Theoretical investigation of an in situ k-restore process for damaged ultra-low-k materials based on plasma enhanced fragmentation (Englisch)
- Neue Suche nach: Förster, Anja
- Neue Suche nach: Förster, Anja
- Neue Suche nach: Wagner, Christian
- Neue Suche nach: Gemming, Sibylle
- Neue Suche nach: Schuster, Jörg
In:
Journal of vacuum science and technology / B
;
33
, 5
; 52203
;
2015
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ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:Theoretical investigation of an in situ k-restore process for damaged ultra-low-k materials based on plasma enhanced fragmentation
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Beteiligte:
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Erschienen in:Journal of vacuum science and technology / B ; 33, 5 ; 52203
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Verlag:
- Neue Suche nach: Inst.
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Erscheinungsort:New York, NY
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Erscheinungsdatum:2015
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ISSN:
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ZDBID:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
- Neue Suche nach: 51.30 / 50.94 / 53.55 / 53.56
- Weitere Informationen zu Basisklassifikation
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Datenquelle:
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