Assessment of subsurface damage in polished II-VI semiconductors by ion channeling (Englisch)
- Neue Suche nach: Lucca, D.A.
- Neue Suche nach: Lucca, D.A.
- Neue Suche nach: Wetteland, C.J.
- Neue Suche nach: Misra, A.
- Neue Suche nach: Klopfstein, M.J.
- Neue Suche nach: Nastasi, M.
- Neue Suche nach: Maggiore, C.J.
- Neue Suche nach: Tesmer, J.R.
In:
Nuclear instruments & methods in physics research / B
;
219
; 611-617
;
2004
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ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:Assessment of subsurface damage in polished II-VI semiconductors by ion channeling
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Beteiligte:Lucca, D.A. ( Autor:in ) / Wetteland, C.J. / Misra, A. / Klopfstein, M.J. / Nastasi, M. / Maggiore, C.J. / Tesmer, J.R.
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Erschienen in:Nuclear instruments & methods in physics research / B ; 219 ; 611-617
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Verlag:
- Neue Suche nach: Elsevier
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Erscheinungsort:Amsterdam [u.a.]
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Erscheinungsdatum:2004
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ISSN:
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ZDBID:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
- Neue Suche nach: 535/3450
- Neue Suche nach: 33.00
- Weitere Informationen zu Basisklassifikation
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Schlagwörter:
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Klassifikation:
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Datenquelle:
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- 584
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Characterization of dopant profiles produced by ultra-shallow As implantation and spike annealing using medium energy ion scatteringIchihara, S. / Nakagawa, T. / Nitta, M. / Abo, S. / Lohner, T. / Angelov, C. / Ohta, K. / Takai, M. et al. | 2004
- 589
-
TOF-RBS with medium energy heavy ion probe for semiconductor process analysisHayashi, Kei / Takayama, Hirosuke / Ishikawa, Masao / Abo, Satoshi / Lohner, Tivadar / Takai, Mikio et al. | 2004
- 593
-
A combined LEIS/STM study of two types of surface reconstruction of magnetic Fe4N layersGrachev, S.Y. / Gallego, J.M. / Écija, D. / Boerma, D.O. / Gonzalez-Arrabal, R. / Miranda, R. et al. | 2004
- 599
-
Inelastic energy loss and spectrum shape for medium energy He ions undergoing a large-angle single collision with Si(111)-x-SbKido, Y. et al. | 2004
- 599
-
Inelastic energy loss and spectrum shape for medium energy He ions undergoing a large-angle single collision with Si(111)-3x3-SbKido, Y. / Semba, S. / Hoshino, Y. et al. | 2004
- 599
-
Inelastic energy loss and spectrum shape for medium energy He ions undergoing a large-angle single collision with Si(111)-–SbKido, Y. / Semba, S. / Hoshino, Y. et al. | 2004
- 604
-
Using ion beam analysis in determining the mechanisms of cleavage in hydrogen ion implanted SiNastasi, Michael / Höchbauer, Tobias / Verda, Raymond D. / Misra, Amit / Lee, Jung-Kun / Mayer, James W. / Lau, S.S. et al. | 2004
- 611
-
Assessment of subsurface damage in polished II–VI semiconductors by ion channelingLucca, D.A. / Wetteland, C.J. / Misra, A. / Klopfstein, M.J. / Nastasi, M. / Maggiore, C.J. / Tesmer, J.R. et al. | 2004
