Tunable cylindrical microlenses based on aluminum nitride membranes (Englisch)
- Neue Suche nach: Leopold, Steffen
- Neue Suche nach: Paetz, Daniel
- Neue Suche nach: Knoebber, Fabian
- Neue Suche nach: Ambacher, Oliver
- Neue Suche nach: Sinzinger, Stefan
- Neue Suche nach: Hoffmann, Martin
- Neue Suche nach: Leopold, Steffen
- Neue Suche nach: Paetz, Daniel
- Neue Suche nach: Knoebber, Fabian
- Neue Suche nach: Ambacher, Oliver
- Neue Suche nach: Sinzinger, Stefan
- Neue Suche nach: Hoffmann, Martin
In:
Proc. SPIE
;
8616
; 861611
;
2013
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ISBN:
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ISSN:
- Aufsatz (Konferenz) / Elektronische Ressource
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Titel:Tunable cylindrical microlenses based on aluminum nitride membranes
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Beteiligte:Leopold, Steffen ( Autor:in ) / Paetz, Daniel ( Autor:in ) / Knoebber, Fabian ( Autor:in ) / Ambacher, Oliver ( Autor:in ) / Sinzinger, Stefan ( Autor:in ) / Hoffmann, Martin ( Autor:in )
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Kongress:MOEMS and Miniaturized Systems XII ; 2013 ; San Francisco,California,USA
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Erschienen in:Proc. SPIE ; 8616 ; 861611
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Verlag:
- Neue Suche nach: SPIE
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Erscheinungsdatum:13.03.2013
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ISBN:
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ISSN:
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DOI:
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Medientyp:Aufsatz (Konferenz)
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Format:Elektronische Ressource
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Sprache:Englisch
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Datenquelle:
Inhaltsverzeichnis Konferenzband
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
- 86160A
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Optical scanners based on thermo-optical tuning of an integrated-optical waveguide modeMarkweg, E. / Hoffmann, M. et al. | 2013
- 86160C
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Resonant biaxial 7-mm MEMS mirror for omnidirectional scanningHofmann, U. / Aikio, M. / Janes, J. / Senger, F. / Stenchly, V. / Weiss, M. / Quenzer, H.-J. / Wagner, B. / Benecke, W. et al. | 2013
- 86160D
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Position sensing and tracking with quasistatic MEMS mirrorsRichter, S. / Stutz, M. / Gratzke, A. / Schleitzer, Y. / Krampert, G. / Hoeller, F. / Wolf, U. / Riedel, L. / Doering, D. et al. | 2013
- 86160E
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Aluminum nitride supported 1D micromirror with static rotation angle >11°Weinberger, Stefan / Hoffmann, Martin et al. | 2013
- 86160F
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Wide steering angle microscanner based on curved surfaceSabry, Yasser / Khalil, Diaa / Saadany, Bassam / Bourouina, Tarik et al. | 2013
- 86160G
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SOI based electromagnetic MEMS scanners and applications in laser systemsBrown, G. / Bauer, R. / Lubeigt, W. / Uttamchandani, D. et al. | 2013
- 86160H
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Arrayed beam steering device for advanced 3D displaysBae, Jungmok / Choi, Yoon-Sun / Choi, Kyuhwan / Kim, Yunhee / Kwon, Yongjoo / Song, Hoon / Kim, Eoksu / Choi, Seungyeol / Lee, Junghoon / Lee, Sangyoon et al. | 2013
- 86160I
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2D electrostatic micromirror array with high field factor for high-power applicationLani, S. / Bayat, D. / Pétremand, Y. et al. | 2013
