zeitschrift) / Print
-
Titel:Metrology and Inspection - Optimization of Sample Plan for Overlay and Alignment Accuracy Improvement
-
Beteiligte:
-
Erschienen in:Japanese journal of applied physics / 1 ; 38, 12 ; 7164-7167
-
Verlag:
- Neue Suche nach: Ōyō Butsuri Gakkai
-
Erscheinungsort:Tokyo
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Erscheinungsdatum:1999
-
ISSN:
-
ZDBID:
-
Medientyp:Aufsatz (Zeitschrift)
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Format:Print
-
Sprache:Englisch
- Neue Suche nach: 33.00
- Weitere Informationen zu Basisklassifikation
- Neue Suche nach: 355/3400
-
Schlagwörter:
-
Klassifikation:
-
Datenquelle:
Inhaltsverzeichnis – Band 38, Ausgabe 12
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Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
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The combined effects of nitrogen implantation at S/D extension and N2O oxide on 0.18 micron N- and P-metal oxide field effect transistors (MOSFETs)Chao, T.S. / Chang, S.J. / Chien, C.H. / Lin, H.C. / Huang, T.Y. / Chang, C.Y. et al. | 1999
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Improved efficiency of CuInS2-based solar cells without potassium cyanide processWatanabe, T. / Matsui, M. et al. | 1999
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Recharging instability and periodic domain structures in multiple quantum well infrared photodetectorsRyzhii, M. / Ryzhii, V. / Suris, R. / Hamaguchi, C. et al. | 1999
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Superlattice in YBa2Cu3O(x) single crystal induced by absorption of water vaporEdo, S. / Takama, T. et al. | 1999
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Proposal of an alternative technique for high density data storageWu, Y. / Chong, T. et al. | 1999
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Wavelength tunable polarization mode converter utilizing strain-optic effects in Ti:LiNbO3Jung, H.S. / Erknoyan, O. / Taylor, H.F. et al. | 1999
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Capacitance dispersion in n-LT-i-p GaAs structures with the low-temperature layers grown at different temperaturesChen, J.F. / Chen, N.C. / Wang, P.Y. / Wang, J.S. / Weng, C.M. et al. | 1999
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Artificial SrTiO3/SrO superlattices by pulsed laser depositionIwazaki, Y. / Suzuki, T. / Sekiguchi, S. / Fujimoto, M. et al. | 1999
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Studies of Ir-Ta-O as high temperature stable electrode material and its application for ferroelectric SrBi2Ta2O9 thin film depositionZhang, F. / Maa, J. / Hsu, S.T. / Ohnishi, S. / Zhen, W. et al. | 1999
- 1453
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Surface microroughness observed during wet etching of silicon dioxide with high electric field stressYamabe, K. / Kai, L. / Murata, M. et al. | 1999
- 1460
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Time-resolved emission from self-assembled single quantum dots using scanning near-field optical microscopeOno, M. / Matsuda, K. / Saiki, T. / Nishi, K. / Mukaiyama, T. / Kuwata-Gonokami, M. et al. | 1999
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Imaging the internal structure of recording marks on an optical disc by internal reflection scanning near-field optical microscopySchüttler, M. / Leuschner, M. / Giessen, H. et al. | 1999
- 1469
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Spatial distribution measurement of absolute densities of CF and CF2 radicals in a high density plasma reactor using a combination of single-path infrared diode laser absorption spectroscopy and laser-induced fluorescence techniqueNakamura, M. / Nakayama, H. / Ito, M. / Hori, M. / Goto, T. / Kono, A. / Ishii, N. et al. | 1999
- 1472
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Electroluminescence properties of three-layered organic light-emitting diodes with a layer of tetraphenylchlorin or tetraphenylporphineSakakibara, Y. / Okutsu, S. / Enokida, T. / Tani, T. et al. | 1999
- 1475
-
Tunable optical stop band utilizing thermochromism of synthetic opal infiltrated with conducting polymerSatoh, S. / Kajii, H. / Kawagaishi, Y. / Fujii, A. / Ozaki, M. / Yoshino, K. et al. | 1999
- 1478
-
Ultrasound-assisted optical reflectometry in highly scattering mediaHisaka, M. / Sugiura, T. / Kawata, S. et al. | 1999
- 1482
-
Measurements of piezoelectric coefficient of Pb(Zr,Ti)O3 thin film using a piezoelectric microcantileverChu, J. / Wang, Z. / Maeda, R. et al. | 1999
- 1488
-
Self-organized gold nanodots array on a silicon substrate and its mechanical stabilityTsutsui, G. / Huang, S. / Sakaue, H. / Shingubara, S. / Takahagi, T. et al. | 1999
- 6571
-
Semiconductors - Influence of Gas Desorption from SiOF Film Prepared by High-Density-Plasma Chemical Vapor Deposition upon TiN-Ti FilmTamura, Takahiro et al. | 1999
- 6577
-
Semiconductors - Investigation of Pulsed Laser Removal of Cr and MoSi Film on a Quartz SubstrateChiba, Akira et al. | 1999
- 6583
-
Semiconductors - Characteristics of Molecular Beam Epitaxy Grown GaAs Simultaneously Doped with Si and BeIchiryu, Dai et al. | 1999
