Optimizing FIB milling process parameters for silicon and its use in nanoreplication (Englisch)
- Neue Suche nach: Goswami, A
- Neue Suche nach: Goswami, A
- Neue Suche nach: Singh, K
- Neue Suche nach: Aravindan, S
- Neue Suche nach: Rao, P. V
In:
Materials and manufacturing processes
;
32
, 10
; 1052-7
;
2017
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ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:Optimizing FIB milling process parameters for silicon and its use in nanoreplication
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Beteiligte:
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Erschienen in:Materials and manufacturing processes ; 32, 10 ; 1052-7
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Verlag:
- Neue Suche nach: Dekker
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Erscheinungsort:New York, NY
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Erscheinungsdatum:2017
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ISSN:
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ZDBID:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
- Neue Suche nach: 51.00 / 52.74
- Weitere Informationen zu Basisklassifikation
- Neue Suche nach: 770/5100
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Schlagwörter:
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Klassifikation:
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Datenquelle:
Inhaltsverzeichnis – Band 32, Ausgabe 10
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