Reconstruction-free wavefront measurements with enhanced sensitivity (Englisch)
- Neue Suche nach: Godin, Thomas
- Neue Suche nach: Fromager, Michael
- Neue Suche nach: Cagniot, Emmanuel
- Neue Suche nach: Brunel, Marc
- Neue Suche nach: Aït-Ameur, Kamel
- Neue Suche nach: Godin, Thomas
- Neue Suche nach: Fromager, Michael
- Neue Suche nach: Cagniot, Emmanuel
- Neue Suche nach: Brunel, Marc
- Neue Suche nach: Aït-Ameur, Kamel
In:
Proc. SPIE
;
9132
; 91320J
;
2014
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ISBN:
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ISSN:
- Aufsatz (Konferenz) / Elektronische Ressource
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Titel:Reconstruction-free wavefront measurements with enhanced sensitivity
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Beteiligte:Godin, Thomas ( Autor:in ) / Fromager, Michael ( Autor:in ) / Cagniot, Emmanuel ( Autor:in ) / Brunel, Marc ( Autor:in ) / Aït-Ameur, Kamel ( Autor:in )
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Kongress:Optical Micro- and Nanometrology V ; 2014 ; Brussels,Belgium
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Erschienen in:Proc. SPIE ; 9132 ; 91320J
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Verlag:
- Neue Suche nach: SPIE
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Erscheinungsdatum:01.05.2014
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ISBN:
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ISSN:
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DOI:
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Medientyp:Aufsatz (Konferenz)
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Format:Elektronische Ressource
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Sprache:Englisch
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Datenquelle:
Inhaltsverzeichnis Konferenzband
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
- 91320A
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Development of a scatterometry reference standardBodermann, Bernd / Loechel, Bernd / Scholze, Frank / Dai, Gaoliang / Wernecke, Jan / Endres, Johannes / Probst, Juergen / Schoengen, Max / Krumrey, Michael / Hansen, Poul-Erik et al. | 2014
- 91320D
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Advanced metrology for the 14 nm node double patterning lithographyCarau, D. / Bouyssou, R. / Dezauzier, C. / Besacier, M. / Gourgon, C. et al. | 2014
- 91320E
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Optical measurements of selected properties of nanocomposite layers with graphene and carbon nanotubes fillersLorenc, Zofia / Salbut, Leszek / Pakula, Anna / Sloma, Marcin / Wroblewski, Grzegorz / Jakubowska, Małgorzata et al. | 2014
- 91320F
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Comparative scanning near-field optical microscopy studies of plasmonic nanoparticle conceptsAndrae, Patrick / Fumagalli, Paul / Schmid, Martina et al. | 2014
- 91320G
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Investigation of the influence of the scanning probe on SNOM near-field images using rigorous simulations including the probeErmes, Markus / Lehnen, Stephan / Bittkau, Karsten / Carius, Reinhard et al. | 2014
- 91320H
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Investigation of error compensation in CGH-based form testing of aspheresStuerwald, S. / Brill, N. / Schmitt, R. et al. | 2014
- 91320I
-
Interferometric sensors based on sinusoidal optical path length modulationKnell, Holger / Schake, Markus / Schulz, Markus / Lehmann, Peter et al. | 2014
- 91320J
-
Reconstruction-free wavefront measurements with enhanced sensitivityGodin, Thomas / Fromager, Michael / Cagniot, Emmanuel / Brunel, Marc / Aït-Ameur, Kamel et al. | 2014