- 6587
-
Semiconductors - Surface and Bulk Passivation effect of GaAs grown on Si Substrates by SeS2 TreatmentArokiaraj, Jesudoss et al. | 1999
- 6591
-
Semiconductors - Strain Relaxation in Surface Nano-Structures Studied by X-Ray Diffraction MethodsBaumbach, Tilo et al. | 1999
- 6597
-
Semiconductors - Helicon-Wave-Excited Plasma Nitridation of GaAs After Short-Time Plasma Oxidation for Fabrication of Damage-Free GaN-GaAs InterfaceKasahara, Fumio et al. | 1999
- 6605
-
Semiconductors - Reduction of Threading Dislocations in GaN on Sapphire by Buffer Layer Annealing in Low-Pressure Metalorganic Chemical Vapor DepositionHashimoto, Tadao et al. | 1999
- 6611
-
Semiconductors - Analysis of Electrically Active Carbon in Semi-insulating Gallium Arsenide by Infrared Absorption SpectroscopyAlt, H.Ch et al. | 1999
- 6617
-
Semiconductors - Fabrication of Solar Cells Having SiH2Cl2 Based I-Layer MaterialsShimizu, Satoshi et al. | 1999
- 6624
-
Semiconductors - A New Approach for Form Polycrystalline Silicon by Excimer Laser Irradiation with a Wide Range of EnergiesHara, Akito et al. | 1999
- 6629
-
Semiconductors - Fast Deposition of Microcrystalline Silicon Using High-Density SiH4 Microwave PlasmaShirai, Hajime et al. | 1999
- 6636
-
Semiconductors - Effective Segregation Coefficient of Tellurium in ZnSe1-xTex and BeyZn1-ySe1-x Tex Bulk Crystals Grown Using Traveling Solvent MethodMaruyama, Kenji et al. | 1999
- 6640
-
Semiconductors - Band Line-up of InAsP-InAlGaAs Quantum WellAnan, Takayoshi et al. | 1999
- 6645
-
Semiconductors - High-Quality GaAsxP1-x-In0.13Ga0.87P Quantum Well Structure Grown on Si Substrate with a Very Few Threading DislocationsFujimoto, Yasuhiro et al. | 1999
- 6650
-
Semiconductors - Effect of Donor Space Charge on Electron Capture Processes in Quantum Well Infrared PhotodetectorsRyzhii, Maxim et al. | 1999
- 6654
-
Semiconductors - Theoretical Study of Recharging Instability in Quantum Well Infrared PhotodetectorsKhmyrova, Irina et al. | 1999
- 6659
-
Semiconductors - Surface Phonons, Electronic Structure and Chemical Reactivity of Diamond (100)(2 x 1) SurfaceHossain, Md Zakir et al. | 1999
- 6667
-
Semiconductors - A Hierarchical Study of Even-Denominator Filling Fractions in Quantum Hall StructureYi, Sam Nyung et al. | 1999
- 6670
-
Superconductors - Slot Antenna Coupled YBa2Cu3O7-d Josephson Mixers for Millimeter Wave RadiationHasegawa, Akihisa et al. | 1999
- 6674
-
Superconductors - Recovery Treatment of EuBa2Cu3O7-d Thin Films with Activated Oxygen PlasmaMichikami, Osamu et al. | 1999
- 6681
-
Superconductors - Characteristics of NdBa2Cu3O7-d Josephson Junctions Fabricated by Deca-Nanoscale Focused Ion BeamOhnishi, Katsu et al. | 1999
- 6687
-
Magnetism - Red Shift of Faraday Rotation in Thin Films of Completely Bismuth-Substituted Iron Garnet Bi3Fe5O12Chern, Ming-Yau et al. | 1999
- 6690
-
Magnetism - Artificial Control of Spin Order and Magnetic Properties in LaCrO3-LaFeO3 SuperlatticesUeda, Kenji et al. | 1999
- 6694
-
Magnetism - Magneto-Optical Spectra in Co-MgO, Ni-MgO, Co-Ag and Ni-Ag MultilayersSato, Hideki et al. | 1999
- 6699
-
Magnetism - Transverse Biased Initial Susceptibility Measurements of Magnetization Reversal in Fe-MgO(100) Thin FilmsContreras, Carmen et al. | 1999
- 6703
-
Magnetism - Radical Formation of Lithium and Magnesium Citrates for Electron Spin Resonance DosimetryHassan, Gamal M. et al. | 1999
- 6711
-
Magnetism - Magnetization Reversal in Patterned Permalloy Single Domain Elements (Short Note)Wu, Jong-Ching et al. | 1999
- 6713
-
Optics and Quantum Electronics - Nanometer Level Resolving Near Field Optical Microscope under Optical Feedback in the Observation of a Single-String Deoxyribo Nucleic AcidMaheswari Rajagopalan, Uma et al. | 1999
- 6721
-
Optics and Quantum Electronics - Ultrathin-film Local Oscillator for Determination of Complex Components of Second-Order Nonlinear SusceptibilityKajikawa, Kotaro et al. | 1999
- 6729
-
Optics and Quantum Electronics - High-Speed and High-Power 1.3mm InGaAsP-InP Selective Proton-Bombarded Buried Crescent Lasers with Optical Field Attenuation RegionsZhang, Baijun et al. | 1999
- 6732
-
Optics and Quantum Electronics - Effects of Post-Annealing in H2S on Photo- and Electroluminescence Properties of SrS:Ce Thin FilmMorishita, Takashi et al. | 1999
- 6735
-
Optics and Quantum Electronics - Performance Improvement of a Discharge-Pumped ArF Excimer Laser by Xenon Gas AdditionKataoka, Naoki et al. | 1999
- 6739
-
Optics and Quantum Electronics - Electrooptic Response of Reflective-Mode, p-4-Twisted-Nematic Liquid Crystal Cell in the Voltage Regions Close to and Distant from the Freedericksz Transition ThresholdLee, Geon Joon et al. | 1999
- 6743
-
Optics and Quantum Electronics - A Simulation of Magneto-Optical Signals in Near-Field RecordingSaito, Kimihiro et al. | 1999
- 6750
-
Optics and Quantum Electronics - Optical Emission Spectrum Analyses during Pulsed Laser Deflash of Integrated Circuit PackagesHong, Min-Hui et al. | 1999
- 6754
-
Optics and Quantum Electronics - Spectroscopy of Hard X-Rays (2-15 keV) Generated by Focusing Femtosecond Laser on Metal TargetsFujimoto, Yasushi et al. | 1999
