Contactless laser bending of silicon microstructures (Englisch)
- Neue Suche nach: Exner, Horst
- Neue Suche nach: Loschner, Udo
- Neue Suche nach: Exner, Horst
- Neue Suche nach: Loschner, Udo
In:
Proc. SPIE
;
5116
; 383
;
2003
-
ISBN:
-
ISSN:
- Aufsatz (Konferenz) / Elektronische Ressource
-
Titel:Contactless laser bending of silicon microstructures
-
Beteiligte:Exner, Horst ( Autor:in ) / Loschner, Udo ( Autor:in )
-
Kongress:Smart Sensors, Actuators, and MEMS ; 2003 ; Maspalomas,Gran Canaria,Canary Islands,Spain
-
Erschienen in:Proc. SPIE ; 5116 ; 383
-
Verlag:
- Neue Suche nach: SPIE
-
Erscheinungsdatum:24.04.2003
-
ISBN:
-
ISSN:
-
DOI:
-
Medientyp:Aufsatz (Konferenz)
-
Format:Elektronische Ressource
-
Sprache:Englisch
-
Datenquelle:
Inhaltsverzeichnis Konferenzband
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
- 1
-
SOI-silicon as structural layer for NEMS applicationsVillarroya, Maria / Figueras, Eduard / Perez-Murano, Francesc / Campabadal, Francesca / Esteve, Jaume / Barniol, Nuria et al. | 2003
- 1
-
SOI silicon as structural layer for NEMS applications [5116-01]Villarroya, M. / Figueras, E. / Perez-Murano, F. / Campabadal, F. / Esteve, J. / Barniol, N. / SPIE et al. | 2003
- 12
-
Fusion-bonded multilayered SOI for MEMS applications [5116-02]Somasundram, K. / Cole, D. / McNamara, C. / Boyle, A. / McCann, P. / Devine, C. / Nevin, A. / SPIE et al. | 2003
- 12
-
Fusion-bonded multilayer SOI for MEMS applicationsSomasundram, Kumaresa / Cole, David / McNamara, Cormac / Boyle, Anne / McCann, Paul / Devine, Claire / Nevin, Andrew et al. | 2003
- 20
-
Microstructuring of PYREX glass and polymers by excimer laserKeiper, Bernd / Ebert, Robby / Bohme, Rico / Exner, Horst et al. | 2003
- 20
-
Microstructuring of Pyrex glass and polymers by excimer laser [5116-03]Keiper, B. / Ebert, R. / Bohme, R. / Exner, H. / SPIE et al. | 2003
- 28
-
Stereolithography of lead zirconate titanate ceramics for MEMS applications [5116-04]Dufaud, O. / Le Gall, H. / Corbel, S. / SPIE et al. | 2003
- 28
-
Stereolithography of lead zirconate titanate ceramics for MEMS applicationsDufaud, Olivier / Le Gall, Herve / Corbel, Serge et al. | 2003
- 38
-
Fabrication of micromachined TiN1-based microgripper with compliant structure [5116-05]Fu, Y. / Du, H. / SPIE et al. | 2003
- 38
-
Fabrication of micromachined TiNi-based microgripper with complaint structureFu, Yongqing / Du, Hejun et al. | 2003
- 48
-
Electroactive characteristics of hydrogels composed of poly(vinyl alcohol) and poly(N-isopropylacrylamide)Kim, Seon Jeong / Park, Sang Jun / Kim, Sun I. / Kim, In Young / Lee, Young Moo / Kim, Hee Chan / Chung, Taek Dong et al. | 2003
- 48
-
Electroactive characteristics of hydrogels composed of poly(vinyl alcohol) and poly(N-isopropylacrylamide) [5116-06]Kim, S. J. / Park, S. J. / Kim, S. I. / Kim, I. Y. / Lee, Y. M. / Kim, H. C. / Chung, T. D. / SPIE et al. | 2003
- 57
-
Surface microstructuring of biocompatible bone analogue material HAPEX using LIGA technique and embossingSchneider, Andreas / Rea, Susan / Huq, Ejaz / Bonfield, William et al. | 2003
- 57
-
Surface microstructuring of biocompatible bone analogue material HAPEX using LIGA technique and embossing [5116-07]Schneider, A. / Rea, S. / Huq, E. / Bonfield, W. / SPIE et al. | 2003
- 65
-