- 618
-
Virtues and pitfalls in structural analysis of compound semiconductors by the complementary use of RBS/channeling and high resolution X-ray diffractionTuros, A. / Gaca, J. / Wojcik, M. / Nowicki, L. / Ratajczak, R. / Groetzschel, R. / Eichhorn, F. / Schell, N. et al. | 2004
- 626
-
Channeling study of the damage induced in zirconia irradiated with high-energy heavy ionsJagielski, J. / Gentils, A. / Thomé, L. / Nowicki, L. / Garrido, F. / Klaumünzer, S. et al. | 2004
- 631
-
NRA and ERDA investigation of helium retention in SiC as a function of irradiation and annealingSmith, R.J. / Zhang, Y. / Shutthanandan, V. / Bissell, L.J. / Thevuthasan, S. / Jiang, W. / Weber, W.J. et al. | 2004
- 636
-
Lattice location of Mn and fundamental Curie temperature limit in ferromagnetic Ga1−xMnxAsYu, K.M. / Walukiewicz, W. / Wojtowicz, T. / Lim, W.L. / Liu, X. / Dobrowolska, M. / Furdyna, J.K. et al. | 2004
- 642
-
Thermal and dynamic responses of Ag implants in silicon carbideJiang, W. / Weber, W.J. / Shutthanandan, V. / Li, L. / Thevuthasan, S. et al. | 2004
- 647
-
Annealing behavior of Al-implantation-induced disorder in 4H–SiCZhang, Y. / Weber, W.J. / Jiang, W. / Shutthanandan, V. / Thevuthasan, S. / Janson, M. / Hallén, A. et al. | 2004
- 652
-
Effect of ion current density on damage in Al ion implanted SiCBattistig, G. / Garcı́a López, J. / Morilla, Y. / Khánh, N.Q. / Lohner, T. / Petrik, P. / Ramos, A.R. et al. | 2004
- 656
-
Microbeam channeling studies of epitaxial titanate filmsPadmanabhan, Karur R. et al. | 2004
- 662
-
Relationship between damage evolution and Si–H complexes formation in hydrogen implanted SiLee, J.K. / Höchbauer, T. / Averitt, R.D. / Nastasi, M. et al. | 2004
- 666
-
Structural characterization of half-metallic Heusler compound NiMnSbNowicki, L. / Abdul-Kader, A.M. / Bach, P. / Schmidt, G. / Molenkamp, L.W. / Turos, A. / Karczewski, G. et al. | 2004
- 671
-
Ion beam characterization of GaAs1−x−yNxBiy epitaxial layersWei, P. / Tixier, S. / Chicoine, M. / Francoeur, S. / Mascarenhas, A. / Tiedje, T. / Schiettekatte, F. et al. | 2004
- 676
-
A study on radiation damage of IGBTs by 2-MeV electrons at different irradiation temperaturesNakabayashi, M. / Ohyama, H. / Hanano, N. / Kamiya, T. / Hirao, T. / Takakura, K. / Simoen, E. / Claeys, C. et al. | 2004
- 680
-
Heavy ion elastic recoil detection analysis of silicon-rich silica filmsWeijers, T.D.M. / Elliman, R.G. / Timmers, H. et al. | 2004
- 686
-
Reliable ERD analysis of group-III nitrides despite severe nitrogen depletionShrestha, Santosh K. / Butcher, K.Scott A. / Wintrebert-Fouquet, Marie / Timmers, Heiko et al. | 2004
- 693
-
Ion beam analysis of functional layers for CuInSe2 solar cells deposited on polymer foilsSpemann, D / Deltschew, R / Lorenz, M / Butz, T et al. | 2004
- 699
-
RBS ion channeling study of low concentrations of ion implanted samarium in GaNIngram, David C. / Lozykowski, Henryk / Jadwisienczak, Wojciech M. et al. | 2004
- 703
-
Microstructure evolution effects of helium redistribution in as-implanted silicon and Si0.8Ge0.2/Si heterostructuesMörschbächer, M.J. / da Silva, D.L. / Fichtner, P.F.P. / Oliviero, E. / Behar, M. / Zawislak, F.C. / Holländer, B. / Luysberg, M. / Mantl, S. / Loo, R. et al. | 2004
- 708
-