- 6757
-
Optics and Quantum Electronics - High Density Data Recording on Thermally Addressable Liquid Crystal for Three-Dimensional Holographic DisplayInoue, Tetsuhiko et al. | 1999
- 6762
-
Optics and Quantum Electronics - A Novel Blue Light Emitting Diode Using Tris(2,3-methyl-8- hydroxyquinoline) Aluminum(III) as Emitter (Short Note)Yu, Junsheng et al. | 1999
- 6764
-
Optics and Quantum Electronics - Optical Measurement of a Refractive Index for Large Sphere via Scattering (Short Note)Yi, Soung-soo et al. | 1999
- 6766
-
Optics and Quantum Electronics - Phase-locked Timing Extraction from 40 Gbps Optical Signal using Harmonically Mode-locked Er-doped Fiber Ring Laser (Short Note)Kim, Dong Hwan et al. | 1999
- 6768
-
Optical Properties of Condensed Matter - Time-of-Flight Photocarrier Mobility in Langmuir-Blodgett Films of Regioregular Poly(3-hexylthiophene)Malhotra, Bansi D. et al. | 1999
- 6772
-
Optical Properties of Condensed Matter - Refractive Index Changes of Doped Polymer Films Induced by the Photoelimination of Meso-Ionic Heterocyclic Compounds with and without a Sulfur AtomMurase, Seiichiro et al. | 1999
- 6777
-
Electrical Properties of Condensed Matter - Theoretical Investigation of Charge-Up Dynamics in Teflon Film Induced by Electron BeamPalov, Alexandre et al. | 1999
- 6782
-
Electrical Properties of Condensed Matter - Thermal Stability of Photostimulated Luminescence Centers in BaFBr and BaFBr:Eu2+ Single CrystalsOhnishi, Akimasa et al. | 1999
- 6791
-
Electrical Properties of Condensed Matter - Effect of Ozone Annealing on the Charge Trapping Property of Ta2O5-Si3N4-P-Si Capacitor Grown by Low-pressure Chemical Vapor DepositionKato, Hiromitsu et al. | 1999
- 6797
-
Electrical Properties of Condensed Matter - Improvement of Quality Value and Shift of Tf Value of BiNbO4 Ceramics with Addition of CuO-V2O5 MixturesYang, Cheng-Fu et al. | 1999
- 6801
-
Electrical Properties of Condensed Matter - Pt and RuO2 Bottom Electrode Effects on Pb(Zr,Ti)O3 Memory CapacitorsPark, Young et al. | 1999
- 6807
-
Electrical Properties of Condensed Matter - Preparation and Electrical Properties of Rhombohedral Pb(ZrxTi1-x)O3 Thin Films by RF Magnetron Sputtering MethodWang, Wensheng et al. | 1999
- 6812
-
Electrical Properties of Condensed Matter - Dielectric and Electrical Characteristics of Titanium-Modified Ta2O5 Thin Films Deposited on Nitrided Polysilicon by Metalorganic Chemical Vapor DepositionChang, Chich Shang et al. | 1999
- 6817
-
Electrical Properties of Condensed Matter - Enhanced Dielectric Properties in SrTiO3-BaTiO3 Strained Superlattice Structures Prepared by Atomic-Layer Metalorganic Chemical Vapor DepositionWang, Zaiyang et al. | 1999
- 6821
-
Electrical Properties of Condensed Matter - Sintering Behavior and Microwave Dielectric Properties of (Ca, La)(Ti, Al)O3 CeramicsMoon, Jong Ha et al. | 1999
- 6827
-
Structure and Mechanical and Thermal Properties of Condensed Matter - Electrooptical Properties of Dual-Frequency Cholesteric Liquid Crystal Reflective Display and Drive SchemeXu, Ming et al. | 1999
- 6831
-
Structure and Mechanical and Thermal Properties of Condensed Matter - Pulse Crosstalk Analysis of Bondwires in High-Speed Plastic PackagesYun, Sang-Ki et al. | 1999
- 6836
-
Structure and Mechanical and Thermal Properties of Condensed Matter - Response of Longitudinal Waves Normally Impinging upon Layered Chiral MediaRo, Ruyen et al. | 1999
- 6840
-
Structure and Mechanical and Thermal Properties of Condensed Matter - Evaluation and Countermeasures of Convective Heat Transfer on Thermal Conductivity Measurement Using the Peltier Effect and Application to Supercritical CO2Chen, Zai-hua et al. | 1999
- 6846
-
Surfaces, Interfaces, and Films - Low-Resistivity Highly Transparent Indium-Tin-Oxide Thin Films Prepared at Room Temperature by Synchrotron Radiation AblationAkagi, Yoshihiro et al. | 1999
- 6851
-
Surfaces, Interfaces, and Films - Cleaning of Ge(110) Surfaces Using an Excimer LampIchikawa, Toshihiro et al. | 1999
- 6855
-
Surfaces, Interfaces, and Films - Theoretical Estimation of the Energy Differences among OH-, F-, and H-terminations of the Si SurfaceHoshino, Tadatsugu et al. | 1999
- 6860
-
Surfaces, Interfaces, and Films - Nucleation and Growth of Cu Adsorbates on Hydrogen-Terminated Si(111) Surface in SolutionHara, Ken-ichi et al. | 1999
- 6864
-
Surfaces, Interfaces, and Films - Characteristics and Ferroelectric Properties of Pb(Zr, Ti)O3 Capacitors with Pt-La0.5Sr0.5Co1.0O3 Top and La0.5Sr0.5Co1.0O3-SrTiO3-Pt- SrTiO3 Bottom ElectrodesFurusawa, Yoshikazu et al. | 1999
- 6873
-
Surfaces, Interfaces, and Films - Homogeneous Growth of Zinc Oxide WhiskersSaitoh, Hidetoshi et al. | 1999
- 6878
-
Surfaces, Interfaces, and Films - Growth Modes of Nd Deposited on Mo(110) SurfaceJo, Sadaharu et al. | 1999
- 6882
-
Surfaces, Interfaces, and Films - Target for a Pb(Zr,Ti)O3 Thin Film Deposited at a Low Temperature Using a Quasi-Metallic Mode of Reactive SputteringKim, Je-Deok et al. | 1999
- 6887
-
