Analysis of buried oxide layer formation and mechanism of threading dislocation generation in the substoichiometric oxygen dose region (Englisch)
- Neue Suche nach: Nakashima, Sadao
- Neue Suche nach: Izumi, Katsutoshi
- Neue Suche nach: Nakashima, Sadao
- Neue Suche nach: Izumi, Katsutoshi
In:
Journal of Materials Research
;
8
, 3
; 523-534
;
1993
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ISSN:
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:Analysis of buried oxide layer formation and mechanism of threading dislocation generation in the substoichiometric oxygen dose region
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Beteiligte:Nakashima, Sadao ( Autor:in ) / Izumi, Katsutoshi ( Autor:in )
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Erschienen in:Journal of Materials Research ; 8, 3 ; 523-534
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Verlag:
- Neue Suche nach: Springer International Publishing
- Neue Suche nach: Springer
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Erscheinungsort:Berlin
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Erscheinungsdatum:1993
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ISSN:
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ZDBID:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
- Neue Suche nach: 51.00
- Weitere Informationen zu Basisklassifikation
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Schlagwörter:
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Klassifikation:
BKL: 51.00 Werkstoffkunde: Allgemeines -
Datenquelle:
Inhaltsverzeichnis – Band 8, Ausgabe 3
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