- 91320K
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Ray-based calibration for the micro optical metrology systemYin, Yongkai / Wang, Meng / Li, Ameng / Liu, Xiaoli / Peng, Xiang et al. | 2014
- 91320L
-
Optical design of a vertically integrated array-type Mirau-based OCT systemKrauter, J. / Boettcher, T. / Lyda, W. / Osten, W. / Passilly, N. / Froehly, L. / Bargiel, S. / Albero, J. / Perrin, S. / Lullin, J. et al. | 2014
- 91320M
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Optical diffraction tomography: accuracy of an off-axis reconstructionKostencka, Julianna / Kozacki, Tomasz et al. | 2014
- 91320N
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Time-frequency analysis in optical coherence tomography for technical objects examinationStrąkowski, Marcin R. / Kraszewski, Maciej / Trojanowski, Michał / Pluciński, Jerzy et al. | 2014
- 91320O
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Limited-angle hybrid diffraction tomography for biological samplesKus, A. / Krauze, W. / Kujawinska, M. / Filipiak, M. et al. | 2014
- 91320P
-
Effects of axial scanning in confocal microscopy employing adaptive lenses (CAL)Koukourakis, N. / Finkeldey, M. / Stürmer, M. / Gerhardt, N. C. / Wallrabe, U. / Hofmann, M. R. / Czarske, J. W. / Fischer, A. et al. | 2014
- 91320Q
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Phase aided 3D imaging and modeling: dedicated systems and case studiesYin, Yongkai / He, Dong / Liu, Zeyi / Liu, Xiaoli / Peng, Xiang et al. | 2014
- 91320R
-
A benchmark system for the evaluation of selected phase retrieval methodsLingel, Christian / Hasler, Malte / Haist, Tobias / Pedrini, Giancarlo / Osten, Wolfgang et al. | 2014
- 91320S
-
Size measurement of a pure phase objectÄit-Ameur, K. / Fromager, M. / Brunel, M. et al. | 2014
- 91320T
-
Optimum phase retrieval using the transport of intensity equationMartínez-Carranza, J. / Falaggis, K. / Kozacki, T. et al. | 2014
- 91320U
-
Digital holography to light fieldAsundi, Anand / Zuo, Chao et al. | 2014
- 91320V
-
Measurement of the surface shape and optical thickness variation of a polishing crystal wafer by wavelength tuning interferometerKim, Yangjin / Hibino, Kenichi / Hanayama, Ryohei / Sugita, Naohiko / Mitsuishi, Mamoru et al. | 2014
- 91320W
-
Metrology of undoped double-sided polished silicon wafer: surface, thickness and refractive index profile measurementsLee, Ho-Jae / Joo, Ki-Nam et al. | 2014
- 91320X
-
Quantitative estimate of fs-laser induced refractive index changes in the bulk of various transparent materialsMermillod-Blondin, A. / Seuthe, T. / Eberstein, M. / Grehn, M. / Bonse, J. / Rosenfeld, A. et al. | 2014
- 91320Y
-
Spectral properties of molecular iodine absorption cells filled to saturation pressureHrabina, Jan / Sarbort, Martin / Cip, Ondrej / Lazar, Josef et al. | 2014
- 91320Z
-
Single-shot two-channel Talbot interferometry using checker grating and Hilbert-Huang fringe pattern processingPatorski, K. / Trusiak, M. / Pokorski, K. et al. | 2014
- 91321B
-
Spectral ellipsometry studying of iron's optical and electronic propertiesChernukha, Yevheniia / Stashchuk, Vasyl S. / Polianska, Olena / Oshtuk, Olexsandr et al. | 2014
- 91321C
-
Fingerprint authentication via joint transform correlator and its application in remote access control of a 3D microscopic systemHe, Wenqi / Lai, Hongji / Wang, Meng / Liu, Zeyi / Yin, Yongkai / Peng, Xiang et al. | 2014
- 91321D
-
Towards traceable mechanical properties measurement of silicon nanopillars using contact resonance force microscopyGao, S. / Brand, U. et al. | 2014
- 91321E
-
