Quantitative determination of the dopant distribution in Si ultrashallow junctions by tilted sample annular dark field scanning transmission electron microscopy (Englisch)
- Neue Suche nach: Parisini, A.
- Neue Suche nach: Parisini, A.
- Neue Suche nach: Morandi, V.
- Neue Suche nach: Solmi, S.
- Neue Suche nach: Merli, P.G.
- Neue Suche nach: Giubertoni, D.
- Neue Suche nach: Bersani, M.
- Neue Suche nach: van den Berg, J.A.
In:
Applied physics letters
;
92
, 26
; 261907
;
2008
-
ISSN:
- Aufsatz (Zeitschrift) / Print
-
Titel:Quantitative determination of the dopant distribution in Si ultrashallow junctions by tilted sample annular dark field scanning transmission electron microscopy
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Beteiligte:Parisini, A. ( Autor:in ) / Morandi, V. / Solmi, S. / Merli, P.G. / Giubertoni, D. / Bersani, M. / van den Berg, J.A.
-
Erschienen in:Applied physics letters ; 92, 26 ; 261907
-
Verlag:
- Neue Suche nach: AIP
-
Erscheinungsort:Melville, NY
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Erscheinungsdatum:2008
-
ISSN:
-
ZDBID:
-
Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
- Neue Suche nach: 770/3400
- Neue Suche nach: 33.00
- Weitere Informationen zu Basisklassifikation
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Datenquelle:
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- 262902
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Improved electrical properties of Ge metal-oxide-semiconductor capacitor with HfTa-based gate dielectric by using TaOxNy interlayerZhang, X. F. / Xu, J. P. / Li, C. X. / Lai, P. T. / Chan, C. L. / Guan, J. G. et al. | 2008
- 262902
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Improved electrical properties of Ge metal-oxide-semiconductor capacitor with HfTa-based gate dielectric by using TaO~xN~y interlayer (3 pages)Zhang, X.F. / Xu, J.P. / Li, C.X. / Lai, P.T. / Chan, C.L. / Guan, J.G. et al. | 2008
- 262903
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Integrated circuits based on nanoscale vacuum phototubesDiamant, Gilad / Halahmi, Erez / Kronik, Leeor / Levy, Jeff / Naaman, Ron / Roulston, John et al. | 2008
- 262903
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Integrated circuits based on nanoscale vacuum phototubes (3 pages)Diamant, G. / Halahmi, E. / Kronik, L. / Levy, J. / Naaman, R. / Roulston, J. et al. | 2008
- 262904
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Large electrostrain near the phase transition temperature of (Bi0.5Na0.5)TiO3–SrTiO3 ferroelectric ceramicsHiruma, Yuji / Imai, Yoshitaka / Watanabe, Yoshinori / Nagata, Hajime / Takenaka, Tadashi et al. | 2008
- 262904
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Large electrostrain near the phase transition temperature of (Bi~0~.~5Na~0~.~5)TiO~3-SrTiO~3 ferroelectric ceramics (3 pages)Hiruma, Y. / Imai, Y. / Watanabe, Y. / Nagata, H. / Takenaka, T. et al. | 2008
- 263101
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Integration of site-controlled pyramidal quantum dots and photonic crystal membrane cavitiesGallo, P. / Felici, M. / Dwir, B. / Atlasov, K. A. / Karlsson, K. F. / Rudra, A. / Mohan, A. / Biasiol, G. / Sorba, L. / Kapon, E. et al. | 2008
- 263101
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Integration of site-controlled pyramidal quantum dots and photonic crystal membrane cavities (3 pages)Gallo, P. / Felici, M. / Dwir, B. / Atlasov, K.A. / Karlsson, K.F. / Rudra, A. / Mohan, A. / Biasiol, G. / Sorba, L. / Kapon, E. et al. | 2008
- 263102
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Identification of dispersion-dependent hexagonal cavity modes of an individual ZnO nanonail (3 pages)Liu, J. / Lee, S. / Ahn, Y.H. / Park, J.-Y. / Koh, K.H. / Park, K.H. et al. | 2008
- 263102
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Identification of dispersion-dependent hexagonal cavity modes of an individual ZnO nanonailLiu, Jinzhang / Lee, Soonil / Ahn, Y. H. / Park, Ji-Yong / Koh, Ken Ha / Park, Kyung Ho et al. | 2008
- 263103
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Superior nanoscale passive oxide layers synthesized under photon irradiation for environmental protectionChang, Chia-Lin / Engelhard, Mark H. / Ramanathan, Shriram et al. | 2008
