Review on macromodels of MEMS sensors and actuators (Englisch)
- Neue Suche nach: Chen, Xueye
- Neue Suche nach: Wu, Zeyang
- Neue Suche nach: Chen, Xueye
- Neue Suche nach: Wu, Zeyang
In:
Microsystem Technologies
;
23
, 10
; 4319-4332
;
2017
-
ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:Review on macromodels of MEMS sensors and actuators
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Beteiligte:Chen, Xueye ( Autor:in ) / Wu, Zeyang ( Autor:in )
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Erschienen in:Microsystem Technologies ; 23, 10 ; 4319-4332
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Verlag:
- Neue Suche nach: Springer Berlin Heidelberg
- Neue Suche nach: Springer
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Erscheinungsort:Berlin
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Erscheinungsdatum:2017
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ISSN:
-
ZDBID:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
- Neue Suche nach: 50.94
- Weitere Informationen zu Basisklassifikation
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Schlagwörter:
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Klassifikation:
BKL: 50.94 Mikrosystemtechnik, Nanotechnologie -
Datenquelle:
Inhaltsverzeichnis – Band 23, Ausgabe 10
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