New etching process for device fabrication using diamond (Unbekannt)
- Neue Suche nach: Hwang, D.S.
- Neue Suche nach: Hwang, D.S.
- Neue Suche nach: Saito, T.
- Neue Suche nach: Fujimori, N.
In:
Diamond and related materials
;
13
, 11-12
; 2207-2210
;
2004
-
ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:New etching process for device fabrication using diamond
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Beteiligte:
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Erschienen in:Diamond and related materials ; 13, 11-12 ; 2207-2210
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Verlag:
- Neue Suche nach: Elsevier
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Erscheinungsort:New York, NY [u.a.]
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Erscheinungsdatum:2004
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ISSN:
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ZDBID:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Unbekannt
- Neue Suche nach: 51.79
- Weitere Informationen zu Basisklassifikation
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Schlagwörter:
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Klassifikation:
BKL: 51.79 Sonstige Werkstoffe -
Datenquelle:
Inhaltsverzeichnis – Band 13, Ausgabe 11-12
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Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
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- 1939
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Fabrication of a submicron source-drain gap for p#8211i#8211p field effect transistors using epitaxial diamond layersKawakami, N. et al. | 2004
- 1944
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Diamond vacuum field emission devicesKang, W.P. / Davidson, J.L. / Wisitsora-at, A. / Wong, Y.M. / Takalkar, R. / Holmes, K. / Kerns, D.V. et al. | 2004
- 1949
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Anodic aluminum oxide template assisted growth of vertically aligned carbon nanotube arrays by ECR-CVDChen, Po-Lin / Chang, Jun-Kai / Kuo, Cheng-Tzu / Pan, Fu-Ming et al. | 2004
- 1954
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- 1959
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The annealing of interstitial-related optical centres in type Ib diamondCollins, A.T. / Dahwich, A. et al. | 2004
- 1963
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Depletion layer in pn-junction of diamond with phosphorus donor and boron acceptorKoide, Yasuo et al. | 2004
- 1967
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- 1971
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- 1975
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- 1984
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Mechanical properties of DLC films prepared inside of micro-holes by pulse plasma CVDYang, X.D. / Saito, T. / Nakamura, Y. / Kondo, Y. / Ohtake, N. et al. | 2004
- 1989
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Properties and potential applications of carbon microcoils/nanocoilsMotojima, S. / Chen, X. / Yang, S. / Hasegawa, M. et al. | 2004
- 1993
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Effect of N doping on properties of diamond-like carbon thin films produced by RF capacitively coupled chemical vapor deposition from different precursorsAnita, V. / Butuda, T. / Maeda, T. / Takizawa, K. / Saito, N. / Takai, O. et al. | 2004
- 1997
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- 2003
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Electroanalytical application of modified diamond electrodesIvandini, Tribidasari A. / Sato, Rika / Makide, Yoshihiro / Fujishima, Akira / Einaga, Yasuaki et al. | 2004
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Diamond-derived microelectrodes array for electrochemical analysisSoh, K.L. / Kang, W.P. / Davidson, J.L. / Basu, S. / Wong, Y.M. / Cliffel, D.E. / Bonds, A.B. / Swain, G.M. et al. | 2004
- 2016
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- 2020
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- 2024
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Fracture observation of polycrystalline diamond film under indentation testIkeda, R. / Hayashi, M. / Yonezu, A. / Ogawa, T. / Takemoto, M. et al. | 2004
- 2031