- 263103
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Superior nanoscale passive oxide layers synthesized under photon irradiation for environmental protection (3 pages)Chang, C.-L. / Engelhard, M.H. / Ramanathan, S. et al. | 2008
- 263104
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Electrothermal actuation based on carbon nanotube network in silicone elastomer (3 pages)Chen, L.Z. / Liu, C.H. / Hu, C.H. / Fan, S.S. et al. | 2008
- 263104
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Electrothermal actuation based on carbon nanotube network in silicone elastomerChen, L. Z. / Liu, C. H. / Hu, C. H. / Fan, S. S. et al. | 2008
- 263105
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Growth of InAs/Sb:GaAs quantum dots on silicon substrate with high density and efficient light emission in the 1.3 μm bandLi, Lin / Guimard, Denis / Rajesh, Mohan / Arakawa, Yasuhiko et al. | 2008
- 263105
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Growth of InAs/Sb:GaAs quantum dots on silicon substrate with high density and efficient light emission in the 1.3 μm band (3 pages)Li, L. / Guimard, D. / Rajesh, M. / Arakawa, Y. et al. | 2008
- 263106
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Single-layer metallodielectric nanostructures as dual-band midinfrared filters (3 pages)Tang, Y. / Bossard, J.A. / Werner, D.H. / Mayer, T.S. et al. | 2008
- 263106
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Single-layer metallodielectric nanostructures as dual-band midinfrared filtersTang, Yan / Bossard, Jeremy A. / Werner, Douglas H. / Mayer, Theresa S. et al. | 2008
- 263107
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Controlled in situ boron doping of short silicon nanowires grown by molecular beam epitaxy (3 pages)Kanungo, P.D. / Zakharov, N. / Bauer, J. / Breitenstein, O. / Werner, P. / Goesele, U. et al. | 2008
- 263107
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Controlled emph TYPE="1">in situ boron doping of short silicon nanowires grown by molecular beam epitaxyDas Kanungo, Pratyush et al. | 2008
- 263107
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Controlled in situ boron doping of short silicon nanowires grown by molecular beam epitaxyDas Kanungo, Pratyush / Zakharov, Nikolai / Bauer, Jan / Breitenstein, Otwin / Werner, Peter / Goesele, Ulrich et al. | 2008
- 263108
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Preparation of nanochain and nanosphere by self-assembly of gold nanoparticlesFang, C. / Fan, Y. / Kong, J. M. / Gao, Z. Q. / Balasubramanian, N. et al. | 2008
- 263108
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Preparation of nanochain and nanosphere by self-assembly of gold nanoparticles (3 pages)Fang, C. / Fan, Y. / Kong, J.M. / Gao, Z.Q. / Balasubramanian, N. et al. | 2008
- 263109
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Passivation effects on ZnO nanowire field effect transistors under oxygen, ambient, and vacuum environmentsSong, Sunghoon / Hong, Woong-Ki / Kwon, Soon-Shin / Lee, Takhee et al. | 2008
- 263109
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Passivation effects on ZnO nanowire field effect transistors under oxygen, ambient, and vacuum environments (3 pages)Song, S. / Hong, W.-K. / Kwon, S.-S. / Lee, T. et al. | 2008
- 263110
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Optical limiting properties of silver nanoprismsPolavarapu, Lakshminarayana / Xu, Qing-Hua / Dhoni, Mohan S. / Ji, Wei et al. | 2008
- 263110
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Optical limiting properties of silver nanoprisms (3 pages)Polavarapu, L. / Xu, Q.-H. / Dhoni, M.S. / Ji, W. et al. | 2008
- 263111
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Axially graded heteroepitaxy and Raman spectroscopic characterizations of Si1−xGex nanowiresYang, Jee-Eun / Park, Won-Hwa / Kim, Cheol-Joo / Kim, Zee Hwan / Jo, Moon-Ho et al. | 2008
- 263111
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Axially graded heteroepitaxy and Raman spectroscopic characterizations of Si~1~-~xGe~x nanowires (3 pages)Yang, J.-E. / Park, W.-H. / Kim, C.-J. / Kim, Z.H. / Jo, M.-H. et al. | 2008
