Retrospective on VLSI value scaling and lithography (Unbekannt)
Freier Zugriff
- Neue Suche nach: Rieger, Michael L.
- Neue Suche nach: Rieger, Michael L.
In:
Journal of Micro/Nanolithography, MEMS, and MOEMS
;
18
, 4
;
040902
;
2019
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:Retrospective on VLSI value scaling and lithography
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Weitere Titelangaben:J. Micro/Nanolith. MEMS MOEMS
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Beteiligte:Rieger, Michael L. ( Autor:in )
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Erschienen in:Journal of Micro/Nanolithography, MEMS, and MOEMS ; 18, 4 ; 040902
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Verlag:
- Neue Suche nach: Society of Photo-Optical Instrumentation Engineers
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Erscheinungsdatum:26.11.2019
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ISSN:
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Coden:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Unbekannt
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 18, Ausgabe 4
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