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- 2037
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Electrical characterization of phosphorus-doped n-type homoepitaxial diamond layersSuzuki, Mariko / Koizumi, Satoshi / Katagiri, Masayuki / Yoshida, Hiroaki / Sakuma, Naoshi / Ono, Tomio / Sakai, Tadashi et al. | 2004
- 2041
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The phosphorous level fine structure in homoepitaxial and polycrystalline n-type CVD diamondHaenen, K. / Nesládek, M. / De Schepper, L. / Kravets, R. / Vaněček, M. / Koizumi, S. et al. | 2004
- 2046
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Requirements for synthetic diamond devices for radiotherapy dosimetry applicationsGuerrero, M.J. / Tromson, D. / Rebisz, M. / Mer, C. / Bazin, B. / Bergonzo, P. et al. | 2004
- 2052
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On the thermionic emission from nitrogen-doped diamond films with respect to energy conversionKoeck, F.A.M. / Garguilo, J.M. / Nemanich, R.J. et al. | 2004
- 2056
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Synthesis of diamond hexagonal nanoplatelets by microwave plasma chemical vapor depositionLu, Chun-An / Chang, Li et al. | 2004
- 2063
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Wireless optical diagnostic apparatus for analyzing diamond thin film CVD process under high gravity conditionsTappero, F. / Abe, Y. / Takagi, Y. / Tanaka, Y. / Maizza, G. et al. | 2004
- 2071
-
Structural investigation of nanocrystalline diamond/amorphous carbon composite filmsPopov, C. / Kulisch, W. / Boycheva, S. / Yamamoto, K. / Ceccone, G. / Koga, Y. et al. | 2004
- 2076
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Nanodiamonds intercalated with metals: structure and diamond-graphite phase transitionsAleksensky, A.E. / Baidakova, M.V. / Yagovkina, M.A. / Siklitsky, V.I. / Vul', A.Ya / Naramoto, H. / Lavrentiev, V.I. et al. | 2004
- 2081
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Effect of bias treatment in the CVD diamond growth on Ir(001)Kono, S. / Takano, T. / Goto, T. / Ikejima, Y. / Shiraishi, M. / Abukawa, T. / Yamada, T. / Sawabe, A. et al. | 2004
- 2088
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Highly oriented diamond growth on SixGe1−x (100) thin filmsChang, Te-Fu / Chang, Li et al. | 2004
- 2092
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Optical characterization of surface roughness of diamond by spectroscopic ellipsometryKumagai, N. / Yamasaki, S. / Okushi, H. et al. | 2004
- 2096
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EPR study of hydrogen-related defects in boron-doped p-type CVD homoepitaxial diamond filmsMizuochi, N. / Ogura, M. / Watanabe, H. / Isoya, J. / Okushi, H. / Yamasaki, S. et al. | 2004
- 2100
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Synthesis and electron field emission properties of nanodiamond filmsLee, Y.C. / Lin, S.J. / Chia, C.T. / Cheng, H.F. / Lin, I.N. et al. | 2004
- 2105
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Carbon nanotubes field emission devices grown by thermal CVD with palladium as catalystsWong, Y.M. / Wei, S. / Kang, W.P. / Davidson, J.L. / Hofmeister, W. / Huang, J.H. / Cui, Y. et al. | 2004
- 2113
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Observation of electron field emission patterns from B-doped diamond filmsKobashi, K. / Watanabe, A. / Ando, Y. / Nishibayashi, Y. / Yokota, Y. / Hirao, T. / Oura, K. / Ichihara, C. / Kobayashi, A. et al. | 2004
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Homoepitaxial growth and characterization of phosphorus-doped diamond using tertiarybutylphosphine as a doping sourceKato, H. / Futako, W. / Yamasaki, S. / Okushi, H. et al. | 2004
- 2121
-
Investigation of specific contact resistance of ohmic contacts to B-doped homoepitaxial diamond using transmission line modelChen, Y.G. / Ogura, M. / Yamasaki, S. / Okushi, H. et al. | 2004
- 2125
-
Details of a theoretical model for electronic structure of the diamond vacanciesHeidari Saani, M. / Vesaghi, M.A. / Esfarjani, K. / Shafiekhani, A. et al. | 2004
- 2131
-
The electrical conduction mechanism of multiwalled carbon nanotubes film synthesized by microwave plasma chemical vapor depositionHuang, B.R. / Huang, C.S. / Hsieh, C.F. / Liu, Y.F. et al. | 2004
- 2136
-
