Influence of dcMS and HPPMS in a dcMS/HPPMS hybrid process on plasma and coating properties (Englisch)
- Neue Suche nach: Bobzin, K
- Neue Suche nach: Bobzin, K
- Neue Suche nach: Brögelmann, T
- Neue Suche nach: Kruppe, N.C
- Neue Suche nach: Engels, M
In:
Thin solid films
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620
; 188-196
;
2016
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ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:Influence of dcMS and HPPMS in a dcMS/HPPMS hybrid process on plasma and coating properties
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Beteiligte:
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Erschienen in:Thin solid films ; 620 ; 188-196
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Erscheinungsort:Amsterdam [u.a.] Elsevier
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Erscheinungsdatum:2016
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ISSN:
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ZDBID:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
- Neue Suche nach: 33.68
- Weitere Informationen zu Basisklassifikation
- Neue Suche nach: 535/3485
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Schlagwörter:
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Klassifikation:
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Datenquelle:
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Influence of dcMS and HPPMS in a dcMS/HPPMS hybrid process on plasma and coating propertiesBobzin, K. / Brögelmann, T. / Kruppe, N.C. / Engels, M. et al. | 2016
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Editorial Board| 2014