Nuclear Science, Plamas, and Electric Discharges - Ion Collection from Photoionized Plasma with a Wire Electrode in a Weak Magnetic FieldAdachi, Hajime et al. | 1999
- 6890
-
Nuclear Science, Plamas, and Electric Discharges - Two-Dimensional Fluid Simulation and Langmuir Probe Measurement of a Planar Inductively Coupled Oxygen PlasmaYoon, Hyun Jin et al. | 1999
- 6896
-
Nuclear Science, Plamas, and Electric Discharges - Formation of C2 Radicals in High-Density C4F8 Plasmas Studied by Laser-Induced FluorescenceSuzuki, Chihiro et al. | 1999
- 6902
-
Nuclear Science, Plamas, and Electric Discharges - An Open-Cavity Electron Cyclotron Resonance Plasma-Ion SourceNing, Fung-Truen et al. | 1999
- 6908
-
Nuclear Science, Plamas, and Electric Discharges - Possibility of Submillimeter Slow Surface Wave Resonance in a Two-Layer Parallel-Plate Waveguide Containing n-Type or p-Type InSb Slab (Short Note)Yodokawa, Shinichi et al. | 1999
- 6910
-
Atoms, Molecules, and Chemical Physics - Inelastic Collision Processes of Methane and Ethane Molecules at a Pt(111) Surface Studied by Molecular Beam Scattering TechniquesYagyu, Shinjiro et al. | 1999
- 6915
-
Atoms, Molecules, and Chemical Physics - Electroluminescent Properties of a Novel s*-p* Conjugated Polymer, Poly(1,1-(2,3,4,5-tetraphenylsilole))Xu, Yonghua et al. | 1999
- 6919
-
Instrumentation, Measurement, and Fabrication Technology - A Direct Determination Technique for Azimuth Alignment in Photoelastic Modulation EllipsometryChao, Yu-Faye et al. | 1999
- 6923
-
Instrumentation, Measurement, and Fabrication Technology - Effects of Halogen Ions on the X-Ray Characteristics of Gd2O2S:Pr Ceramic ScintillatorsNakamura, Ryohei et al. | 1999
- 6926
-
Instrumentation, Measurement, and Fabrication Technology - The Beam Based Alignment Technique for the Measurements of Beam Position Monitors Offsets and Beam Offsets from Quadrupoles in the Pohang Light SourceKim, K.H. et al. | 1999
- 6931
-
Instrumentation, Measurement, and Fabrication Technology - High Efficiency Secondary Electron Detection for the Electron-Beam-Reducing Projection Lithography SystemNakasuji, Mamoru et al. | 1999
- 6936
-
Instrumentation, Measurement, and Fabrication Technology - Spatial Energy Distributions of Sputtered Atoms and Reflected Particles during Kr+ and Ar+ Ion Beam Sputtering of Si and GeLee, Nae-Eung et al. | 1999
- 6942
-
Instrumentation, Measurement, and Fabrication Technology - Characterization of Etching Damage in Cl2-H2- Reactive-Ion-Etching of GaInAs-InP HeterostructureNunoya, Nobuhiro et al. | 1999
- 6947
-
Instrumentation, Measurement, and Fabrication Technology - A GaAs Micro Solar Cell with Output Voltage over 20 VOhsawa, Jun et al. | 1999
- 6952
-
Instrumentation, Measurement, and Fabrication Technology - Nanoscale Patterning of Au Films on Si Surfaces by Atomic Force MicroscopyMoon, Won-chul et al. | 1999
- 6955
-
Erratum - Pragmatical Asymptotical Stability Theorem with Application to Satellite System (38 (1999) 6178)Ge, Zheng-Ming et al. | 1999
- 6957
-
Optical and EUV Lithography - Highly Accurate Process Proximity Correction Based on Empirical Model for 0.18 mn Generation and BeyondKotani, Toshiya et al. | 1999
- 6963
-
Optical and EUV Lithography - Critical Dimension Controllability Evaluation Based on Process Error Distribution for 150 nm DevicesFujimoto, Masashi et al. | 1999
- 6968
-
Optical and EUV Lithography - Application of Large-Scale Binary Optical Elements to High-Resolution Projection Optics Used for MicrolithographyUnno, Yasuyuki et al. | 1999
- 6976
-
Optical and EUV Lithography - High-Precision Binary Optical Element Fabricated by Novel Self- Aligned ProcessTanaka, Ichiro et al. | 1999
- 6981
-
Optical and EUV Lithography - A Study of Loading Effect during Electron-Beam Exposure and Etching Process in Photomask FabricationChoi, Ji-Hyeon et al. | 1999
- 6985
-
Optical and EUV Lithography - Imaging Characteristics of 0.12 mm Dynamic Random Access Memory Pattern by KrF Excimer Laser LithographyNakao, Shuji et al. | 1999
- 6994
-
Optical and EUV Lithography - Laser LithographyExcimer, Phantom Exposure of Chemically Amplified Resist in Krf et al. | 1999
- 6999
-
Optical and EUV Lithography - Sub-100 nm Lithography with KrF Exposure Using Multiple Development MethodAsano, Masafumi et al. | 1999
- 7004
-
Optical and EUV Lithography - Application of Zirconium Silicon Oxide Films to an Attenuated Phase-Shifting Mask in ArF LithographyMatsuo, Takahiro et al. | 1999
- 7008
-
Optical and EUV Lithography - Sub-0.10 mm Hole Fabrication Using Bilayer Silylation Process for 193 nm LithographySatou, Isao et al. | 1999
- 7013
-
Optical and EUV Lithography - Development of a 2 kHz F2 Laser for 157 nm LithographgNagai, Shinji et al. | 1999
- 7017
-
Optical and EUV Lithography - Aberration Tolerance for 130 nm Lithography from Viewpoint of Process LatitudeSaito, Takashi et al. | 1999
- 7022
-
Electron and Ion Beam, Lithography - Projection Reduction Exposure with Variable Axis Immersion Lenses (PREVAIL)-A High Throughput E-Beam Projection Approach for Next Generation LithographyPfeiffer, Hans C. et al. | 1999
- 7027
-