Tilt angle measurement with a Gaussian-shaped laser beam trackingŠarbort, Martin / Řeřucha, Šimon / Jedlička, Petr / Lazar, Josef / Číp, Ondrej et al. | 2014
- 91321F
-
Development of a laser-speckle-based measurement principle for the evaluation of mechanical deformation of stacked metal sheetsHalder, Clemens / Thurner, Thomas / Mair, Mathias et al. | 2014
- 91321G
-
A dual-styli micro-machined system for precise determination of the thickness of free-standing thin filmsLi, Zhi / Gao, Sai / Wolff, Helmut / Brand, Uwe / Koenders, Ludger et al. | 2014
- 91321H
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Automatic digital filtering for the accuracy improving of a digital holographic measurement systemMatrecano, Marcella / Miccio, Lisa / Persano, Anna / Quaranta, Fabio / Siciliano, Pietro / Ferraro, Pietro et al. | 2014
- 91321I
-
Common-path configuration in total internal reflection digital holography microscopyMatrecano, M. / Calabuig, A. / Paturzo, M. / Ferraro, P. et al. | 2014
- 91321J
-
Active angular alignment of gauge block in system for contactless gauge block calibrationBuchta, Zdeněk / Šarbort, Martin / Řeřucha, Šimon / Hucl, Václav / Čížek, Martin / Lazar, Josef / Číp, Ondřej et al. | 2014
- 91321K
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In-beam tracking refractometry for coordinate interferometric measurementHolá, Miroslava / Lazar, Josef / Číp, Ondřej / Buchta, Zdeněk et al. | 2014
- 91321L
-
Asymmetric polarization-based frequency shifting interferometer for microelectronicsLee, Seung Hyun / Kim, Min Young et al. | 2014
- 913201
-
Front Matter: Volume 9132| 2014
- 913202
-
Optical frequency comb profilometry using a single-pixel cameraHayasaki, Yoshio / Pham, Quang Duc et al. | 2014
- 913204
-
Comparison of areal measurements of the same zone of etched Si and hydroxyapatite layers on etched Si using different profiling techniquesGuellil, Mohamed / Montgomery, Paul C. / Pfeiffer, Pierre / Serio, Bruno et al. | 2014
- 913205
-
Remote laboratory for phase-aided 3D microscopic imaging and metrologyWang, Meng / Yin, Yongkai / Liu, Zeyi / He, Wenqi / Li, Boqun / Peng, Xiang et al. | 2014
- 913206
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3D-optical measurement system using a new vignetting aperture procedureHofbauer, Engelbert / Rascher, Rolf / Wühr, Konrad / Friedke, Felix / Stubenrauch, Thomas / Pastötter, Benjamin / Schleich, Sebastian / Zöcke, Christine et al. | 2014
- 913208
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Measurement comparison of goniometric scatterometry and coherent Fourier scatterometryEndres, J. / Kumar, N. / Petrik, P. / Henn, M. -. / Heidenreich, S. / Pereira, S. F. / Urbach, H. P. / Bodermann, B. et al. | 2014
- 913209
-
Inspection technique of latent flaws on fine polished glass substrates using stress-induced light scattering methodSakata, Yoshitaro / Sakai, Kazufumi / Nonaka, Kazuhiro et al. | 2014
- 913210
-
Displacement measurement with intracavity interferometryLazar, Josef / Holá, Miroslava / Fejfar, Antonín / Stuchlík, Jiří / Kočka, Jan / Oulehla, Jindřich / Číp, Ondřej et al. | 2014
- 913211
-
A more robust and flexible approach to laterally chromatically dispersed, spectrally encoded interferometry (LCSI)Boettcher, Tobias / Gronle, Marc / Mauch, Florian / Osten, Wolfgang et al. | 2014
- 913212
-
Suppression of frequency noise of single mode laser with unbalanced fiber interferometer for subnanometer interferometryŠmíd, Radek / Čížek, Martin / Mikel, Břetislav / Lazar, Josef / Číp, Ondrej et al. | 2014
- 913213
-
Mapping a vibrating surface by using laser self- mixing interferometryOcaña , Roberto / Molina, Teresa et al. | 2014
- 913214
-