Modified sol-gel-derived PZT ceramics [5116-08]Ibrahim, S. A. / Ahmed, M. S. / Ramadan, R. M. / Amer, A. M. / SPIE et al. | 2003
- 65
-
Modified sol-gel derived PZT ceramicsIbrahim, S. A. / Ahmed, M. S. / Ramadan, R. M. / Amer, Adel M. et al. | 2003
- 74
-
Smart sensors development based on a distributed bus for microsystems applications [5116-09]Ferrer, C. / Lorente, B. / SPIE et al. | 2003
- 74
-
Smart sensors development based on a distributed bus for microsystems applicationsFerrer, Carles / Lorente, Bibiana et al. | 2003
- 84
-
Low-temperature InO~x thin films for O~3 and NO~2 gas sensing [5116-10]Kiriakidis, G. / Ouacha, H. / Katsarakis, N. / Galatsis, K. / Wlodarski, W. / SPIE et al. | 2003
- 84
-
Low-temperature InOxthin films for O3and NO2gas sensingKiriakidis, George / Ouacha, Hassan / Katsarakis, N. / Galatsis, Kosmas / Wlodarski, Wojtek et al. | 2003
- 92
-
Design fabrication and test of micromachined-silicon capacitive gas sensors with integrated readout [5116-11]Amirola, J. / Rodriguez, A. / Castaner, L. / SPIE et al. | 2003
- 92
-
Design fabrication and test of micromachined-silicon capacitive gas sensors with integrated readoutAmirola, Jorge / Rodiguez, Angel / Castaner, Luis et al. | 2003
- 100
-
Development of strain sensors utilizing giant magnetoresistive and tunneling magnetoresistive devices [5116-12]Lohndorf, M. / Dokupil, S. / Ruhrig, M. / Wecker, J. / Quandt, E. / SPIE et al. | 2003
- 100
-
Development of strain sensors utilizing giant magnetoresistive and tunneling magnetoresistive devicesLoehndorf, Markus / Dokupil, Stefani / Ruehrig, Manfred / Wecker, Joachim / Quandt, Eckhard et al. | 2003
- 109
-
Hybrid neural networks for ISFET source separation [5116-14]Bermejo, S. / Bedoya, G. / Cabestany, J. / SPIE et al. | 2003
- 109
-
Hybrid neural networks for ISFET source separationBermejo, Sergio / Bedoya, Guillermo / Cabestany, Joan et al. | 2003
- 120
-
Compatibility of gas and flow sensor technology fabricationSabate, Neus / Gracia, Isabel / Cane, Carles / Puigcorbe, Jordi / Cerda, Judith / Morante, Joan Ramon / Berganzo, Javier et al. | 2003
- 120
-
Compatibility of gas and flow sensor technology fabrication [5116-15]Sabate, N. / Gracia, I. / Cane, C. / Puigcorbe, J. / Cerda, J. / Morante, J. R. / Berganzo, J. / SPIE et al. | 2003
- 128
-
Pencil probe system for electrochemical analysis and modification in nanometer dimensionsFasching, Rainer J. / Tao, Ye / Hammerick, Kyle / Prinz, Fritz B. et al. | 2003
- 128
-
Pencil probe system for electrochemical analysis and modification in nanometer dimensions [5116-16]Fasching, R. J. / Tao, Y. / Hammerick, K. / Prinz, F. B. / SPIE et al. | 2003
- 136
-
Overview of MEMS/NEMS technology development for space applications at NASA/JPL (Invited Paper) [5116-17]George, T. / SPIE et al. | 2003
- 136
-
Overview of MEMS/NEMS technology development for space applications at NASA/JPLGeorge, Thomas et al. | 2003
- 149
-
Polymer-based MEMS accelerometer with modified organic electronics and thin film transistor (Invited Paper) [5116-126]Varadan, V. K. / SPIE et al. | 2003
- 149
-
Polymer-based MEMS accelerometer with modified organic electronics and thin film transistorVaradan, Vijay K. et al. | 2003
- 160
-
Adhesive wafer bonding for MEMS applicationsDragoi, Viorel / Glinsner, Thomas / Mittendorfer, Gerald / Wieder, Bernhard / Lindner, Paul et al. | 2003
- 160
-