Electron and Ion Beam, Lithography - Thermal Characteristics of Scattering Stencil Reticle for Electron Beam StepperMorita, Kenji et al. | 1999
- 7031
-
Electron and Ion Beam, Lithography - Characteristic Variation of Exposure Pattern in Cell-Projection Electron-Beam LithographyKotera, Masatoshi et al. | 1999
- 7035
-
Electron and Ion Beam, Lithography - Lithography Simulator for Electon Beam-Deep UV Intra-Level Mix & MatchInanami, Ryoichi et al. | 1999
- 7040
-
Electron and Ion Beam, Lithography - Novel Alignment Method for Planarized Substrates in Electron Beam LithographyYamamoto, Jiro et al. | 1999
- 7046
-
Electron and Ion Beam, Lithography - Low-Energy E-Beam Proximity Lithography (LEEPL): Is the Simplest the Best?Utsumi, Takao et al. | 1999
- 7052
-
Electron and Ion Beam, Lithography - Effect of Chelating Agents on High Resolution Electron Beam Nanolithography of Spin-Coatable Al2O3 Gel FilmsSaifullah, Mohammad S.M. et al. | 1999
- 7059
-
X-Ray Lithography - Performance of X-Ray Stepper for Next-Generation LithographyFukuda, Makoto et al. | 1999
- 7065
-
X-Ray Lithography - Alignment Mark Optimization to Reduce Tool- and Wafer-Induced Shift for XRA-1000Ina, Hideki et al. | 1999
- 7071
-
X-Ray Lithography - Development of Highly Accurate X-Ray Mask with High-Density PatternsShimada, Masaru et al. | 1999
- 7076
-
X-Ray Lithography - Optimum Phase Condition for Low-Contrast X-Ray MasksFujii, Kiyoshi et al. | 1999
- 7080
-
X-Ray Lithography - Stress Stability of W-Ti X-Ray Absorber in Patterning ProcessKitamura, Kaeko et al. | 1999
- 7084
-
X-Ray Lithography - Studies on Defect Inspectability and Printability Using Programmed Defect X-Ray MaskWatanabe, Hiroshi et al. | 1999
- 7090
-
X-Ray Lithography - Lithographic Performance of a Chemically Amplified Resist Developed for Synchrotron Radiation Lithography in the Sub-100-nm RegionDeguchi, Kimiyoshi et al. | 1999
- 7094
-
Resist and Process - Characterization of 193 nm Chemically Amplified Resist during Post Exposure Bake and Post Exposure DelayLee, Eun-Mi et al. | 1999
- 7099
-
Resist and Process - Photoacid Structure Effects on Environmental Stability of 193 nm Chemically Amplified Positive ResistsYoshino, Hiroshi et al. | 1999
- 7103
-
Resist and Process - Design Concepts of Single-Layer Resists for Vacuum Ultraviolet LithographyKishimura, Shinji et al. | 1999
- 7109
-
Resist and Process - Theoretical Calculation of Photoabsorption of Various Polymers in an Extreme Ultraviolet Region (Review Paper)Matsuzawa, Nobuyuki N. et al. | 1999
- 7114
-
Resist and Process - A New Approach to Reducing Line-Edge Roughness by Using a Cross-Linked Positive-Tone ResistYamaguchi, Toru et al. | 1999
- 7119
-
Etching and Deposition - Contact Hole Etch Scaling toward 0.1 mmAoi, Nobuo et al. | 1999
- 7122
-
Etching and Deposition - Study on the Properties of Interlayer Low Dielectric Polyimide during Cl-Based Plasma Etching of AluminumKim, Sang Hoon et al. | 1999
- 7126
-
Etching and Deposition - Detection of Metastable Chlorine Ions in Time-Modulated Plasma by Time Resolved Laser-Induced FluorescenceKumagai, Shinya et al. | 1999
- 7131
-
Etching and Deposition - High-Speed Maskless Laser Patterning of Thin Films for Giant MicroelectronicsYavas, Oguz et al. | 1999
- 7135
-
Beam Induced Reaction - Conditions for Fabrication of Highly Conductive Wires by Electron-Beam-Induced DepositionHiroshima, Hiroshi et al. | 1999
- 7140
-
Beam Induced Reaction - Structure Study of Si Nanocrystals Formed by Electron-Induced Reduction of SiO2 at High TemperatureTakeguchi, Masaki et al. | 1999
- 7144
-
Beam Induced Reaction - Electron Beam Doping (Superdiffusion) in Damage-Free Regions of Semiconductors by the Kick-Out Mechanism (Secondary-Ion Mass Spectrometer and Photoluminescence Measurements)Wada, Takao et al. | 1999
- 7148
-
Beam Induced Reaction - Single-Crystalline CoSi2 Layer Formation by Focused Ion Beam SynthesisHausmann, Stephan et al. | 1999
- 7151
-
Beam Induced Reaction - Focused Ion Beam Process for Formation of a Metal-Insulator-Metal Double Tunnel JunctionNakayama, Masayoshi et al. | 1999
- 7155
-
Metrology and Inspection - Tip-Scanning Dynamic Force Microscope Using Piezoelectric Cantilever for Full Wafer InspectionChu, Jiaru et al. | 1999
- 7159
-
Metrology and Inspection - Investigation of Scanning Electron Microscope Overlay MetrologyKoike, Toru et al. | 1999
- 7164
-
Metrology and Inspection - Optimization of Sample Plan for Overlay and Alignment Accuracy ImprovementHong, Jinseog et al. | 1999
- 7168
-
Metrology and Inspection - Voltage Contrast Defect Inspection of Contacts and Vias for Deep Quarter Micron DevicesYamazaki, Yuichiro et al. | 1999
- 7173
-
Metrology and Inspection - Analysis of the Spin Polarization of Secondary Electrons Emitted from Permalloy PolycrystalsTamura, Keiji et al. | 1999
- 7176
-
Metrology and Inspection - Dynamic Simulation of Electron-Beam-Induced Chargingup of InsulatorsKotera, Masatoshi et al. | 1999
- 7180
-
Microsystem and Field Emitter - Microfabricated Dynamic Scanning Force Microscope Using a Three Dimensional Piezoelectric T-shape ActuatorChu, Jiaru et al. | 1999
- 7185
-
