3-D micro surface profilometry employing novel Mirau-based lateral scanning interferometry (Englisch)
- Neue Suche nach: Chen, Liang-Chia
- Neue Suche nach: Chen, Liang-Chia
- Neue Suche nach: Le, Manh-Trung
- Neue Suche nach: Lin, Yi-Shiuan
In:
Measurement science and technology
;
25
, 9
; 94004-94004
;
2014
-
ISSN:
- Aufsatz (Zeitschrift) / Print
-
Titel:3-D micro surface profilometry employing novel Mirau-based lateral scanning interferometry
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Beteiligte:
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Erschienen in:Measurement science and technology ; 25, 9 ; 94004-94004
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Verlag:
- Neue Suche nach: IOP Publ. Ltd.
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Erscheinungsort:Bristol
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Erscheinungsdatum:2014
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ISSN:
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ZDBID:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
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Schlagwörter:
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Klassifikation:
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Datenquelle:
Inhaltsverzeichnis – Band 25, Ausgabe 9
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