Adhesive wafer bonding for MEMS applications [5116-18]Dragoi, V. / Glinsner, T. / Mittendorfer, G. / Wieder, B. / Lindner, P. / SPIE et al. | 2003
- 168
-
High-performance polysilicon air-gap thin film transistor on low-temperature substratesMahfoz-Kotb, Hicham / Salaun, Anne-Claire / Mohammed-Brahim, Tayeb / Coulon, Nathalie / Bonnaud, Olivier / Mevellec, Jean-Yves et al. | 2003
- 168
-
High-performance polysilicon air-gap thin film transistor on low-temperature substrates [5116-22]Mahfoz-Kotb, H. / Salaun, A. C. / Mohammed-Brahim, T. / Coulon, N. / Bonnaud, O. / Mevellec, J.-Y. / SPIE et al. | 2003
- 176
-
Soft lithographic patterning of oxide thin filmsAbad, Estefania / Whatmore, Roger W. / Zhang, Qi / Huang, Zhaorong et al. | 2003
- 176
-
Soft lithographic patterning of oxide thin films [5116-23]Abad, E. / Whatmore, R. W. / Zhang, Q. / Huang, Z. / SPIE et al. | 2003
- 185
-
Observability, exact controllability, and stabilization of piezoelectric medium coupled to electronic systemsSenouci-Bereksi, Ghouti / Benchaib, Abdelatif et al. | 2003
- 185
-
Observability and exact controllability of piezoelectric medium coupled to electronic systems [5116-24]Senouci-Bereksi, G. / Benchaib, A. / SPIE et al. | 2003
- 197
-
Optical components and actuators for integrated near-field optical data storageHane, Kazuhiro / Kanamori, Yoshiaki / Sasaki, Minoru / Song, Jong Hyeong et al. | 2003
- 197
-
Optical components and actuators for integrated near-field optical data storage (Invited Paper) [5116-25]Hane, K. / Kanamori, Y. / Sasaki, M. / Song, J. H. / SPIE et al. | 2003
- 205
-
Integrated near-field optical head for hybrid recording [5116-26]Chiu, Y. / Wu, M. / Shieh, H. P. D. / Sun, Y. T. / Chou, H. L. / Hsu, W. / SPIE et al. | 2003
- 205
-
Integrated near-field optical head for hybrid recordingChiu, Yi / Wu, Meng-Yu / Shieh, Han-Ping D. / Sun, Yi Ting / Chou, Hsueh-Liang / Hsu, Wensyang et al. | 2003
- 212
-
Optomechanical cycles of photochromic-polymer microsystems induced by laser irradiationAthanassiou, Athanassia / Kalyva, Maria / Lakiotaki, Kleanthi / Georgiou, Savas / Fotakis, Costas et al. | 2003
- 212
-
Optomechanical cycles of photochromic-polymer microsystems induced by laser irradiation [5116-27]Athanassiou, A. / Kalyva, M. / Lakiotaki, K. / Georgiou, S. / Fotakis, C. / SPIE et al. | 2003
- 220
-
Smart tong grippers for microparts [5116-29]Schlick, J. / Zuehlke, D. / SPIE et al. | 2003
- 220
-
Smart tong grippers for micropartsSchlick, Jochen / Zuehlke, Detlef et al. | 2003
- 229
-
Shell-type micromechanical oscillatorZalalutdinov, Maxim / Aubin, Keith L. / Michael, Christopher / Reichenbach, Robert B. / Alan, Tuncay / Zehnder, Alan T. / Houston, Brian H. / Parpia, Jeevak M. / Craighead, Harold G. et al. | 2003
- 229
-
Shell-type micromechanical oscillator [5116-30]Zalalutdinov, M. / Aubin, K. L. / Michael, C. / Reichenbach, R. B. / Alan, T. / Zehnder, A. T. / Houston, B. H. / Parpia, J. M. / Craighead, H. G. / SPIE et al. | 2003
- 237
-
Thermal actuator improvements: tapering and folding (Invited Paper) [5116-33]Sinclair, M. J. / Wang, K. / SPIE et al. | 2003
- 237
-
Thermal actuator improvements: tapering and foldingSinclair, Michael J. / Wang, Kerwin et al. | 2003
- 252
-
Smart electrostrictive composite materials for actuatorsYu, N. / Somphone, T. et al. | 2003
- 252
-
