Gate patterning in 14nm and beyond nodes: from planar devices to three dimensional Finfet devices (Englisch)
- Neue Suche nach: Meng, Lingkuan
- Neue Suche nach: Meng, Lingkuan
- Neue Suche nach: Hong, Peizhen
- Neue Suche nach: He, Xiaobin
- Neue Suche nach: Li, Chunlong
- Neue Suche nach: Li, Junjie
- Neue Suche nach: Li, Junfeng
- Neue Suche nach: Zhao, Chao
- Neue Suche nach: Wei, Yayi
- Neue Suche nach: Yan, Jiang
In:
Applied surface science
;
362
; 483-489
;
2016
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ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:Gate patterning in 14nm and beyond nodes: from planar devices to three dimensional Finfet devices
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Beteiligte:Meng, Lingkuan ( Autor:in ) / Hong, Peizhen / He, Xiaobin / Li, Chunlong / Li, Junjie / Li, Junfeng / Zhao, Chao / Wei, Yayi / Yan, Jiang
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Erschienen in:Applied surface science ; 362 ; 483-489
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Verlag:
- Neue Suche nach: Elsevier
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Erscheinungsort:Amsterdam [u.a.]
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Erscheinungsdatum:2016
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ISSN:
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ZDBID:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
- Neue Suche nach: 52.78 / 35.18 / 33.68
- Weitere Informationen zu Basisklassifikation
- Neue Suche nach: 535/3485
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Schlagwörter:
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Klassifikation:
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Datenquelle:
Inhaltsverzeichnis – Band 362
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Editorial Board| 2016