Transmission of oxygen radicals through free-standing single-layer and multilayer silicon-nitride and silicon-dioxide films (Englisch)
- Neue Suche nach: Choudhury, F. A
- Neue Suche nach: Choudhury, F. A
- Neue Suche nach: Nguyen, H. M
- Neue Suche nach: Sabat, G
- Neue Suche nach: Minkoff, B. B
- Neue Suche nach: Nishi, Y
- Neue Suche nach: Sussman, M. R
- Neue Suche nach: Shohet, J. L
In:
Journal of applied physics
;
122
, 8
;
2017
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ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:Transmission of oxygen radicals through free-standing single-layer and multilayer silicon-nitride and silicon-dioxide films
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Beteiligte:Choudhury, F. A ( Autor:in ) / Nguyen, H. M / Sabat, G / Minkoff, B. B / Nishi, Y / Sussman, M. R / Shohet, J. L
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Erschienen in:Journal of applied physics ; 122, 8
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Verlag:
- Neue Suche nach: AIP
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Erscheinungsort:Melville, NY
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Erscheinungsdatum:2017
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ISSN:
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ZDBID:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
- Neue Suche nach: 33.00 / 50.30
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Klassifikation:
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Datenquelle:
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