Smart electrostrictive composite materials for actuators [5116-35]Yu, N. / Somphone, T. / SPIE et al. | 2003
- 260
-
Electronic circuitry development in a micropyrotechnic system for micropropulsion applications [5116-36]Puig-Vidal, M. / Lopez, J. / Miribel, P. / Montane, E. / Lopez-Villegas, J. M. / Samitier, J. / Rossi, C. / Camps, T. / Dumonteuil, M. / SPIE et al. | 2003
- 260
-
Electronic circuitry development in a micropyrotechnic system for micropropulsion applicationsPuig-Vidal, Manuel / Lopez, Jaime / Miribel, Pere / Montane, Enric / Lopez-Villegas, Jose M. / Samitier, Josep / Rossi, Carole / Camps, Thierry / Dumonteuil, Maxime et al. | 2003
- 270
-
Sigma-delta microsystems for readout and servo control [5116-37]Delorme, N. / Condemine, C. / Barbier, D. / SPIE et al. | 2003
- 270
-
Sigma-delta microsystems for readout and servo controlDelorme, Nicolas / Condemine, Cyril / Barbier, Daniel et al. | 2003
- 278
-
Microfluid pump in brass with a built-in magnetic driver [5116-38]Atta, R. M. H. / SPIE et al. | 2003
- 278
-
Micro-fluid pump in brass with a built-in magnetic driverAtta, Raghied M. et al. | 2003
- 285
-
Laser beam micro forming as a new adjustment technology using dedicated actuator structuresOlowinsky, Alexander M. / Bosse, Ludger et al. | 2003
- 285
-
Laser beam microforming as a new adjustment technology using dedicated actuator structures [5116-39]Olowinsky, A. M. / Bosse, L. / SPIE et al. | 2003
- 295
-
Design and fabrication of a three-dimensional long-stretch microdrive by electroplating [5116-40]Wu, C.-T. / Tai, W.-C. / Hsu, C.-P. / Hsu, W. / SPIE et al. | 2003
- 295
-
Design and fabrication of a three-dimensional long-stretch micro drive by electroplatingWu, Chien-Tai / Tai, Wen-Chuan / Hsu, Chen-Peng / Hsu, Wensyang et al. | 2003
- 303
-
Fabrication of bead-size sorting chip for chemical array sensorPark, Byung Hwa / Park, Yoon Seok / Sohn, Young-Soo / Neikirk, Dean et al. | 2003
- 303
-
Fabrication of bead-size sorting chip for chemical array sensor (Invited Paper) [5116-42]Park, B. H. / Park, Y. S. / Sohn, Y.-S. / Neikirk, D. P. / SPIE et al. | 2003
- 314
-
Polymeric mechanical sensors with integrated readout in a microfluidic system [5116-43]Calleja, M. / Rasmussen, P. A. / Johansson, A. / Boisen, A. / SPIE et al. | 2003
- 314
-
Polymeric mechanical sensors with piezoresistive readout integrated in a microfluidic systemCalleja, Montserrat / Rasmussen, Peter A. / Johansson, Alicia / Boisen, Anja et al. | 2003
- 322
-
Compact and smart laser diode systems for cancer treatment [5116-44]Svirin, V. N. / Sokolov, V. V. / Solovieva, T. I. / SPIE et al. | 2003
- 322
-
Compact and smart laser diode systems for cancer treatmentSvirin, Viatcheslav N. / Sokolov, Victor V. / Solovieva, Tatiana I. et al. | 2003
- 334
-
Fluidic technology: adding control, computation, and sensing capability to microfluidics [5116-45]Drzewiecki, T. M. / Macia, N. F. / SPIE et al. | 2003
- 334
-
Fluidic technology: adding control, computation, and sensing capability to microfluidicsDrzewiecki, Tadeusz M. / Macia, Narciso F. et al. | 2003
- 348
-
Long-periodic grating in multimode fiber for measuring traces of chromium in water [5116-46]Kumar, P. S. / Vallabhan, C. P. G. / Nampoori, V. P. N. / Radhakrishnan, P. / SPIE et al. | 2003
- 348
-