- 86160J
-
Fabrication of vertical moving micro-optical switch for display applicationsShim, Dongsik / Kim, Woonbae / Choi, Hyung et al. | 2013
- 86160K
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Development of a fully programmable MEMS diffraction gratingZamkotsian, F. / Timotijevic, B. / Lockhart, R. / Stanley, R. P. / Lanzoni, P. / Luetzelschwab, M. / Canonica, M. / Noel, W. / Tormen, M. et al. | 2013
- 86160L
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Design and characterization of a hybrid-integrated MEMS scanning grating spectrometerGrüger, Heinrich / Knobbe, Jens / Pügner, Tino / Schenk, Harald et al. | 2013
- 86160M
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SWIFTS: a groundbreaking integrated technology for high-performance spectroscopy and optical sensorsBonneville, Christophe / Thomas, Fabrice / de Mengin Poirier, Mikhael / Le Coarer, Etienne / Benech, Pierre / Gonthiez, Thierry / Morand, Alain / Coutant, Olivier / Morino, Eric / Puget, Renaud et al. | 2013
- 86160N
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Fabrication and evaluation of a 500 W cladding-light stripperKliner, A. / Hou, Kai-Chung / Plötner, M. / Hupel, Ch. / Stelzner, Th. / Schreiber, T. / Eberhardt, R. / Tünnermann, A. et al. | 2013
- 86160O
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Spatial beam splitting for fully integrated MEMS interferometerKhirallah, Kareem / Ramsis, Inas / Serry, Mohamed / Swillam, Mohamed / Sedky, Sherif et al. | 2013
- 86160P
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In-plane diffraction loss free optical cavity using coated optical fiber and silicon micromachined spherical mirrorSabry, Yasser / Bourouina, Tarik / Saadany, Bassam / Khalil, Diaa et al. | 2013
- 86160Q
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A tunable split-ladder photonic crystal cavity by nanoelectromechanical actuatorTian, Feng / Zhou, Guangya / Chau, Fook Siong / Deng, Jie / Akkipeddi, Ramam / Tang, Xiaosong / Teo, Siew Lang / Loke, Yee Cheong et al. | 2013
- 86160R
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Compact holographic printer using RGB waveguide holographic optical elementsPyun, Kyungsuk P. / Choi, Chilsung / Morozov, Alexander V. / Kim, Sunil / An, Jungkwuen et al. | 2013
- 86160T
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Innovative approach to high stroke electrostatic actuatorsLange, N. / Wippermann, F. / Beckert, E. / Eberhardt, R. / Tünnermann, A. et al. | 2013
- 86160U
-
Tunable MEMS diffraction gratings with improved displacement profile of the fixed-fixed beamsSuresh, V. Gowri / Bhattacharya, Shanti / Dasgupta, Nandita et al. | 2013
- 86160V
-
Optimization of biogas production using MEMS based near infrared inline-sensorSaupe, Ray / Seider, Thomas / Stock, Volker / Kujawski, Olaf / Otto, Thomas / Gessner, Thomas et al. | 2013
- 86160X
-
InGaAsP optical device integration on SOI platform by Ar/O2plasma assisted bondingHigo, A. / Li, L. / Higurashi, E. / Sugiyama, M. / Nakano, Y. et al. | 2013
- 86160Y
-
A new fabrication method for nano-gratings based on the high flexibility of PDMSCui, Min / Zhang, Yong / Zhang, Binzhen / Wang, Wanjun et al. | 2013
- 86160Z
-
Development of a focusing micromirror device with an in-plane stress relief structure in SOI technologyKronast, Wolfgang / Mescheder, Ulrich / Müller, Bernhard / Huster, Rolf et al. | 2013
- 861601
-
Front Matter: Volume 8616| 2013
- 861602
-
Towards future systems with nano-optics contributionsKaminska, Bozena / Najiminaini, Mohamadreza / Chuo, Yindar / Landrock, Clint / Omrane, Badr / Carson, Jeffrey J. L. et al. | 2013
- 861603
-
MOEMS pressure sensors for geothermal well monitoringChallener, William / Palit, Sabarni / Jones, Roger / Airey, Li / Craddock, Russell / Knobloch, Aaron et al. | 2013
- 861604
-