Ion beam analysis of thin doped ZnO layersWielunski, Leszek S. / Hill, D.H. / Quinn, J. / Bartynski, R.A. / Wu, P. / Lu, Y. et al. | 2004
- 713
-
Formation of bubbles and extended defects in He implanted (100) Si at elevated temperaturesda Silva, Douglas L. / Mörschbächer, Marcio J. / Fichtner, Paulo F.P. / Oliviero, Erwan / Behar, Moni et al. | 2004
- 718
-
Radiation damages of InGaAs photodiodes by high-temperature electron irradiationOhyama, H. / Takakura, K. / Nakabayashi, M. / Hirao, T. / Onoda, S. / Kamiya, T. / Simoen, E. / Claeys, C. / Kuboyama, S. / Oka, K. et al. | 2004
- 722
-
Use of micro-PIXE analysis for the identification of contaminants in the metal deposition on a CMS pitch adapterMassi, M. / Giuntini, L. / Fedi, M.E. / Arilli, C. / Grassi, N. / Mandò, P.A. / Migliori, A. / Focardi, E. et al. | 2004
- 727
-
Electrical activation and lattice location of B and Ga impurities implanted in SiRomano, Lucia / Piro, Alberto M. / Napolitani, Enrico / Bisognin, Gabriele / Spada, Aldo / Grimaldi, Maria G. / Rimini, Emanuele et al. | 2004
- 732
-
Structural characterization and oxygen concentration profiling of a Co/Si multilayer structurePiro, A.M. / Romano, L. / Spada, A. / La Via, F. / Grimaldi, M.G. / Rimini, E. et al. | 2004
- 737
-
Optical properties of dense Cu nanoparticle composites fabricated by negative ion implantationTakeda, Y. / Lu, J. / Plaksin, O.A. / Amekura, H. / Kono, K. / Kishimoto, N. et al. | 2004
- 742
-
He-RBS, He-ERDA and heavy ion-ERDA analysis of Si/Ta 70 Å/CoFe 35 Å/HfAlOx/CoFe 35 Å/Ta 30 Å systemsBarradas, N.P. / Matias, V. / Sequeira, A.D. / Soares, J.C. / Kreissig, U. / Wang, J.U. / Freitas, P.P. et al. | 2004
- 742
-
He-RBS, He-ERDA and heavy ion-ERDA analysis of Si/Ta 70 A/CoFe 35 A/HfAlOx/CoFe 35 A/Ta 30 A systemsBarradas, N. P. / Matias, V. / Sequeira, A. D. / Soares, J. C. / Kreissig, U. / Wang, J. U. / Freitas, P. P. et al. | 2004
- 747
-
Ion beam studies of hydrogen implanted Si wafersNurmela, A. / Henttinen, K. / Suni, T. / Tolkki, A. / Suni, I. et al. | 2004
- 751
-
Real-time ERD analysis of hydrogen retention in silicon during ramped thermal annealMeyer, K.A. / Comrie, C.M. / Theron, C. et al. | 2004
- 755
-
Application of nondestructive ion beam analysis to measure variations in the elemental composition of armor materialsPallone, Arthur / Demaree, John / Adams, Jane et al. | 2004
- 759
-
Nitrogen beam RBS for concentration uniformity measurements of SiO2:Au thin layer co-depositionsMuntele, Claudiu I. / Muntele, Iulia C. / Zimmerman, Robert L. / Ila, Daryush et al. | 2004
- 763
-
Ion beam analysis of TiN/Ti multilayers deposited by magnetron sputteringAndrade, E. / Flores, M. / Muhl, S. / Barradas, N.P. / Murillo, G. / Zavala, E.P. / Rocha, M.F. et al. | 2004
- 768
-
Elemental depth profiles of MgB2/Si precursor and superconducting filmsAndrade, E. / Chromik, Š. / Jergel, Mi. / Jergel, Ma. / Falcony, C. / Štrbı́k, V. / Rocha, M.F. et al. | 2004
- 773
-
Thin film nanolaminate analysis by simultaneous heavy ion recoil and X-ray spectrometryHarjunmaa, A. / Sajavaara, T. / Arstila, K. / Kukli, K. / Keinonen, J. et al. | 2004
- 778
-
Formation of shallow junctions through BGe molecular ion implantation and rapid thermal annealingLiang, J.H. / Sang, Y.J. et al. | 2004
- 783
-
Range parameters of Bn cluster ion implantation in siliconLiang, J.H. / Han, H.M. et al. | 2004
- 788
-