Long-periodic grating in multimode fiber for measuring traces of chromium in waterSuresh Kumar, P. / Vallabhan, C. P. / Nampoori, V. P. / Radhakrishnan, P. et al. | 2003
- 353
-
Resonating cantilever mass sensor with mechanical on-plane excitationTeva, Jordi / Abadal, Gabriel / Jordà, Xavier / Borrise, Xavier / Davis, Zachary / Barniol, Nuria et al. | 2003
- 353
-
Resonating cantilever mass sensor with mechanical on-plane excitation [5116-48]Teva, J. / Abadal, G. / Jorda, X. / Borrise, X. / Davis, Z. / Barniol, N. / SPIE et al. | 2003
- 364
-
Simulation of bulk micromachined vibration sensor with low noiseLiu, Xiaowei / Huo, Mingxue / Chen, Weiping / Chen, Qiang et al. | 2003
- 364
-
Simulation of bulk-micromachined vibration sensor with low noise [5116-49]Liu, X. / Huo, M. / Chen, W. / Chen, Q. / SPIE et al. | 2003
- 370
-
A novel method for the measurement of the residual stress of surface-micromachined structures for MEMS (Invited Paper) [5116-50]Kim, J.-H. / Kim, J.-G. / Yeon, S.-C. / Hahn, J.-H. / Lee, H.-Y. / Kim, Y.-H. / SPIE et al. | 2003
- 370
-
A novel method for the measurement of the residual stress of surface-micromachined structures for MEMSKim, Jong-Hoon / Kim, Jeong-Gil / Yeon, Soon-Chang / Hahn, Jun-Hee / Lee, Ho-Young / Kim, Yong-Hyup et al. | 2003
- 383
-
Contactless laser bending of silicon microstructures [5116-51]Exner, H. / Loschner, U. / SPIE et al. | 2003
- 383
-
Contactless laser bending of silicon microstructuresExner, Horst / Loschner, Udo et al. | 2003
- 393
-
Rapid prototyping and structure generation using three-dimensional nanolithography with electron-beam-induced chemical reactions [5116-52]Koops, H. W. P. / SPIE et al. | 2003
- 393
-
Rapid prototyping and structure generation using three-dimensional nanolithography with electron-beam-induced chemical reactionsKoops, Hans W. et al. | 2003
- 402
-
Fabrication of nano interdigitated electrodes [5116-53]Berdondini, L. / Kalbac, M. / Gautsch, S. / Gullo, M. / Staufer, U. / Koudelka-Hep, M. / de Rooij, N. F. / SPIE et al. | 2003
- 402
-
Fabrication of nano-interdigitated electrodesBerdondini, Luca / Kalbac, Martin / Gautsch, Sebastien / Gullo, Maurizio / Staufer, Urs / Koudelka-Hep, Milena / de Rooij, Nico F. et al. | 2003
- 406
-
Dynamic characterization of SiO2-Au microcantilevers using Michelson interferometerMarinier, Guillaume / Dilhaire, Stefan / Patino Lopez, Luis D. / Benzohra, Mohamed et al. | 2003
- 406
-
Dynamic characterization of SiO~2-Au microcantilevers using Michelson interferometer [5116-54]Marinier, G. / Dilhaire, S. / Lopez, L. D. P. / Benzohra, M. / SPIE et al. | 2003
- 414
-
Characterization of SU-8 as a resist for electron-beam lithography [5116-56]Nallani, A. K. / Park, S. W. / Lee, J. B. / SPIE et al. | 2003
- 414
-
Characterization of SU-8 as a photoresist for electron-beam lithographyNallani, Arun K. / Park, Sang Won / Lee, Jeong Bong et al. | 2003
- 424
-
Characterization of embedded root method in UV-LIGA processHo, Chien-Hung / Hsu, Wensyang et al. | 2003
- 424
-
Characterization of embedded root method in UV-LIGA process [5116-57]Ho, C.-H. / Hsu, W. / SPIE et al. | 2003
- 435
-
Optical MEMS devices for telecom systemsPardo, Flavio / Aksyuk, Vladimir A. / Arney, Susanne / Bair, H. / Basavanhally, Nagesh R. / Bishop, David J. / Bogart, Gregory R. / Bolle, Cristian A. / Bower, J. E. / Carr, Dustin et al. | 2003
- 445
-