Investigation of baseline measurement resolution of a Si plate-based extrinsic Fabry-Perot interferometerUshakov, Nikolai / Liokumovich, Leonid et al. | 2014
- 913215
-
Polymer waveguide sensor with tin oxide thin film integrated onto optical-electrical printed circuit boardLim, Jung Woon / Kim, Seon Hoon / Kim, Jong-Sup / Kim, Jeong Ho / Kim, Yune Hyoun / Lim, Ju Young / Im, Young-Eun / Park, Jong Bok / Hann, Swook et al. | 2014
- 913216
-
Metrology of micro-optical components quality using direct measurement of 3D intensity point spread functionBaranski, Maciej / Perrin, Stephane / Passilly, Nicolas / Froehly, Luc / Bargiel, Sylwester / Albero, Jorge / Gorecki, Christophe et al. | 2014
- 913217
-
Raman spectroscopy of nanostructured silicon fabricated by metal-assisted chemical etchingIatsunskyi, Igor / Jurga, Stefan / Smyntyna, Valentyn / Pavlenko, Mykolai / Myndrul, Valeriy / Zaleska, Anastasia et al. | 2014
- 913218
-
Sub-kHz traceable characterization of stroboscopic scanning white light interferometerHeikkinen, V. / Kassamakov, I. / Paulin, T. / Nolvi, A. / Seppä, J. / Lassila, A. / Hæggström, E. et al. | 2014
- 913219
-
Three-dimensional surface reconstruction by combining a pico-digital projector for structured light illumination and an imaging system with high magnification and high depth of fieldLeong-Hoï, A. / Serio, B. / Twardowski, P. / Montgomery, P. et al. | 2014
-
Limited-angle hybrid diffraction tomography for biological samples [9132-24]Kus, A. / Krauze, W. / Kujawinska, M. / Filipiak, M. / SPIE (Society) et al. | 2014
-
Advanced metrology for the 14 nm node double patterning lithography (Best Student Paper Award) [9132-12]Carau, D. / Bouyssou, R. / Dezauzier, C. / Besacier, M. / Gourgon, C. / SPIE (Society) et al. | 2014
-
Optimum phase retrieval using the transport of intensity equation [9132-29]Martinez-Carranza, J. / Falaggis, K. / Kozacki, T. / SPIE (Society) et al. | 2014
-
Time-frequency analysis in optical coherence tomography for technical objects examination [9132-23]Strakowski, M.R. / Kraszewski, M. / Trojanowski, M. / Plucinski, J. / SPIE (Society) et al. | 2014
-
Measurement of the surface shape and optical thickness variation of a polishing crystal wafer by wavelength tuning interferometer [9132-31]Kim, Y. / Hibino, K. / Hanayama, R. / Sugita, N. / Mitsuishi, M. / SPIE (Society) et al. | 2014
-
Mapping a vibrating surface by using laser self- mixing interferometry [9132-39]Ocana, R. / Molina, T. / SPIE (Society) et al. | 2014
-
Fingerprint authentication via joint transform correlator and its application in remote access control of a 3D microscopic system [9132-49]He, W. / Lai, H. / Wang, M. / Liu, Z. / Yin, Y. / Peng, X. / SPIE (Society) et al. | 2014
-
Asymmetric polarization-based frequency shifting interferometer for microelectronics [9132-58]Lee, S.H. / Kim, M.Y. / SPIE (Society) et al. | 2014
-
In-beam tracking refractometry for coordinate interferometric measurement [9132-57]Hola, M. / Lazar, J. / Cip, O. / Buchta, Z. / SPIE (Society) et al. | 2014
-
Optical measurements of selected properties of nanocomposite layers with graphene and carbon nanotubes fillers [9132-13]Lorenc, Z. / Salbut, L. / Pakula, A. / Sloma, M. / Wroblewski, G. / Jakubowska, M. / SPIE (Society) et al. | 2014
-
Reconstruction-free wavefront measurements with enhanced sensitivity [9132-19]Godin, T. / Fromager, M. / Cagniot, E. / Brunel, M. / Ait-Ameur, K. / SPIE (Society) et al. | 2014
-
Quantitative estimate of fs-laser induced refractive index changes in the bulk of various transparent materials [9132-33]Mermillod-Blondin, A. / Seuthe, T. / Eberstein, M. / Grehn, M. / Bonse, J. / Rosenfeld, A. / SPIE (Society) et al. | 2014
-
