Comparison of OPC job prioritization schemes to generate data for mask manufacturing (Englisch)
- Neue Suche nach: Lewis, Travis
- Neue Suche nach: Veeraraghavan, Vijay
- Neue Suche nach: Jantzen, Kenneth
- Neue Suche nach: Kim, Stephen
- Neue Suche nach: Park, Minyoung
- Neue Suche nach: Russell, Gordon
- Neue Suche nach: Simmons, Mark
- Neue Suche nach: Lewis, Travis
- Neue Suche nach: Veeraraghavan, Vijay
- Neue Suche nach: Jantzen, Kenneth
- Neue Suche nach: Kim, Stephen
- Neue Suche nach: Park, Minyoung
- Neue Suche nach: Russell, Gordon
- Neue Suche nach: Simmons, Mark
In:
Proc. SPIE
;
9427
; 942711
;
2015
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ISBN:
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ISSN:
- Aufsatz (Konferenz) / Elektronische Ressource
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Titel:Comparison of OPC job prioritization schemes to generate data for mask manufacturing
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Beteiligte:Lewis, Travis ( Autor:in ) / Veeraraghavan, Vijay ( Autor:in ) / Jantzen, Kenneth ( Autor:in ) / Kim, Stephen ( Autor:in ) / Park, Minyoung ( Autor:in ) / Russell, Gordon ( Autor:in ) / Simmons, Mark ( Autor:in )
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Kongress:Design-Process-Technology Co-optimization for Manufacturability IX ; 2015 ; San Jose,California,United States
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Erschienen in:Proc. SPIE ; 9427 ; 942711
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Verlag:
- Neue Suche nach: SPIE
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Erscheinungsdatum:18.03.2015
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ISBN:
-
ISSN:
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DOI:
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Medientyp:Aufsatz (Konferenz)
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Format:Elektronische Ressource
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Sprache:Englisch
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Datenquelle:
Inhaltsverzeichnis Konferenzband
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