Lithographic evaluation of the hydrogenated amorphous carbon film (Englisch)
- Neue Suche nach: Martino, R.
- Neue Suche nach: Martino, R.
- Neue Suche nach: Ferguson, R.
- Neue Suche nach: Molless, A.
- Neue Suche nach: Liebmann, L.
- Neue Suche nach: Neisser, M.
- Neue Suche nach: Weed, J.
- Neue Suche nach: Callegari, S.
In:
Journal of vacuum science and technology / B
;
13
, 6
; 2949-2953
;
1995
-
ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:Lithographic evaluation of the hydrogenated amorphous carbon film
-
Beteiligte:Martino, R. ( Autor:in ) / Ferguson, R. / Molless, A. / Liebmann, L. / Neisser, M. / Weed, J. / Callegari, S.
-
Erschienen in:Journal of vacuum science and technology / B ; 13, 6 ; 2949-2953
-
Verlag:
- Neue Suche nach: Inst.
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Erscheinungsort:New York, NY
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Erscheinungsdatum:1995
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ISSN:
-
ZDBID:
-
Medientyp:Aufsatz (Zeitschrift)
-
Format:Print
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Sprache:Englisch
- Neue Suche nach: 51.30 / 50.94 / 53.55 / 53.56
- Weitere Informationen zu Basisklassifikation
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Schlagwörter:
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Klassifikation:
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Datenquelle:
Inhaltsverzeichnis – Band 13, Ausgabe 6
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