Spectral properties of molecular iodine absorption cells filled to saturation pressure [9132-34]Hrabina, J. / Sarbort, M. / Cip, O. / Lazar, J. / SPIE (Society) et al. | 2014
-
A more robust and flexible approach to laterally chromatically dispersed, spectrally encoded interferometry (LCSI) [9132-37]Boettcher, T. / Gronle, M. / Mauch, F. / Osten, W. / SPIE (Society) et al. | 2014
-
Investigation of baseline measurement resolution of a Si plate-based extrinsic Fabry-Perot interferometer [9132-40]Ushakov, N. / Liokumovich, L. / SPIE (Society) et al. | 2014
-
A dual-styli micro-machined system for precise determination of the thickness of freestanding thin films [9132-53]Li, Z. / Gao, S. / Wolff, H. / Brand, U. / Koenders, L. / SPIE (Society) et al. | 2014
-
Remote laboratory for phase-aided 3D microscopic imaging and metrology [9132-4]Wang, M. / Yin, Y. / Liu, Z. / He, W. / Li, B. / Peng, X. / SPIE (Society) et al. | 2014
-
Size measurement of a pure phase object [9132-28]Ait-Ameur, K. / Fromager, M. / Brunel, M. / SPIE (Society) et al. | 2014
-
Metrology of undoped double-sided polished silicon wafer: surface, thickness and refractive index profile measurements [9132-32]Lee, H.-J. / Joo, K.-N. / SPIE (Society) et al. | 2014
-
Displacement measurement with intracavity interferometry [9132-36]Lazar, J. / Hola, M. / Fejfar, A. / Stuchlik, J. / Kocka, J. / Oulehla, J. / Cip, O. / SPIE (Society) et al. | 2014
-
Tilt angle measurement with a Gaussian-shaped laser beam tracking [9132-51]Sarbort, M. / Rerucha, S. / Jedlicka, P. / Lazar, J. / Cip, O. / SPIE (Society) et al. | 2014
-
3D-optical measurement system using a new vignetting aperture procedure [9132-5]Hofbauer, E. / Rascher, R. / Wuhr, K. / Friedke, F. / Stubenrauch, T. / Pastotter, B. / Schleich, S. / Zocke, C. / SPIE (Society) et al. | 2014
-
Investigation of the influence of the scanning probe on SNOM near-field images using rigorous simulations including the probe [9132-15]Ermes, M. / Lehnen, S. / Bittkau, K. / Carius, R. / SPIE (Society) et al. | 2014
-
Investigation of error compensation in CGH-based form testing of aspheres [9132-17]Stuerwald, S. / Brill, N. / Schmitt, R. / SPIE (Society) et al. | 2014
-
Automatic digital filtering for the accuracy improving of a digital holographic measurement system [9132-54]Matrecano, M. / Miccio, L. / Persano, A. / Quaranta, F. / Siciliano, P. / Ferraro, P. / SPIE (Society) et al. | 2014
-
Optical design of a vertically integrated array-type Mirau-based OCT system [9132-21]Krauter, J. / Boettcher, T. / Lyda, W. / Osten, W. / Passilly, N. / Froehly, L. / Bargiel, S. / Albero, J. / Perrin, S. / Lullin, J. et al. | 2014
-
Raman spectroscopy of nanostructured silicon fabricated by metal-assisted chemical etching [9132-44]Iatsunskyi, I. / Jurga, S. / Smyntyna, V. / Pavlenko, M. / Myndrul, V. / Zaleska, A. / SPIE (Society) et al. | 2014
-
Spectral ellipsometry studying of iron's optical and electronic properties [9132-48]Chernukha, Y. / Staschuk, V.S. / Polianska, O. / Oshtuk, O. / SPIE (Society) et al. | 2014
-
Interferometric sensors based on sinusoidal optical path length modulation [9132-18]Knell, H. / Schake, M. / Schulz, M. / Lehmann, P. / SPIE (Society) et al. | 2014
-
Optical diffraction tomography: accuracy of an off-axis reconstruction [9132-22]Kostencka, J. / Kozacki, T. / SPIE (Society) et al. | 2014
-
Suppression of frequency noise of single mode laser with unbalanced fiber interferometer for subnanometer interferometry [9132-38]Smid, R. / Cizek, M. / Mikel, B. / Lazar, J. / Cip, O. / SPIE (Society) et al. | 2014
-
Development of a laser-speckle-based measurement principle for the evaluation of mechanical deformation of stacked metal sheets [9132-52]Halder, C. / Thurner, T. / Mair, M. / SPIE (Society) et al. | 2014