Effects of iodine doping on optoelectronic properties of diamond-like carbon thin films deposited by microwave surface wave plasma CVDOmer, Ashraf M.M. / Adhikari, Sudip / Adhikary, Sunil / Uchida, Hideo / Umeno, Masayoshi et al. | 2004
- 2140
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On the kinetics of carbon nanotube growth by thermal CVD methodJuang, Z.Y. / Lai, J.F. / Weng, C.H. / Lee, J.H. / Lai, H.J. / Lai, T.S. / Tsai, C.H. et al. | 2004
- 2147
-
Comparisons on properties and growth mechanisms of carbon nanotubes fabricated by high-pressure and low-pressure plasma-enhanced chemical vapor depositionHsun Lin, Chao / Hsing Lee, Shu / Ming Hsu, Chih / Tzu Kuo, Cheng et al. | 2004
- 2152
-
Morphology of the growth tip of carbon microcoils/nanocoilsYang, S. / Chen, X. / Motojima, S. et al. | 2004
- 2156
-
Electrical properties of annealed MPCVD grown vertically aligned carbon nanotube filmsHuang, B.R. / Huang, C.S. / Wu, C.C. / Chen, L.-C.L. / Chen, K.H. et al. | 2004
- 2160
-
Field-induced modifications of hydrogenated diamond-like carbon films using a scanning probe microscopeFrolov, V.D. / Konov, V.I. / Pimenov, S.M. / Zavedeev, E.V. et al. | 2004
- 2166
-
The effect of annealing on mechanical and tribological properties of diamond-like carbon multilayer filmsZhang, W. / Tanaka, A. / Wazumi, K. / Koga, Y. / Xu, B.S. et al. | 2004
- 2170
-
Structures and luminescence properties of polymer-like a-CNx:H filmsDaigo, Yoshiaki / Mutsukura, Nobuki et al. | 2004
- 2174
-
Preparation and microstructure properties of tetrahedral amorphous carbon films by pulsed laser deposition using camphoric carbon targetRusop, M. / Kinugawa, T. / Soga, T. / Jimbo, T. et al. | 2004
- 2180
-
Properties of a-C:H films grown in inert gas ambient with camphoric carbon precursor of pulsed laser depositionRusop, M. / Mominuzzaman, S.M. / Soga, T. / Jimbo, T. et al. | 2004
- 2187
-
The effect of processing parameters on amorphous carbon nitride layer propertiesRusop, M. / Soga, T. / Jimbo, T. et al. | 2004
- 2197
-
Defect studies and photoelectrical properties of phosphorus doped amorphous carbon filmsRusop, M. / Soga, T. / Jimbo, T. et al. | 2004
- 2203
-
Fullerenes as a co-catalyst for high pressure – high temperature synthesis of diamondsDavidenko, V.M. / Kidalov, S.V. / Shakhov, F.M. / Yagovkina, M.A. / Yashin, V.A. / Vul', A.Ya. et al. | 2004
- 2203
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Fullerenes as a co-catalyst for high pressure #8211 high temperature synthesis of diamondsDavidenko, V.M. et al. | 2004
- 2207
-
New etching process for device fabrication using diamondHwang, D.S. / Saito, T. / Fujimori, N. et al. | 2004
- 2211
-
Tribological properties of DLC films deposited on steel substrate with various surface roughnessOhana, Tsuguyori / Suzuki, Masahiro / Nakamura, Takako / Tanaka, Akihiko / Koga, Yoshinori et al. | 2004
- 2216
-
Tribological properties of DLC films with different hydrogen contents in water environmentSuzuki, M. / Ohana, T. / Tanaka, A. et al. | 2004
- 2221
-
Carbon and titanium diboride multilayer coatingsRao, J. / Cruz, R. / Lawson, K.J. / Nicholls, J.R. et al. | 2004
- 2226
-
Electrochemical codeposition of Sn–Pb–metal alloy along with detonation synthesis nanodiamondsFujimura, T. / Dolmatov, V.Yu. / Burkat, G.K. / Orlova, E.A. / Veretennikova, M.V. et al. | 2004
- 2230
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Author Index for Volume 13| 2004
- 2239
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Subject Index for Volume 13| 2004
- CO2
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Editorial Board| 2004
- I
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Keyword Listing| 2004
- ix
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Organizing Committee| 2004
- vii
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Proceedings of the Ninth International Conference on New Diamond Science and Technology, Waseda University, Tokyo, Japan, 26–29 March 2004Kobashi, K. et al. | 2004
- viii
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Sponsors of ICNDST-9| 2004
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Proceedings of the Ninth International Conference on New Diamond Science and Technology, Waseda University, Tokyo, Japan, 26#821129 March 2004Kobashi, K. et al. | 2004