Plasma properties determined with induction loop probes in a planar inductively coupled plasma source (Englisch)
- Neue Suche nach: Meyer, J.A.
- Neue Suche nach: Meyer, J.A.
- Neue Suche nach: Mau, R.
- Neue Suche nach: Wendt, A.E.
In:
Journal of applied physics
;
79
, 3
; 1298-1302
;
1996
-
ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:Plasma properties determined with induction loop probes in a planar inductively coupled plasma source
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Beteiligte:
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Erschienen in:Journal of applied physics ; 79, 3 ; 1298-1302
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Verlag:
- Neue Suche nach: AIP
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Erscheinungsort:Melville, NY
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Erscheinungsdatum:1996
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ISSN:
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ZDBID:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
- Neue Suche nach: 33.00 / 50.30
- Weitere Informationen zu Basisklassifikation
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 79, Ausgabe 3
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CUMULATIVE AUTHOR INDEX| 1996