Microsystem and Field Emitter - Fabrication of Micromechanical Tunneling Probes and Actuators on a Silicon ChipToshiyoshi, Hiroshi et al. | 1999
- 7190
-
Microsystem and Field Emitter - Two-Dimensional Control of Shape-Memory-Alloy Actuators for Aligning a Si Micromachined Pinhole of Spatial FilterSasaki, Minoru et al. | 1999
- 7194
-
Microsystem and Field Emitter - Fatigue Tests of Ni-P Amorphous Alloy Microcantilever BeamsMaekawa, Satoshi et al. | 1999
- 7199
-
Microsystem and Field Emitter - Modeling the Impact of Varied Surface Topologies on Irregular Boron Diffusion ProfilesRumpf, Robert et al. | 1999
- 7203
-
Microsystem and Field Emitter - Fabrication of Carbon-Based Field Emitters Using Stamp TechnologyBaba, Akiyoshi et al. | 1999
- 7208
-
Microsystem and Field Emitter - Pulsed Laser Deposition of Diamond-Like Carbon Films on Gated Si Field Emitter Arrays for Improved Electron EmissionYavas, Oguz et al. | 1999
- 7213
-
Microsystem and Field Emitter - Emission Characteristics of Amorphous Silicon Field Emitter Arrays Sealed in a Vacuum PackageGamo, Hidenori et al. | 1999
- 7217
-
Nanofabrication and Nanodevice - Coulomb Interaction Effect Correction in Electron-Beam Block Exposure LithographyTakahashi, Kimitoshi et al. | 1999
- 7222
-
Nanofabrication and Nanodevice - Coulomb Blockade Phenomena in Si Metal-Oxide-Semiconductor Field-Effect Transistors with Nano-Scale Channels Fabricated Using Focused-Ion Beam ImplantationKondo, Hiroki et al. | 1999
- 7227
-
Nanofabrication and Nanodevice - Quantum-Dot Cellular Automata: Line and Majority Logic GateSnider, Gregory L. et al. | 1999
- 7230
-
Nanofabrication and Nanodevice - Characteristic Distributions of Narrow Channel Metal-Oxide-Semi- conductor Field-Effect Transistor Memories with Silicon Nanocrystal Floating GatesNagata, Eiji et al. | 1999
- 7233
-
Nanofabrication and Nanodevice - A Novel Nanoscale Metal Transistor Fabricated by Conventional PhotolithographyFukushima, Kiyoshi et al. | 1999
- 7237
-
Nanofabrication and Nanodevice - Fabricated by Micromachining a Silicon-on-Insulator SubstrateSilicon Nanowire, Electrical Characteristics of Air-Bridge-Structured et al. | 1999
- 7241
-
Nanofabrication and Nanodevice - High Resolution Transmission Electron Microscopy Study on the Structure of Ge Nanoparticles by Using an Ultrahigh Vacuum-Molecular Beam Epitaxy-Transmission Electron Microscope SystemWu, Yuan et al. | 1999
- 7247
-
Nanofabrication and Nanodevice - Novel Process for Fabricating Nanodevices Consisting of Carbon NanotubesNishijima, Hidehiro et al. | 1999
- 7253
-
Nanofabrication and Nanodevice - Fabrication of Photonic Crystals Consisting of Si Nanopillars by Plasma Etching Using Self-Formed MasksTada, Tetsuya et al. | 1999
- 7257
-
Nanofabrication and Nanodevice - Nano-Structure Fabrication and Manipulation by the Cantilever Oscillation of an Atomic Force MicroscopeHyon, Chan Kyeong et al. | 1999
- 7260
-
Nanofabrication and Nanodevice - Review Paper - Patterning and Functionalizing Self-Assembled MonolayersMizutani, Wataru et al. | 1999
- 7264
-
Nanofabrication and Nanodevice - Manipulations of Densities and Sizes during Self-Assembling Quantum Dots in Metal-Organic Vapour Phase EpitaxySeifert, Werner et al. | 1999
- 7268
-
Nanofabrication and Nanodevice - 63-nm-Pitch Pit Pattern Fabricated on Polycarbonate Surface by Direct NanoprintingYokoo, Atsushi et al. | 1999
- 7272
-
Nanofabrication and Nanodevice - Novel Mold Fabrication for Nano-Imprint Lithography to Fabricate Single-Electron Tunneling DevicesHirai, Yoshihiko et al. | 1999
-
Letters - Superconductors - Fabrication of YBa2Cu3O7 Step-Edge Junctions on Sapphire SubstratesKim, In-Seon et al. | 1999
-
Letters - Atoms, Molecules, and Chemical Physics - Electroluminescence Properties of Three-Layered Organic Light-Emitting Diodes with a Layer of Tetraphenylchlorin or TetraphenylporphineSakakibara, Youichi et al. | 1999
-
Letters - Atoms, Molecules, and Chemical Physics - Tunable Optical Stop Band Utilizing Thermochromism of Synthetic Opal Infiltrated with Conducting PolymerSatoh, Shigenori et al. | 1999
-
Letters - Instrumentation, Measurement, and Fabrication Technology - Soft X-Ray Dark-Field Imaging Microscope with Wolter-Type Grazing-Incidence MirrorsTakano, Hidekazu et al. | 1999
-
Letters - Semiconductors - Specular Surface Morphology of 4H-SiC Epilayers Grown on (1120) FaceChen, Zhi Ying et al. | 1999
-
Letters - Semiconductors - Improved Efficiency of CuInS2-Based Solar Cells without Potassium Cyanide ProcessWatanabe, Takayuki et al. | 1999
-
Letters - Structure and Mechanics and Thermed Properties of Condensed Matter - Wide Viewing Angle and Fast Response Time Characteristics of Nematic Liquid Crystal Using Novel Vertical-Alignment-1-4p Cell Mode on Homeotropic Alignment LayerSeo, Dae-Shik et al. | 1999
-
Letters - Surfaces, Interfaces, and Films - Studies of Ir-Ta-O as High Temperature Stable Electrode Material and Its Application for Ferroelectric SrBi2Ta2O9 Thin Film DepositionZhang, Fengyan et al. | 1999
-
Letters - Surfaces, Interfaces, and Films - Imaging the Internal Structure of Recording Marks on an Optical Disc by Internal Reflection Scanning Near-Field Optical MicroscopySchüttler, Martin et al. | 1999