- 263112
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Uniform and stable field emission from printed carbon nanotubes through oxygen trimming (3 pages)Kim, Y.C. / Nam, J.W. / Hwang, M.I. / Kim, I.H. / Lee, C.S. / Choi, Y.C. / Park, J.H. / Kim, H.S. / Kim, J.M. et al. | 2008
- 263112
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Uniform and stable field emission from printed carbon nanotubes through oxygen trimmingKim, Yong C. / Nam, J. W. / Hwang, M. I. / Kim, I. H. / Lee, C. S. / Choi, Y. C. / Park, J. H. / Kim, H. S. / Kim, Jong M. et al. | 2008
- 263301
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Efficient single layer solution-processed blue-emitting electrophosphorescent devices based on a small-molecule hostHou, Liudong / Duan, Lian / Qiao, Juan / Li, Wei / Zhang, Deqiang / Qiu, Yong et al. | 2008
- 263301
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Efficient single layer solution-processed blue-emitting electrophosphorescent devices based on a small-molecule host (3 pages)Hou, L. / Duan, L. / Qiao, J. / Li, W. / Zhang, D. / Qiu, Y. et al. | 2008
- 263302
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Organic solar cells with solution-processed graphene transparent electrodes (3 pages)Wu, J. / Becerril, H.A. / Bao, Z. / Liu, Z. / Chen, Y. / Peumans, P. et al. | 2008
- 263302
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Organic solar cells with solution-processed graphene transparent electrodesWu, Junbo / Becerril, He´ctor A. / Bao, Zhenan / Liu, Zunfeng / Chen, Yongsheng / Peumans, Peter et al. | 2008
- 263303
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Dependence of field-effect mobility and contact resistance on nanostructure in regioregular poly(3-hexylthiophene) thin film transistors (3 pages)Singh, K.A. / Sauve, G. / Zhang, R. / Kowalewski, T. / McCullough, R.D. / Porter, L.M. et al. | 2008
- 263303
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Dependence of field-effect mobility and contact resistance on nanostructure in regioregular poly(3-hexylthiophene) thin film transistorsSingh, K. A. / Sauve´, G. / Zhang, R. / Kowalewski, T. / McCullough, R. D. / Porter, L. M. et al. | 2008
- 263304
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Theoretical investigation of the negative differential resistance in squashed C~6~0 molecular device (3 pages)Fan, Z.-Q. / Chen, K.-Q. / Wan, Q. / Zou, B.S. / Duan, W. / Shuai, Z. et al. | 2008
- 263304
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Theoretical investigation of the negative differential resistance in squashed C60 molecular deviceFan, Zhi-Qiang / Chen, Ke-Qiu / Wan, Qing / Zou, B. S. / Duan, Wenhui / Shuai, Z. et al. | 2008
- 263305
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Cesium hydroxide doped tris-(8-hydroxyquinoline) aluminum as an effective electron injection layer in inverted bottom-emission organic light emitting diodesXiong, Tao / Wang, Fengxia / Qiao, Xianfeng / Ma, Dongge et al. | 2008
- 263305
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Cesium hydroxide doped tris-(8-hydroxyquinoline) aluminum as an effective electron injection layer in inverted bottom-emission organic light emitting diodes (3 pages)Xiong, T. / Wang, F. / Qiao, X. / Ma, D. et al. | 2008
- 263501
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GaN for x-ray detectionDuboz, Jean-Yves / Lau¨gt, Marguerite / Schenk, David / Beaumont, Bernard / Reverchon, Jean-Luc / Wieck, Andreas D. / Zimmerling, Tino et al. | 2008
- 263501
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GaN for x-ray detection (3 pages)Duboz, J.-Y. / Laugt, M. / Schenk, D. / Beaumont, B. / Reverchon, J.-L. / Wieck, A.D. / Zimmerling, T. et al. | 2008
- 263502
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Remarkable breakdown voltage enhancement in AlGaN channel high electron mobility transistors (3 pages)Nanjo, T. / Takeuchi, M. / Suita, M. / Oishi, T. / Abe, Y. / Tokuda, Y. / Aoyagi, Y. et al. | 2008
- 263502
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Remarkable breakdown voltage enhancement in AlGaN channel high electron mobility transistorsNanjo, Takuma / Takeuchi, Misaichi / Suita, Muneyoshi / Oishi, Toshiyuki / Abe, Yuji / Tokuda, Yasunori / Aoyagi, Yoshinobu et al. | 2008
