Increasing the carbon deposition rate using sputter yield amplification upon serial magnetron co-sputtering (Unbekannt)
- Neue Suche nach: Schmidt, Rüdiger M.
- Neue Suche nach: Schmidt, Rüdiger M.
- Neue Suche nach: Ries, Patrick
- Neue Suche nach: Pflug, Andreas
- Neue Suche nach: Wuttig, Matthias
- Neue Suche nach: Kubart, Tomas
In:
Surface & coatings technology
;
252
; 74-78
;
2014
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ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:Increasing the carbon deposition rate using sputter yield amplification upon serial magnetron co-sputtering
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Beteiligte:Schmidt, Rüdiger M. ( Autor:in ) / Ries, Patrick / Pflug, Andreas / Wuttig, Matthias / Kubart, Tomas
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Erschienen in:Surface & coatings technology ; 252 ; 74-78
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Verlag:
- Neue Suche nach: Elsevier Sequoia
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Erscheinungsort:Lausanne
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Erscheinungsdatum:2014
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ISSN:
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ZDBID:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Unbekannt
- Neue Suche nach: 52.78 / 51.20 / 51.20 / 52.78
- Weitere Informationen zu Basisklassifikation
- Neue Suche nach: 645/5255
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Schlagwörter:
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Klassifikation:
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Datenquelle:
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- IFC
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Editorial Board| 2014