-
Comparison of areal measurements of the same zone of etched Si and hydroxyapatite layers on etched Si using different profiling techniques [9132-3]Guellil, M. / Montgomery, P.C. / Pfeiffer, P. / Serio, B. / SPIE (Society) et al. | 2014
-
Inspection technique of latent flaws on fine polished glass substrates using stress-induced light scattering method [9132-8]Sakata, Y. / Sakai, K. / Nonaka, K. / SPIE (Society) et al. | 2014
-
Development of a scatterometry reference standard [9132-9]Bodermann, B. / Loechel, B. / Scholze, F. / Dai, G. / Wernecke, J. / Endres, J. / Probst, J. / Schoengen, M. / Krumrey, M. / Hansen, P.-E. et al. | 2014
-
Digital holography to light field [9132-30]Asundi, A. / Zuo, C. / SPIE (Society) et al. | 2014
-
A benchmark system for the evaluation of selected phase retrieval methods [9132-27]Lingel, C. / Hasler, M. / Haist, T. / Pedrini, G. / Osten, W. / SPIE (Society) et al. | 2014
-
Polymer waveguide sensor with tin oxide thin film integrated onto optical-electrical printed circuit board [9132-42]Lim, J.W. / Kim, S.H. / Kim, J.-S. / Kim, J.H. / Kim, Y.H. / Lim, J.Y. / Im, J.-E. / Park, J.B. / Hann, S. / SPIE (Society) et al. | 2014
-
Common-path configuration in total internal reflection digital holography microscopy [9132-55]Matrecano, M. / Calabuig, A. / Paturzo, M. / Ferraro, P. / SPIE (Society) et al. | 2014
-
Active angular alignment of gauge block in system for contactless gauge block calibration [9132-56]Buchta, Z. / Sarbort, M. / Rerucha, S. / Hucl, V. / Cizek, M. / Lazar, J. / Cip, O. / SPIE (Society) et al. | 2014
-
Single-shot two-channel Talbot interferometry using checker grating and Hilbert-Huang fringe pattern processing [9132-35]Patorski, K. / Trusiak, M. / Pokorski, K. / SPIE (Society) et al. | 2014
-
Three-dimensional surface reconstruction by combining a pico-digital projector for structured light illumination and an imaging system with high magnification and high depth of field [9132-46]Leong-Hoi, A. / Serio, B. / Twardowski, P. / Montgomery, P. / SPIE (Society) et al. | 2014
-
Optical frequency comb profilometry using a single-pixel camera (Invited Paper) [9132-1]Hayasaki, Y. / Pham, Q.D. / SPIE (Society) et al. | 2014
-
Measurement comparison of goniometric scatterometry and coherent Fourier scatterometry [9132-7]Endres, J. / Kumar, N. / Petrik, P. / Henn, M.-A. / Heidenreich, S. / Pereira, S.F. / Urbach, H.P. / Bodermann, B. / SPIE (Society) et al. | 2014
-
Comparative scanning near-field optical microscopy studies of plasmonic nanoparticle concepts [9132-14]Andrae, P. / Fumagalli, P. / Schmid, M. / SPIE (Society) et al. | 2014
-
Ray-based calibration for the micro optical metrology system [9132-20]Yin, Y. / Wang, M. / Li, A. / Liu, X. / Peng, X. / SPIE (Society) et al. | 2014
-
Metrology of micro-optical components quality using direct measurement of 3D intensity point spread function [9132-43]Baranski, M. / Perrin, S. / Passilly, N. / Froehly, L. / Bargiel, S. / Albero, J. / Gorecki, C. / SPIE (Society) et al. | 2014
-
Sub-kHz traceable characterization of stroboscopic scanning white light interferometer [9132-45]Heikkinen, V. / Kassamakov, I. / Paulin, T. / Nolvi, A. / Seppa, J. / Lassila, A. / Hoeggstrom, E. / SPIE (Society) et al. | 2014
-
Effects of axial scanning in confocal microscopy employing adaptive lenses (CAL) [9132-25]Koukourakis, N. / Finkeldey, M. / Sturmer, M. / Gerhardt, N.C. / Wallrabe, U. / Hofmann, M.R. / Czarske, J.W. / Fischer, A. / SPIE (Society) et al. | 2014
-
Towards traceable mechanical properties measurement of silicon nanopillars using contact resonance force microscopy [9132-50]Gao, S. / Brand, U. / SPIE (Society) et al. | 2014