MEMS mirror array for a wavelength-selective 1xK switchLopez, Daniel O. / Pardo, Flavio / Aksyuk, Vladimir A. / Simon, M. E. / Shea, Herbert R. / Marom, Dan M. / Neilson, David T. / Cirelli, Raymond A. / Klemens, Fred P. / Mansfield, William M. et al. | 2003
- 456
-
MEMS variable optical attenuator for volume productionVaganov, Vladimir I. / in 't Hout, Sebastiaan R. / Belov, Nickolai et al. | 2003
- 465
-
Monolithic III-V and hybrid polysilicon-III-V microelectromechanical tunable vertical-cavity surface-emitting lasersOchoa, Edward M. / Lott, James A. / Nelson, Thomas R. / Harvey, M. C. / Raley, J. A. / Stintz, Andreas / Malloy, Kevin J. et al. | 2003
- 473
-
A back-to-back micromirror device for optical add/drop multiplexer applicationsLin, Yu-Chen / Chiou, Jin-Chern et al. | 2003
- 480
-
Enhancement on optical attenuation by nonsmooth tunable mirror curvaturesLin, Cheng-Hsuan / Hsu, Wensyang et al. | 2003
- 488
-
FDTD simulation of hexagonal micropillar cavitiesTung, Frankie K. L. / Ma, Ning / Poon, Andrew W. et al. | 2003
- 495
-
Fabrication of a highly efficient optical modulator based on silicon-on-insulatorAtta, Raghied M. H. / Ensell, Graham J. / Evans, Alan G. R. / Png, Jason C. E. / Reed, Graham T. et al. | 2003
- 502
-
Polymers in RF and millimeter-wave applicationsGrenier, Katia M. / Lubecke, Victor / Bouchriha, Fouad / Rabbia, Laurent / Dubuc, David / Pons, Patrick / Plana, Robert et al. | 2003
- 514
-
Infrared wavelength-selective micromachined microbolometersKim, Jun Wan / Neikirk, Dean et al. | 2003
- 523
-
Finline technology for millimeter-wave MEMSFu, Jeffrey S. / Zhou, Jiaoyun / Lu, Yilong / Ma, Jianguo / Shen, Zhongxiang et al. | 2003
- 531
-
Laser annealing for high-Q MEMS resonatorsAubin, Keith L. / Zalalutdinov, Maxim / Reichenbach, Robert B. / Houston, Brian H. / Zehnder, Alan T. / Parpia, Jeevak M. / Craighead, Harold G. et al. | 2003
- 536
-
High-density multilayer connection technology for MEMS and CMOS applicationsBai, Seoung Jai / Fasching, Rainer J. / Prinz, Fritz B. et al. | 2003
- 543
-
Optically controlled microwave switch deviceViitanen, Ari J. / Tretyakov, Sergei A. et al. | 2003
- 551
-
Membrane-based HEB mixer for THz applicationsBaubert, Jean / Salez, Morvan / Delorme, Yan / Pons, Patrick / Goltsman, Gregory / Merkel, Harald / Leconte, Benoit et al. | 2003
- 563
-
Submillimeter mixers based on superconductive parallel junction arraysBoussaha, Faouzi / Salez, Morvan C. / Delorme, Yan / Feret, Alexandre / Lecomte, Benoit / Westerberg, Karl / Chaubet, Michel et al. | 2003
- 571
-
A 4-bit digital MEMS phase shifterZhu, Jian / Zhou, Bailing / Lin, Jinting / Yu, Yuanwei / Lu, Le et al. | 2003
- 577
-
Three-dimensional polymer MEMS with functionalized carbon nanotubes by microstereolithographyVaradan, Vijay K. / Xie, Jining et al. | 2003
- 587
-
Fabrication of monolithic photovoltaic minimodules using bulk micromachining techniques.Bermejo, Sandra / Ortega, Pablo R. / Castaner, Luis et al. | 2003
- 596
-
Stress release of PECVD oxide by RTACharavel, Remy / Olbrechts, Benoit / Raskin, Jean-Pierre et al. | 2003
- 607
-
Fabrication of conductive atomic force microscope probes and their evaluation for carrier mappingFouchier, Marc / Eyben, Pierre / Alvarez, David / Duhayon, Natasja / Xu, MingWei / Brongersma, Sywert / Lisoni, Judit / Vandervorst, Wilfried et al. | 2003
- 617
-
