Reliability test methodology for MEMS and MOEMS under electrical overstress and electrostatic discharge stress (Unbekannt)
- Neue Suche nach: Sangameswaran, Sandeep
- Neue Suche nach: De Coster, Jeroen
- Neue Suche nach: Groeseneken, Guido
- Neue Suche nach: De Wolf, Ingrid
- Neue Suche nach: Sangameswaran, Sandeep
- Neue Suche nach: De Coster, Jeroen
- Neue Suche nach: Groeseneken, Guido
- Neue Suche nach: De Wolf, Ingrid
In:
Journal of Micro/Nanolithography, MEMS and MOEMS
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11
, 2
;
021204
;
2012
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:Reliability test methodology for MEMS and MOEMS under electrical overstress and electrostatic discharge stress
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Weitere Titelangaben:J. Micro/Nanolith. MEMS MOEMS
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Beteiligte:Sangameswaran, Sandeep ( Autor:in ) / De Coster, Jeroen ( Autor:in ) / Groeseneken, Guido ( Autor:in ) / De Wolf, Ingrid ( Autor:in )
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Erschienen in:Journal of Micro/Nanolithography, MEMS and MOEMS ; 11, 2 ; 021204
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Verlag:
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Erscheinungsdatum:14.05.2012
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ISSN:
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Coden:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Unbekannt
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 11, Ausgabe 2
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