The unique role of ion beam analysis in modeling the thermal evolution of hydrogen in Si implanted at doses required for ion cuttingHolland, O.W. et al. | 2004
- 792
-
Carbon doping by ion implantation and C2H6 gas in GaN: Rutherford backscattering/channeling, Raman scattering and photoluminescence studiesHirota, R. / Kushida, K. / Takahashi, Jun / Kuriyama, Kazuo et al. | 2004
- 798
-
Ion beam modification and analysis of metal/polymer bi-layer thin filmsWang, Y.Q. / Curry, M. / Tavenner, E. / Dobson, N. / Giedd, R.E. et al. | 2004
- 804
-
Fluence loss due to Rutherford backscattering for very low energy ion implantation in siliconZhao, Zhiyong / Ng, Che-Hoo / Neil, Ted / Liu, Jinning / Jin, Jianyue et al. | 2004
- 810
-
Atomic transport in insulators under high-flux heavy-ion implantationKishimoto, N. / Plaksin, O.A. / Umeda, N. / Takeda, Y. et al. | 2004
- 815
-
Swift heavy ion induced modification of Si/C60 multilayersSrivastava, S.K. / Kabiraj, D. / Schattat, B. / Carstanjen, H.D. / Avasthi, D.K. et al. | 2004
- 820
-
Temporal evolution of ion implanted CdSe distribution in SiO2 on silicon during annealingGrosshans, I. / Karl, H. / Stritzker, B. et al. | 2004
- 825
-
Non-magnetic to magnetic and non-metal to metal transitions in nickel nanoparticles in SiO2 under heat treatmentAmekura, H. / Kitazawa, H. / Kishimoto, N. et al. | 2004
- 830
-
Dynamics of co-irradiation effects of high-energy ions and photons on nanoparticle precipitation in silica glassOkubo, N. / Kishimoto, N. / Takeda, Y. et al. | 2004
- 836
-
Ion beam analysis for fusion energy researchWampler, W.R. et al. | 2004
- 846
-
Loss of hydrogen from ion irradiated photoresist and a-C:H filmsBaptista, D.L. / Garcia, Irene T.S. / Zawislak, F.C. et al. | 2004
- 851
-
Characterization of Si(100)/HfSiON interfaceSuzuki, M. / Takashima, A. / Koyama, M. / Iijima, R. / Ino, T. / Takenaka, M. et al. | 2004
- 856
-
Study of thin hafnium oxides deposited by atomic layer depositionGanem, J.-J. / Trimaille, I. / Vickridge, I.C. / Blin, D. / Martin, F. et al. | 2004
- 862
-
Study of the nickel-fullerene nano-structured thin filmsVacik, J. / Naramoto, H. / Narumi, K. / Yamamoto, S. / Abe, H. et al. | 2004
- 867
-
Epitaxial re-crystallization of the Ni/MgO(001) interfacesVacik, J. / Naramoto, H. / Yamamoto, S. / Narumi, K. et al. | 2004
- 871
-
Characterization of electroless Au, Pt and Pd contacts on CdTe and ZnTe by RBS and SIMS techniquesRoumié, M. / Hageali, M. / Zahraman, K. / Nsouli, B. / Younes, G. et al. | 2004
- 875
-
Rutherford backscattering spectroscopy of amorphous films of Ag–As–S system prepared by spin-coating techniqueWágner, T. / Kohoutek, T. / Perina, V. / Mackova, A. / Hnatowitz, V. / Wagner, Th. / Kasap, S.O. / Krbal, M. / Frumar, M. / Vlček, Mil. et al. | 2004
- 880
-
Secondary-ion mass spectrometry (SIMS) analysis of catalyst coatings used in microreactorsGnaser, Hubert / Bock, Wolfgang / Rowlett, Elisabeth / Men, Yong / Ziegler, Christiane / Zapf, Ralf / Hessel, Volker et al. | 2004
- 886
-
Ferromagnetic microstructures in highly oriented pyrolytic graphite created by high energy proton irradiationSpemann, D. / Han, K.-H. / Esquinazi, P. / Höhne, R. / Butz, T. et al. | 2004
- 891
-
Ion beam analysis of epitaxial (Mg, Cd)xZn1−xO and ZnO:(Li, Al, Ga, Sb) thin films grown on c-plane sapphireSpemann, D / Kaidashev, E.M / Lorenz, M / Vogt, J / Butz, T et al. | 2004