Lithographic stochastics: beyond 3σ (Unbekannt)
- Neue Suche nach: Bristol, Robert L.
- Neue Suche nach: Krysak, Marie E.
- Neue Suche nach: Bristol, Robert L.
- Neue Suche nach: Krysak, Marie E.
In:
Journal of Micro/Nanolithography, MEMS, and MOEMS
;
16
, 2
;
023505
;
2017
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:Lithographic stochastics: beyond 3σ
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Weitere Titelangaben:J. Micro/Nanolith. MEMS MOEMS
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Beteiligte:Bristol, Robert L. ( Autor:in ) / Krysak, Marie E. ( Autor:in )
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Erschienen in:Journal of Micro/Nanolithography, MEMS, and MOEMS ; 16, 2 ; 023505
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Verlag:
- Neue Suche nach: Society of Photo-Optical Instrumentation Engineers
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Erscheinungsdatum:12.06.2017
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ISSN:
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Coden:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Unbekannt
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 16, Ausgabe 2
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