Characterization of front- to backwafer alignment and bulk micromachining using electrical overlay test structuresvan Zeijl, Henk W. / Slabbekoorn, John et al. | 2003
- 627
-
Modification on surface roughness by combining dry and wet etchingLee, Cheng-Chang / Hsu, Wensyang et al. | 2003
- 636
-
Matching different size mask to improve stepper throughput effectivelyWeng, Fu-Tien / Hsu, Hung-Jen / Chang, Chih-Kung / Hsiao, Yu-Kung et al. | 2003
- 640
-
Microlens design for compact lens systemHsu, Hung-Jen / Weng, Fu-Tien / Chang, Chih-Kung / Hsiao, Yu-Kung et al. | 2003
- 647
-
The micro fabrication using selective laser sintering micron metal powderChen, Jimin / Wang, Xubao / Zuo, Tiechuan et al. | 2003
- 652
-
New method decreasing drive voltage of torsion beam actuator micromechanical optical switchesDong, Wei / Zhang, Xindong / Liu, Caixia / Jia, Cuiping / Pan, Jianxuan / Ji, Ping / Chen, Weiyou et al. | 2003
- 658
-
Dynamic characterization of passive microstructures (SiO2-Au microcantilevers) under controlled environmentMarinier, Guillaume / Joubert, Eric / Benzohra, Mohamed / Ketata, Mohamed et al. | 2003
- 666
-
Systematic design methodology of bistable compliant micro-mechanismsTsay, Jinni / Sung, Cheng-Kuo / Su, Liang-Qing et al. | 2003
- 676
-
Circular RF MEMS resonator solutions for 100-nm to 10-nm SOI structuresMyllymaki, Sami K. / Ristolainen, E. / Heino, P. / Lehto, A. / Varjonen, K. et al. | 2003
- 682
-
Stability of diffusion equation solution using various formulation of finite difference methodMalachowski, Michal / Olesik, Jadwiga et al. | 2003
- 690
-
Design considerations of electrostatic forces in microaccelerometersDong, Jingxin / Wu, Xiaochun et al. | 2003
- 699
-
Advantages of p++polysilicon etch stop layer versus p++siliconCharavel, Remy / Laconte, Jean / Raskin, Jean Pierre et al. | 2003
- 710
-
Characterization of mechanical properties of Ti50.6Ni19.4Pd30alloy showing different phase transformation behaviorsTian, Qing C. / Wu, Jian S. et al. | 2003
- 718
-
High-repetition-rate current drivers for picosecond laser modules employed in high-precision laser radars and 3D visionVainshtein, Sergey N. / Yuferev, Valentin S. / Kostamovaara, Juha T. et al. | 2003
- 727
-
High-temperature contact-less position sensor based on giant magnetoresistive Agx-Co1-xalloyArana, Sergio / Castano, Enrique / Gracia, Javier et al. | 2003
- 735
-
Measurement of thermoelectric, galvanomagnetic, and thermomagnetic effects on microsamples at ultrahigh pressureOvsyannikov, Sergey V. / Shchennikov, Vladimir V. et al. | 2003
- 744
-
MEMS-based transmission lines for microwave applicationsWu, Qun / Fu, Jiahui / Gu, Xuemai / Shi, Huajuan / Lee, Jongchul et al. | 2003
- 751
-
A simple method to fabricate buried channel optical waveguides based on porous siliconJia, Zhenhong / Tu, Chuzhe / Zhou, Jun / Li, Rui et al. | 2003
- 756
-
Electrical characterizations of smart hydrogel based on alginate/poly (diallyldimethylammonium chloride) in solutionsKim, Seon Jeong / Yoon, Seoung Gil / Kim, In Young / Lee, Young H. / An, Kay Hyeok / Kim, Nam G. / Hong, Chul U. et al. | 2003
- 764
-
Microfluidics meets thin-film electronics: a new approach towards an integrated intelligent lab-on-a-chipSchafer, Heiko / Chemnitz, Steffen / Schumacher, Stephanie / Koziy, Volodymyr / Fischer, Alexander / Meixner, Alfred J. / Ehrhardt, Dietmar / Bohm, Markus et al. | 2003