- 263503
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Ferroelectric bimorph cantilever with self-assembled silane layerNadtochiy, Andriy / Hollis, T. Keith / Ostrovskii, Igor et al. | 2008
- 263503
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Ferroelectric bimorph cantilever with self-assembled silane layer (3 pages)Nadtochiy, A. / Hollis, T.K. / Ostrovskii, I. et al. | 2008
- 263504
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Effect of CdSe quantum dots on hole transport in poly(3-hexylthiophene) thin films (3 pages)Kumari, K. / Chand, S. / Kumar, P. / Sharma, S.N. / Vankar, V.D. / Kumar, V. et al. | 2008
- 263504
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Effect of CdSe quantum dots on hole transport in poly(3-hexylthiophene) thin filmsKumari, Kusum / Chand, Suresh / Kumar, Pankaj / Sharma, Shailesh N. / Vankar, V. D. / Kumar, Vikram et al. | 2008
- 263505
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Modulation of TiSiN effective work function using high-pressure postmetallization annealing in dilute oxygen ambientLee, Joonmyoung / Park, Hokyung / Choi, Hyejung / Hasan, Musarrat / Jo, Minseok / Chang, Man / Lee, Byoung Hun / Park, Chang Seo / Kang, Chang Yong / Hwang, Hyunsang et al. | 2008
- 263505
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Modulation of TiSiN effective work function using high-pressure postmetallization annealing in dilute oxygen ambient (3 pages)Lee, J. / Park, H. / Choi, H. / Hasan, M. / Jo, M. / Chang, M. / Lee, B.H. / Park, C.S. / Kang, C.Y. / Hwang, H. et al. | 2008
- 263901
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Sol-gel derived nanostructured cerium oxide film for glucose sensorAnsari, Anees A. / Solanki, Pratima R. / Malhotra, B. D. et al. | 2008
- 263901
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Sol-gel derived nanostructured cerium oxide film for glucose sensor (3 pages)Ansari, A.A. / Solanki, P.R. / Malhotra, B.D. et al. | 2008
- 264101
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Design of arbitrarily shaped concentrators based on conformally optical transformation of nonuniform rational B-spline surfacesJiang, Wei Xiang / Cui, Tie Jun / Cheng, Qiang / Chin, Jessie Yao / Yang, Xin Mi / Liu, Ruopeng / Smith, David R. et al. | 2008
- 264101
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Design of arbitrarily shaped concentrators based on conformally optical transformation of nonuniform rational B-spline surfaces (3 pages)Jiang, W.X. / Cui, T.J. / Cheng, Q. / Chin, J.Y. / Yang, X.M. / Liu, R. / Smith, D.R. et al. | 2008
- 264102
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Tiny bubble removal by gas flow through porous superhydrophobic surfaces: Ostwald ripening (3 pages)Chang, F.-M. / Sheng, Y.-J. / Cheng, S.-L. / Tsao, H.-K. et al. | 2008
- 264102
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Tiny bubble removal by gas flow through porous superhydrophobic surfaces: Ostwald ripeningChang, Feng-Ming / Sheng, Yu-Jane / Cheng, Shao-Liang / Tsao, Heng-Kwong et al. | 2008
- 264103
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Resonant x-ray diffraction as a tool to calculate mixed valence ratios: Application to Prussian Blue materialsFerreira, Fabio Furlan / Bueno, Paulo R. / Setti, Grazielle O. / Gime´nez-Romero, David / Garci´a-Jaren˜o, Jose´ Juan / Vicente, Francisco et al. | 2008
- 264103
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Resonant x-ray diffraction as a tool to calculate mixed valence ratios: Application to Prussian Blue materials (3 pages)Ferreira, F.F. / Bueno, P.R. / Setti, G.O. / Gimenez-Romero, D. / Garcia-Jareno, J.J. / Vicente, F. et al. | 2008
- 264104
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Multistability in nonlinear left-handed transmission linesPowell, David A. / Shadrivov, Ilya V. / Kivshar, Yuri S. et al. | 2008
- 264104
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Multistability in nonlinear left-handed transmission lines (3 pages)Powell, D.A. / Shadrivov, I.V. / Kivshar, Y.S. et al. | 2008