Preparation of porous alumina-g-polystyrene sulfonic acid abrasive and its chemical mechanical polishing behavior on hard disk substrate (Englisch)
- Neue Suche nach: Huang, Liqin
- Neue Suche nach: Huang, Liqin
- Neue Suche nach: Wang, Zhijun
- Neue Suche nach: Lei, Hong
- Neue Suche nach: Chen, Ruling
In:
Microelectronic engineering
;
116
; 11-16
;
2014
-
ISSN:
- Aufsatz (Zeitschrift) / Print
-
Titel:Preparation of porous alumina-g-polystyrene sulfonic acid abrasive and its chemical mechanical polishing behavior on hard disk substrate
-
Beteiligte:
-
Erschienen in:Microelectronic engineering ; 116 ; 11-16
-
Verlag:
- Neue Suche nach: Elsevier
-
Erscheinungsort:Amsterdam [u.a.]
-
Erscheinungsdatum:2014
-
ISSN:
-
ZDBID:
-
Medientyp:Aufsatz (Zeitschrift)
-
Format:Print
-
Sprache:Englisch
- Neue Suche nach: 535/5670
-
Schlagwörter:
-
Klassifikation:
-
Datenquelle:
Inhaltsverzeichnis – Band 116
Zeige alle Jahrgänge und Ausgaben
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
- 1
-
Study on the behaviors of Cu filling in special through-silicon-vias by the simulation of electric field distributionCao, Haiyong / Hang, Tao / Ling, Huiqin / Luo, Wei / Feng, Xue / Li, Ming et al. | 2013
- 6
-
Ni–Nb–Zr–Ti amorphous alloys for glass lens molding die materialsJiang, Shengxian / Abe, Mitsuhiro / Ando, Masayuki / Aono, Yuko / Sakurai, Junpei / Hata, Seiichi et al. | 2013
- 11
-
Preparation of porous alumina-g-polystyrene sulfonic acid abrasive and its chemical mechanical polishing behavior on hard disk substrateHuang, Liqin / Wang, Zhijun / Lei, Hong / Chen, Ruling et al. | 2013
- 17
-
Chemical mechanical planarization of patterned InP in shallow trench isolation (STI) template structures using hydrogen peroxide–based silica slurries containing oxalic acid or citric acidMatovu, John B. / Ong, Patrick / Teugels, Lieve G. / Leunissen, Leonardus H.A. / Babu, S.V. et al. | 2013
- 22
-
Bipolar resistive switching behaviors in Cr-doped ZnO filmsXu, Ding Lin / Xiong, Ying / Tang, Ming Hua / Zeng, Bai Wen / Li, Jing Qi / Liu, Liu / Li, Lin Qi / Yan, Shao An / Tang, Zhen Hua et al. | 2013
- 26
-
Self-calibration of a polyaniline nanowire-based chemiresistive pH sensorSong, Edward / Choi, Jin-Woo et al. | 2013
- 33
-
Microstructure and electrical mechanism of Sn–xAg–Cu PV-ribbon for solar cellsChen, Kuan-Jen / Hung, Fei-Yi / Lui, Truan-Sheng / Chen, Li-Hui / Qiu, Dai-Wen / Chou, Ta-Lung et al. | 2013
- 40
-
Nanofabrication of tungsten zone plates with integrated platinum central stop for hard X-ray applicationsUhlén, F. / Nilsson, D. / Rahomäki, J. / Belova, L. / Schroer, C.G. / Seiboth, F. / Holmberg, A. / Hertz, H.M. / Vogt, U. et al. | 2013
- 44
-
Reduction of pattern peeling in step-and-flash imprint lithographyTakei, Satoshi / Ogawa, Tsuyoshi / Deschner, Ryan / Willson, Carlton Grant et al. | 2013
- 51
-
Superhydrophobic and superoleophobic surfaces using ZnO nano-in-micro hierarchical structuresJo, Han-Byeol / Choi, Jehong / Byeon, Kyeong-Jae / Choi, Hak-Jong / Lee, Heon et al. | 2013
- 58
-
Characterization and photovoltaic performance of organic device based on CoMTPP/p-Si heterojunctionEl-Nahass, M.M. / Atta, A.A. / El-Zaidia, E.F.M. / Hendi, A.A. et al. | 2013
- 65
-
TCAD models of the temperature and doping dependence of the bandgap and low field carrier mobility in 4H-SiCStefanakis, Dionysios / Zekentes, Konstantinos et al. | 2013
- IFC
-
Inside Front Cover - Editorial Board| 2013