-
Contents of Oyo Buturi| 1999
-
Letters - Semiconductors - Effect of Underlayers on the Morphology and Orientation of Aluminum Films Prepared by Chemical Vapor Deposition Using DimethylaluminumhydrideSugiyama, Masakazu et al. | 1999
-
Letters - Structure and Mechanical and Thermal Properties of Condensed Matter - A Simple and Material Independent Method for the Determination of Anchoring Properties of Rubbed Polyimide SurfacesAcharya, Bharat R. et al. | 1999
-
Express Letters - Growth and Characterization of the Isotopically Enriched 28Si Bulk Single CrystalTakyu, Ken-Ichiro et al. | 1999
-
Express Letters - Production Considerations for Europium-152 Teletherapy Sources Including Design of a Source Capsule with Intrinsic Beam-Hardening CapabilityAdelman, Stuart Lee et al. | 1999
-
Letters - Semiconductors - Recharging Instability and Periodic Domain Structures in Multiple Quantum Well Infrared PhotodetectorsRyzhii, Maxim et al. | 1999
-
Application Form for Publication in JJAP| 1999
-
Letters - Semiconductors - Novel High-Q Solenoidal Inductor Using Bondwires for GaAs Monolithic Microwave Integrated Circuits (MMICs)Lee, Hai-Young et al. | 1999
-
Letters - Optics and Quantum Electronics - Photonic Crystal Using Anodic Porous AluminaMasuda, Hideki et al. | 1999
-
Express Letters - Microphase Separation in Dehydrated N-isopropylacrylamide-sodium Acrylate GelSugiyama, Masaaki et al. | 1999
-
Letters - Optics and Quantum Electronics - Improvement of Fluorescence Characteristics of Er3+-Doped Fluoride Glass by Ce3+ CodopingMeng, Zhicong et al. | 1999
-
Letters - Electrical Properties of Condensed Matter - Capacitance Dispersion in n-LT-i-p GaAs Structures with the Low-Temperature Layers Grown at Different TemperaturesChen, Jenn-Fang et al. | 1999
-
Letters - Semiconductors - Temperature-Dependent Characteristics of the Inverted Delta-Doped V-Shaped InGaP-InGa1-xAs-GaAs Pseudomorphic TransistorsChanc, Wen-Lung et al. | 1999
-
Letters - Surfaces, Interfaces, and Films - Effects of Chemical Interaction between Ta and SiOF on the Crystallinity of Cu and Ta in Cu-Ta-SiOF FilmsLee, Kyoung-Woo et al. | 1999
-
Cumulative Author Index of Volume 38, 1999, Part 1| 1999
-
Express Letters - Regulated Epitaxy of YBa2Cu3O7-d by Atomic Control of Step Arrays on Vicinal SrTiO3(100) SubstratesNie, Jia-Cai et al. | 1999
-
Letters - Instrumentation, Measurement, and Fabrication Technology - Room-Temperature Bonding of Si Wafers to Pt Films on SiO2 or LiNbO3 Substrates Using Ar-Beam Surface ActivationTakagi, Hideki et al. | 1999
-
Cumulative Author Index of Volume 38, 1999, Part 2| 1999
-
Letters - Semiconductors - Electron-Stimulated Desorption of a Br-Chemisorbed Si(111)-7x7 Surface by Using a Scanning Tunneling MicroscopeMochiji, Kozo et al. | 1999
-
Letters - Nuclear, Science, Plasmas, and Electric Discharges - Spatial Distribution Measurement of Absolute Densities of CF and CF2 Radicals in a High Density Plasma Reactor Using a Combination of Single-Path Infrared Diode Laser Absorption Spectroscopy and Laser-Induced Fluorescence TechniqueNakamura, Masayuki et al. | 1999
-
Letters - Semiconductors - The Combined Effects of Nitrogen Implantation at S-D Extension and N2O Oxide on 0.18 mm N- and P-Metal Oxide Field Effect Transistors (MOSFETS)Chao, Tien-Sheng et al. | 1999
-
Letters - Optics and Quantum Electronics - Improvement of Decay Properties of a Liquid Crystal Microlens with a Divided Electrode StructureYe, Mao et al. | 1999
-
Letters - Structure and Mechanics and Thermed Properties of Condensed Matter - Anisotropic Molecular Orientation of Poly (4, 4'-oxydiphenylene-1, 2, 3, 4-cyclobutanetetracarboximide) Films Irradiated by Linearly Polarized UV LightSakamoto, Kenji et al. | 1999
-
Letters - Atoms, Molecules, and Chemical Physics - Sharp Red Organic Light-Emitting Devices with Enhanced EfficiencyJabbour, Ghassan E. et al. | 1999
-
Letters - Structure and Mechanical and Thermal Properties of Condensed Matter - Morphology of (YxGd1-x)BO3:Eu Phosphor Particles Prepared by Spray Pyrolysis from Aqueous and Colloidal SolutionsKang, Yun Chan et al. | 1999
-
Letters - Semiconductors - n-Type Control by Sulfur Ion Implantation in Homoepitaxial Diamond Films Grown by Chemical Vapor DepositionHasegawa, Masataka et al. | 1999
-
Express Letters - A 1.3-mm GaInNAs Laser Diode with a Lifetime of over 1000 HoursKondow, Masahiko et al. | 1999
-
Letters - Optics and Quantum Electronics - Time Response of One-Dimensional Photonic Crystals with a Defect Layer Made of Semiconductor Quantum DotsTsurumachi, Noriaki et al. | 1999
-
Express Letters - Multivacancy and Its Hydrogen Decoration in Crystalline SiAkiyama, Toru et al. | 1999
-
Letters - Optics and Quantum Electronics - Spatial Phase Information Transmission through Single-Mode Fibers by Coherence Function Shaping of Low Coherent LightTeramura, Yuichi et al. | 1999
-
Letters - Semiconductors - Dislocation-Free Czochralski Silicon Crystal Growth without the Dislocation-Elimination-Necking ProcessHoshikawa, Keigo et al. | 1999
-
Express Letters - Diels-Alder Reaction on the Clean Diamond (100)2 x 1 SurfaceHossain, Md Zakir et al. | 1999
