Steep-edge filter design with equivalent layers (Englisch)
- Neue Suche nach: Schallenberg, Uwe B.
- Neue Suche nach: Schallenberg, Uwe B.
In:
Proc. SPIE
;
5963
; 59630A
;
2005
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ISBN:
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ISSN:
- Aufsatz (Konferenz) / Elektronische Ressource
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Titel:Steep-edge filter design with equivalent layers
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Beteiligte:Schallenberg, Uwe B. ( Autor:in )
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Kongress:Advances in Optical Thin Films II ; 2005 ; Jena,Germany
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Erschienen in:Proc. SPIE ; 5963 ; 59630A
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Verlag:
- Neue Suche nach: SPIE
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Erscheinungsdatum:30.09.2005
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ISBN:
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ISSN:
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DOI:
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Medientyp:Aufsatz (Konferenz)
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Format:Elektronische Ressource
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Sprache:Englisch
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Datenquelle:
Inhaltsverzeichnis Konferenzband
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
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Steep-edge filter design with equivalent layersSchallenberg, Uwe B. et al. | 2005
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-
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Deposition of robust multilayer mirror coatings for storage ring FEL lasing at 176nm [5963-83]Gunster, S. / Ristau, D. / Trovo, M. / Danailov, M. / Gatto, A. / Kaiser, N. / Sarto, F. / Piegari, A. / SPIE-- the International Society for Optical Engineering et al. | 2005
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Substantial progress in optical monitoring by intermittent measurement technique (Invited Paper) [5963-13]Zoeller, A. / Boos, M. / Goetzelmann, R. / Hagedorn, H. / Klug, W. / SPIE-- the International Society for Optical Engineering et al. | 2005
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Lanthanide tri-fluorides: a survey of the optical, mechanical and structural properties of thin films with emphasis of their use in the DUV-VUV-spectral range [5963-23]Uhlig, H. / Thielsch, R. / Heber, J. / Kaiser, N. / SPIE-- the International Society for Optical Engineering et al. | 2005
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Optical and mechanical properties of thin RLVIP Nb~2O~5-films [5963-51]Hallbauer, A. / Huber, D. / Pulker, H. K. / SPIE-- the International Society for Optical Engineering et al. | 2005
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Optical monitoring of rugate filters [5963-72]Lappschies, M. / Gortz, B. / Ristau, D. / SPIE-- the International Society for Optical Engineering et al. | 2005
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Multilayers for the EUV and soft X-ray region (Invited Paper) [5963-28]Wang, Z. / SPIE-- the International Society for Optical Engineering et al. | 2005
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Ageing of optical components under laser irradiation at 532nm [5963-64]Becker, S. / Delrive, L. / Bouchut, P. / Andre, B. / Geffraye, F. / SPIE-- the International Society for Optical Engineering et al. | 2005
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B~4C/Mo/Si multilayers for 20-40 nm wavelengths: application to broadband mirrors [5963-68]Delmotte, F. / Gautier, J. / Roulliay, M. / Ravet, M. F. / Bridou, F. / Jerome, A. / SPIE-- the International Society for Optical Engineering et al. | 2005
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Study of potential quantization effects in designs for 12.4 nm mirrors [5963-92]Wiley, R. R. / SPIE-- the International Society for Optical Engineering et al. | 2005
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Ion source characterization based on an array of retarding field analyzers [5963-17]Beermann, N. / Ehlers, H. / Ristau, D. / SPIE-- the International Society for Optical Engineering et al. | 2005
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Aluminum-enhanced optical coatings for the VUV spectral range [5963-22]Yang, M. / Gatto, A. / Kaiser, N. / SPIE-- the International Society for Optical Engineering et al. | 2005
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Chemical vapour deposition of optical coatings onto small scale complex optical components [5963-52]Hitchman, M. L. / Gibson, D. R. / Manookian, W. / Waddell, E. M. / SPIE-- the International Society for Optical Engineering et al. | 2005
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Determination of complex optical indices in the 80-140nm VUV wavelength region from reflectivity measurements under normal incidence: application to ZnSe [5963-65]Bridou, F. / Cuniot-Ponsard, M. / Desvignes, J. M. / SPIE-- the International Society for Optical Engineering et al. | 2005
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Real-time lateral optical monitoring for the production of complex multilayer stacks [5963-14]Grezes-Besset, C. / Torricini, D. / Chazallet, F. / SPIE-- the International Society for Optical Engineering et al. | 2005
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Interface-engineered multilayer mirrors [5963-30]Yulin, S. / Benoit, N. / Feigl, T. / Kaiser, N. / SPIE-- the International Society for Optical Engineering et al. | 2005