- 775
-
Cost-effective masks for deep x-ray lithographyScheunemann, Heinz-Ulrich / Loechel, Bernd / Jian, Linke / Schondelmaier, Daniel / Desta, Yohannes M. / Goettert, Jost et al. | 2003
- 782
-
Monolithical integration of polymer-based microfluidic structures on application-specific integrated circuitsChemnitz, Steffen / Schafer, Heiko / Schumacher, Stephanie / Koziy, Volodymyr / Fischer, Alexander / Meixner, Alfred J. / Ehrhardt, Dietmar / Bohm, Markus et al. | 2003
- 790
-
Semiconductor gas sensor compatibility with CMOS technologiesLopez-Bosque, Maria Jesus / Plaza, Jose Antonio / Santander, Joaquin / Gracia, Isabel / Cane, Carles / Wollenstein, Juergen / Moretton, Emmanuel / Lambrecht, Armin / Schjolberg-Henriksen, Kari et al. | 2003
- 802
-
Design and evaluation of automatic joining-assembly system of optical collimators with high efficiencyChoi, Doo-Sun / Je, Tae-Jin / Hwang, K.H. / Moon, J.H. et al. | 2003
- 810
-
Amorphous silicon thin film for all-optical micromodulatorNigro, Maria Arcangela M. / Cantore, Francesca / Della Corte, Francesco G. / Summonte, Caterina et al. | 2003
- 818
-
Study of the systems thin metal film/thick lithium niobate substrate implanted by Ar+ions and its application for production of pyroelectric photodetectorsLysyuk, Viktor O. / Poperenko, Leonid V. / Staschuk, Vasiliy S. / Kluy, Mykola I. et al. | 2003
- 829
-
Fabrication of nitride thin films from laser plasmaKotlyarchuk, Bohdan K. / Popovych, Dmytro I. / Serednytski, Andrew et al. | 2003
- 836
-
Influence of electric field on emission of high-energy electron from ITO layersOlesik, Jadwiga / Malachowski, Michal J. / Olesik, Zygmunt et al. | 2003
- 844
-
Novel three-axis silicon probe with integrated circuit on chip for microsystem componentsNesterov, Vladimir / Pornnoppadol, Petcharin / Brand, Uwe / Wilke, Ralph / Schmidt, M. / Buettgenbach, Stephanus et al. | 2003
- 850
-
Electromechanical microscanners efficiency enhancement using modeling resultsMukhurov, Nikolay I. / Efemov, Georgy I. et al. | 2003
- 857
-
New micromachined VOA for improvement of the optical characteristicsJung, Sungcheon / Hong, Yoonshik / Lee, Junghyun / Lee, Hyunkee et al. | 2003
- 864
-
Low-loss wide band filters and resonator filters using high-temperature stable high-electromechanical coupling surface acoustic wave substrates using micro-fabrication technologyYamanouchi, Kazuhiko / Ishii, Toru et al. | 2003
- 870
-
Influence of microstructure of tungsten oxide thin films on their general performance as ozone and NOxgas sensorsBerger, Olena / Hoffmann, Thomas / Fischer, Wolf-Joachim / Melev, Valeri et al. | 2003
- 882
-
System approach to MEMS commercializationVaganov, Vladimir I. / Belov, Nickolai / in 't Hout, Sebastiaan R. et al. | 2003
- 890
-
Three-dimensional bonding technologies for MEMSVaganov, Vladimir I. / Belov, Nickolai / in 't Hout, Sebastiaan R. et al. | 2003
- 901
-
Advanced MEMS-based infrared imagerChen, Ming et al. | 2003
- 904
-
Layered SAW nitrogen dioxide sensor with WO3selective layerIppolito, Samuel J. / Kalantar-zadeh, Kourosh / Trinchi, Adrian / Powell, David A. / Wlodarski, Wojtek et al. | 2003
- 912
-
Vibration measurement of microcomponents by fringe projection methodWu, Tao / Tay, ChoJui / Quan, Chenggen / Wang, Shihua / Shang, HuaiMin et al. | 2003