-
Express Letters - High Quantum Efficiency in Organic Light-Emitting Devices with Iridium-Complex as a Triplet Emissive CenterTsutsui, Tetsuo et al. | 1999
-
Letters - Instrumentation, Measurement, and Fabrication Technology - Development of an X-Ray Interferometer for High-Resolution Phase-Contrast X-Ray ImagingHirano, Keiichi et al. | 1999
-
Letters - Superconductors - Superlattice in YBa2Cu3Ox Single Crystal Induced by Absorption of Water VaporEdo, Shoichi et al. | 1999
-
Letters - Semiconductors - CuAu-Type Ordering Self-Formed by Growing GaP-InP Short-Period Superlattices on GaAs (011) SubstrateKim, Seong-Jin et al. | 1999
-
Letters - Electrical Properties of Condensed Matter - Etching Behavior and Damage Recovery of SrBi2Ta2O9 Thin FilmsLee, Won-Jae et al. | 1999
-
Contents of Journal of the Physical Society of Japan| 1999
-
Letters - Surfaces, Interfaces, and Films - Dynamic Force Microscopy Investigations of C60 Deposited on Si(111) SurfaceKobayashi, Kei et al. | 1999
-
Letters - Optical Properties of Condensed Matter - Thermal Cracking Effects of CeCl3 Dopant on Blue Electroluminescent Properties in SrGa2S4:Ce Thin FilmsTanaka, Katsu et al. | 1999
-
Letters - Optical Properties of Condensed Matter - Optical Transitions of the Mg Acceptor in GaNHofmann, Detlev M. et al. | 1999
-
Letters - Structure and Mechanics and Thermed Properties of Condensed Matter - Anomaly in Rotational Diffusion of Photophysical Probe Near Volume Phase Transition of Copoly(Acrylamide-Acrylic Acid) Gels: Steady State and Time-Resolved Fluorescence StudyAnnaka, Masahiko et al. | 1999
-
Letters - Surfaces, Interfaces, and Films - Initial Oxygen Interaction between Ge(100) and Ge-Si(100) Surfaces Compared by Scanning Tunneling MicroscopyFukuda, Tsuneo et al. | 1999
-
FOREWORD| 1999
-
Letters - Surfaces, Interfaces, and Films - Characterization of Sputtered TiNi Shape Memory Alloy Thin FilmsSurbled, Patrick et al. | 1999
-
Letters - Semiconductors - Improved Electrical Characteristics of Al2O3-InP Structure by Combination of Sulfur Passivation and Forming Gas AnnealingMorikita, Shinya et al. | 1999
-
Letters - Semiconductors - Microscopic Investigation of Al0.43Ga0.57N on SapphireKashima, Takayuki et al. | 1999
-
Letters - Instrumentation, Measurement, and Fabrication Technology - Self-Organized Gold Nanodots Array on a Silicon Substrate and Its Mechanical StabilityTsutsui, Gen et al. | 1999
-
Letters - Electrical Properties of Condensed Matter - Surface Morphology and Dielectric Properties of Stoichiometric and Off-Stoichiometric SrTiO3 Thin Films Grown by Molecular Beam EpitaxyOta, Hiroyuki et al. | 1999
-
Letters - Instrumentation, Measurement, and Fabrication Technology - High-Performance Fiber-Optic Fabry-Perot Pressure Sensor with Si3N4-SiO2-Si3N4 DiaphragmPark, Jaehee et al. | 1999
-
Letters - Magnetism - Proposal of an Alternative Technique for High Density Data StorageWu, Yihong et al. | 1999
-
Letters - Semiconductors - Strategy for Off-Current Suppression in Thin-Film TransistorsMüller, Heinz-Olaf et al. | 1999
-
Letters - Instrumentation, Measurement, and Fabrication Technology - Surface Vibration with a Double Period in Piezoelectric Ceramic on Stainless SteelSeto, Takatoshi et al. | 1999
-
Letters - Surfaces, Interfaces, and Films - Surface Microroughness Observed during Wet Etching of Silicon Dioxide with High Electric Field StressYamabe, Kikuo et al. | 1999
-
Letters - Surfaces, Interfaces, and Films - Fluorinated Carbon Films with Low Dielectric Constant Made from Novel Fluorocarbon Source Materials by RF Plasma Enhanced Chemical Vapor DepositionLungu, Cristian Petrica et al. | 1999
-
Express Letters - Strong Carrier Localization in GaInN-GaN Quantum Dots Grown by Molecular Beam EpitaxyDamilano, Benjamin et al. | 1999
-
Letters - Instrumentation, Measurement, and Fabrication Technology - Ultrasound-Assisted Optical Reflectometry in Highly Scattering MediaHisaka, Masaki et al. | 1999
-
Letters - Instrumentation, Measurement, and Fabrication Technology - Measurements of Piezoelectric Coefficient of Pb(Zr, Ti)O3 Thin Film Using a Piezoelectric MicrocantileverChu, Jiaru et al. | 1999
-
Letters - Surfaces, Interfaces, and Films - Artificial SrTiO3-SrO Superlattices by Pulsed Laser DepositionIwazaki, Yoshiki et al. | 1999
-
Letters - Nuclear, Science, Plasmas, and Electric Discharges - Enhancement of Negative-Ion-Assisted Silicon Oxidation by Radio-Frequency BiasFujii, Takashi et al. | 1999
-
Letters - Semiconductors - Fabrication and Characterization of Artificial Crystal Originated ParticlesBearda, Twan et al. | 1999
-
Letters - Optics and Quantum Electronics - Wavelength Tunable Polarization Mode Converter Utilizing Strain-Optic Effects in Ti:LiNbO3Jung, Hong Sik et al. | 1999
-
Letters - Semiconductors - Barrier Height Enhancement of Ni-n-Type InP Schottky Contact Using a Thin Praseodymium InterlayerJeng, Ming-Jer et al. | 1999
-
Letters - Surfaces, Interfaces, and Films - Time-Resolved Emission from Self-Assembled Single Quantum Dots Using Scanning Near-Field Optical MicroscopeOno, Madoka et al. | 1999