High-Temperature Annealing Induced He Bubble Evolution in Low Energy He Ion Implanted 6H-SiC (Englisch)
- Neue Suche nach: 刘玉柱 李炳生 张莉
- Neue Suche nach: 刘玉柱 李炳生 张莉
In:
Chinese physics letters
;
34
, 5
; 40-43
;
2017
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ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:High-Temperature Annealing Induced He Bubble Evolution in Low Energy He Ion Implanted 6H-SiC
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Beteiligte:刘玉柱 李炳生 张莉 ( Autor:in )
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Erschienen in:Chinese physics letters ; 34, 5 ; 40-43
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Verlag:
- Neue Suche nach: Science Press
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Erscheinungsort:Beijing
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Erscheinungsdatum:2017
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ISSN:
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ZDBID:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
- Neue Suche nach: 200/3400
- Neue Suche nach: 33.00
- Weitere Informationen zu Basisklassifikation
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Schlagwörter:
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Klassifikation:
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Datenquelle:
Inhaltsverzeichnis – Band 34, Ausgabe 5
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