A parametric study of the deposition of the TiN thin films by laser reactive ablation of titanium targets in nitrogen: the roles of the total gas pressure and the contaminations with oxides (Englisch)
- Neue Suche nach: Mihailescu, I. N.
- Neue Suche nach: Gyorgy, E.
- Neue Suche nach: Chitica, N.
- Neue Suche nach: Teodorescu, V. S.
- Neue Suche nach: Mavin, G.
- Neue Suche nach: Luches, A.
- Neue Suche nach: Perrone, A.
- Neue Suche nach: Martino, M.
- Neue Suche nach: Neamtu, J.
- Neue Suche nach: Mihailescu, I. N.
- Neue Suche nach: Gyorgy, E.
- Neue Suche nach: Chitica, N.
- Neue Suche nach: Teodorescu, V. S.
- Neue Suche nach: Mavin, G.
- Neue Suche nach: Luches, A.
- Neue Suche nach: Perrone, A.
- Neue Suche nach: Martino, M.
- Neue Suche nach: Neamtu, J.
In:
Journal of Materials Science
;
31
, 11
; 2909-2915
;
1996
-
ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:A parametric study of the deposition of the TiN thin films by laser reactive ablation of titanium targets in nitrogen: the roles of the total gas pressure and the contaminations with oxides
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Beteiligte:Mihailescu, I. N. ( Autor:in ) / Gyorgy, E. ( Autor:in ) / Chitica, N. ( Autor:in ) / Teodorescu, V. S. ( Autor:in ) / Mavin, G. ( Autor:in ) / Luches, A. ( Autor:in ) / Perrone, A. ( Autor:in ) / Martino, M. ( Autor:in ) / Neamtu, J. ( Autor:in )
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Erschienen in:Journal of Materials Science ; 31, 11 ; 2909-2915
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Verlag:
- Neue Suche nach: Kluwer Academic Publishers-Plenum Publishers
- Neue Suche nach: Springer Science + Business Media B.V.
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Erscheinungsort:Norwell, Mass
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Erscheinungsdatum:1996
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ISSN:
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ZDBID:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
- Neue Suche nach: 51.00
- Weitere Informationen zu Basisklassifikation
- Neue Suche nach: 275/5010
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Schlagwörter:
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Klassifikation:
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Datenquelle:
Inhaltsverzeichnis – Band 31, Ausgabe 11
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