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Comparative study of IR and UV laser damage resistance of silica thin films deposited by electron beam deposition, ion plating, ion assisted deposition and dual ion beam sputtering [5963-35]Gallais, L. / Krol, H. / Capoulade, J. / Cathelinaud, M. / Roussel, L. / Albrand, G. / Natoli, J.-Y. / Commandre, M. / Lequime, M. / Amra, C. et al. | 2005
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Precision optical and antireflection multilayers and gradient coatings containing reactively sputtered oxides, nitrides and fluorides [5963-47]Bartzsch, H. / Frach, P. / Weber, J. / Liebig, J.-S. / SPIE-- the International Society for Optical Engineering et al. | 2005
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Characterization of optical thin films exhibiting defects [5963-91]Franta, D. / Ohlidal, I. / SPIE-- the International Society for Optical Engineering et al. | 2005
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High reflectivity measurement with cavity ring-down technique [5963-89]Gao, L. / Xiong, S. / Li, B. / Zhang, Y. / SPIE-- the International Society for Optical Engineering et al. | 2005
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Plasma monitoring of the RLVIP-process with a Langmuir probe [5963-16]Huber, D. / Hallbauer, A. / Pulker, H. K. / SPIE-- the International Society for Optical Engineering et al. | 2005
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Performance data of a variable transmission phase shifting mask blank for 193nm lithography enhanced by inspection contrast tuning [5963-19]Becker, H. / Renno, M. / Hermanns, U. / Seitz, H. / Buttgereit, U. / Knapp, K. / Hess, G. / SPIE-- the International Society for Optical Engineering et al. | 2005
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Oxide and fluoride coatings for the excimer wavelength 193nm [5963-21]Gotzelmann, R. / Hagedorn, H. / Zoller, A. / Kobiak, A. / Klug, W. / SPIE-- the International Society for Optical Engineering et al. | 2005
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Absorption and fluorescence measurements of DUV/VUV coatings [5963-25]Muhlig, C. / Triebel, W. / Bernitzki, H. / Klaus, M. / Bergmann, J. / Kufert, S. / Bublitz, S. / SPIE-- the International Society for Optical Engineering et al. | 2005
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Gravure printing of transparent conducting ITO coatings for display applications [5963-50]Puetz, J. / Heusing, S. / de Haro Moro, M. / Ahlstedt, C. M. / Aegerter, M. A. / SPIE-- the International Society for Optical Engineering et al. | 2005
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Multiple pulse laser-induced damage of antireflection coated lithium triborate [5963-54]Melninkaitis, A. / Miksys, D. / Grigonis, R. / Sirutkaitis, V. / Tumosa, D. / Skokov, G. / Kuzma, D. / SPIE-- the International Society for Optical Engineering et al. | 2005
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Optical, structural, and mechanical properties of gadolinium tri-fluoride thin films grown on amorphous substrates [5963-24]Thielsch, R. / Heber, J. / Uhlig, H. / Kaiser, N. / SPIE-- the International Society for Optical Engineering et al. | 2005
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Nanostructure and optical properties of fluoride films for high-quality DUV/VUV optical components [5963-27]Schroder, S. / Uhlig, H. / Duparre, A. / Kaiser, N. / SPIE-- the International Society for Optical Engineering et al. | 2005
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X-UV chirped mirror fabrication for phase control of attosecond pulses [5963-32]Morlens, A. / Ravet, M. / Laude, V. / Lopez-Martens, R. / Roulliay, M. / Jerome, A. / Delmotte, F. / Bridou, F. / Kazamias, S. / Balcou, P. et al. | 2005
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Comparison of optical resistance of ion assisted deposition and standard electron beam deposition methods for high reflectance dielectric coatings [5963-53]Melninkaitis, A. / Maciulevicius, M. / Rakickas, T. / Miksys, D. / Grigonis, R. / Sirutkaitis, V. / Skrebutenas, A. / Buzelis, R. / Drazdys, R. / Abromavicius, G. et al. | 2005
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Growth and thermal stability of interfaces in ion beam sputtered Mo/Si mirrors [5963-57]Quesnel, E. / Largeron, C. / Muffato, V. / Hodaj, F. / Thibault, J. / SPIE-- the International Society for Optical Engineering et al. | 2005
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Zr-silicate co-evaporated thin films [5963-58]Ciosek, J. / Paszkowicz, W. / Kudla, A. / Pankowski, P. / Stanislawek, U. / SPIE-- the International Society for Optical Engineering et al. | 2005
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Manufacturing of linear variable filters with straight iso-thickness lines [5963-11]Abel-Tiberini, L. / Lemarquis, F. / Marchand, G. / Roussel, L. / Albrand, G. / Lequime, M. / SPIE-- the International Society for Optical Engineering et al. | 2005
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Performances and stability of Sc/Si multilayers with barrier layers for wavelengths around 46 nm [5963-33]Gautier, J. / Delmotte, F. / Roulliay, M. / Ravet, M. / Bridou, F. / Jerome, A. / Giglia, A. / Nannarone, S. / SPIE-- the International Society for Optical Engineering et al. | 2005
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High-performance Cr/Sc multilayers for the soft x-ray range [5963-66]Yulin, S. / Feigl, T. / Kaiser, N. / SPIE-- the International Society for Optical Engineering et al. | 2005