Extreme ultraviolet interference lithography at the Paul Scherrer Institut (Unbekannt)
- Neue Suche nach: Auzelyte, Vaida
- Neue Suche nach: Dais, Christian
- Neue Suche nach: Farquet, Patrick
- Neue Suche nach: Grützmacher, Detlev
- Neue Suche nach: Heyderman, Laura J.
- Neue Suche nach: Luo, Feng
- Neue Suche nach: Olliges, Sven
- Neue Suche nach: Padeste, Celestino
- Neue Suche nach: Sahoo, Pratap K.
- Neue Suche nach: Thomson, Tom
- Neue Suche nach: Turchanin, Andrey
- Neue Suche nach: David, Christian
- Neue Suche nach: Solak, Harun H.
- Neue Suche nach: Auzelyte, Vaida
- Neue Suche nach: Dais, Christian
- Neue Suche nach: Farquet, Patrick
- Neue Suche nach: Grützmacher, Detlev
- Neue Suche nach: Heyderman, Laura J.
- Neue Suche nach: Luo, Feng
- Neue Suche nach: Olliges, Sven
- Neue Suche nach: Padeste, Celestino
- Neue Suche nach: Sahoo, Pratap K.
- Neue Suche nach: Thomson, Tom
- Neue Suche nach: Turchanin, Andrey
- Neue Suche nach: David, Christian
- Neue Suche nach: Solak, Harun H.
In:
Journal of Micro/Nanolithography, MEMS and MOEMS
;
8
, 2
;
021204
;
2009
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:Extreme ultraviolet interference lithography at the Paul Scherrer Institut
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Weitere Titelangaben:J. Micro/Nanolith. MEMS MOEMS
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Beteiligte:Auzelyte, Vaida ( Autor:in ) / Dais, Christian ( Autor:in ) / Farquet, Patrick ( Autor:in ) / Grützmacher, Detlev ( Autor:in ) / Heyderman, Laura J. ( Autor:in ) / Luo, Feng ( Autor:in ) / Olliges, Sven ( Autor:in ) / Padeste, Celestino ( Autor:in ) / Sahoo, Pratap K. ( Autor:in ) / Thomson, Tom ( Autor:in )
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Erschienen in:Journal of Micro/Nanolithography, MEMS and MOEMS ; 8, 2 ; 021204
-
Verlag:
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Erscheinungsdatum:27.04.2009
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ISSN:
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Coden:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Unbekannt
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 8, Ausgabe 2
Zeige alle Jahrgänge und Ausgaben
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
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