Selectivity of nanocavities and dislocations for gettering of Cu and Fe in silicon (Englisch)
- Neue Suche nach: Stritzker, B.
- Neue Suche nach: Stritzker, B.
- Neue Suche nach: Petravic, M.
- Neue Suche nach: Wong-Leung, J.
- Neue Suche nach: Williams, J.S.
In:
Applied physics letters
;
78
, 18
; 2682-2684
;
2001
-
ISSN:
- Aufsatz (Zeitschrift) / Print
-
Titel:Selectivity of nanocavities and dislocations for gettering of Cu and Fe in silicon
-
Beteiligte:
-
Erschienen in:Applied physics letters ; 78, 18 ; 2682-2684
-
Verlag:
- Neue Suche nach: AIP
-
Erscheinungsort:Melville, NY
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Erscheinungsdatum:2001
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ISSN:
-
ZDBID:
-
Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
- Neue Suche nach: 770/3400
- Neue Suche nach: 33.00
- Weitere Informationen zu Basisklassifikation
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Schlagwörter:
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Klassifikation:
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Datenquelle:
Inhaltsverzeichnis – Band 78, Ausgabe 18
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