Integration of a templated directed self-assembly-based hole shrink in a short loop via chain (Unbekannt)
- Neue Suche nach: Rincon-Delgadillo, Paulina
- Neue Suche nach: Chan, Boon Teik
- Neue Suche nach: Doise, Jan
- Neue Suche nach: van der Veen, Marleen
- Neue Suche nach: Heylen, Nancy
- Neue Suche nach: Demuynck, Steven
- Neue Suche nach: Boemmels, Juergen
- Neue Suche nach: Gronheid, Roel
- Neue Suche nach: Rincon-Delgadillo, Paulina
- Neue Suche nach: Chan, Boon Teik
- Neue Suche nach: Doise, Jan
- Neue Suche nach: van der Veen, Marleen
- Neue Suche nach: Heylen, Nancy
- Neue Suche nach: Demuynck, Steven
- Neue Suche nach: Boemmels, Juergen
- Neue Suche nach: Gronheid, Roel
In:
Journal of Micro/Nanolithography, MEMS, and MOEMS
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15
, 4
;
043505
;
2016
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:Integration of a templated directed self-assembly-based hole shrink in a short loop via chain
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Weitere Titelangaben:J. Micro/Nanolith. MEMS MOEMS
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Beteiligte:Rincon-Delgadillo, Paulina ( Autor:in ) / Chan, Boon Teik ( Autor:in ) / Doise, Jan ( Autor:in ) / van der Veen, Marleen ( Autor:in ) / Heylen, Nancy ( Autor:in ) / Demuynck, Steven ( Autor:in ) / Boemmels, Juergen ( Autor:in ) / Gronheid, Roel ( Autor:in )
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Erschienen in:Journal of Micro/Nanolithography, MEMS, and MOEMS ; 15, 4 ; 043505
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Verlag:
- Neue Suche nach: Society of Photo-Optical Instrumentation Engineers
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Erscheinungsdatum:27.10.2016
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ISSN:
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Coden:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Unbekannt
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 15, Ausgabe 4
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