Optical probe design with extended depth-of-focus for optical coherence microscopy and optical coherence tomographyLee, Seungwan / Choi, Minseog / Lee, Eunsung / Jung, Kyu-Dong / Chang, Jong-hyeon / Kim, Woonbae et al. | 2013
- 861605
-
3D micro-optical lens scanner made by multi-wafer bonding technologyBargiel, S. / Gorecki, C. / Barański, M. / Passilly, N. / Wiemer, M. / Jia, C. / Frömel, J. et al. | 2013
- 861606
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Electrostatic MEMS resonating micro-polygonal scanner for circumferential endoscopic bio-imagingMu, Xiaojing / Zhou, Guangya / Yu, Hongbin / Tsai, Julius Ming-Lin / Neo, Wee Keong / Kumar, A Senthil / Chau, Fook Siong et al. | 2013
- 861607
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A water-immersible two-axis scanning mirror microsystem for ultrasound and photoacoustic microscopic imaging applicationsHuang, Chih-Hsien / Yao, Junjie / Wang, Lihong V. / Zou, Jun et al. | 2013
- 861610
-
Development of adaptive liquid microlenses and microlens arraysBerry, Shaun R. / Stewart, Jason B. / Thorsen, Todd A. / Guha, Ingrid et al. | 2013
- 861611
-
Tunable cylindrical microlenses based on aluminum nitride membranesLeopold, Steffen / Paetz, Daniel / Knoebber, Fabian / Ambacher, Oliver / Sinzinger, Stefan / Hoffmann, Martin et al. | 2013
- 861612
-
Liquid lens based on electrowetting: actual developments on larger aperture and multiple electrodes design for image stabilization or beam steeringBerge, Bruno / Broutin, Jérôme / Gaton, Hilario / Malet, Géraldine / Simon, Eric / Thieblemont, Florent et al. | 2013
- 861613
-
The fabrication of out of plane aspherical microlens arraysZhang, Yong / Wang, Wanjun et al. | 2013
- 861614
-
MOEMS-based time-of-flight camera for 3D video capturingYou, Jang-Woo / Park, Yong-Hwa / Cho, Yong-Chul / Park, Chang-Young / Yoon, Heesun / Lee, Sang-Hun / Lee, Seung-Wan et al. | 2013
- 861615
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Simultaneous multispectral imaging using lenslet arraysHinnrichs, Michele / Jensen, James et al. | 2013
- 861616
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Batch fabrication of micro-optical sensing and imaging devicesWippermann, F. C. / Reimann, A. / Oelschläger, A. / Dannberg, P. / Blöhbaum, F. / Koburg, C. / Köhler, T. et al. | 2013
- 861617
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Diffraction and photometric limits in today's miniature digital camera systemsBrückner, Andreas / Schöberl, Michael et al. | 2013
- 861618
-
Optical MEMS in space instruments for Earth observation and astronomyZamkotsian, F. / Liotard, A. / Lanzoni, P. / Viard, T. et al. | 2013
- 861619
-
Closed-loop control driver for quasi-static MOEMS mirrorsTortschanoff, A. / Holzmann, D. / Lenzhofer, M. / Sandner, T. / Kenda, A. et al. | 2013
-
Position sensing and tracking with quasistatic MEMS mirrors (Invited Paper) [8616-11]Richter, S. / Stutz, M. / Gratzke, A. / Schleitzer, Y. / Krampert, G. / Hoeller, F. / Wolf, U. / Riedel, L. / Doering, D. / SPIE (Society) et al. | 2013
-
Aluminum nitride supported 1D micromirror with static rotation angle >11^o [8616-12]Weinberger, S. / Hoffmann, M. / SPIE (Society) et al. | 2013
-
Compact holographic printer using RGB waveguide holographic optical elements (Invited Paper) [8616-25]Pyun, K.P. / Choi, C. / Morozov, A.V. / Kim, S. / An, J. / SPIE (Society) et al. | 2013
-
SOI based electromagnetic MEMS scanners and applications in laser systems [8616-14]Brown, G. / Bauer, R. / Lubeigt, W. / Uttamchandani, D. / SPIE (Society) et al. | 2013
-
2D electrostatic micromirror array with high field factor for high-power application [8616-16]Lani, S. / Bayat, D. / Petremand, Y. / SPIE (Society) et al. | 2013
-
Tunable cylindrical microlenses based on aluminum nitride membranes [8616-37]Leopold, S. / Paetz, D. / Knoebber, F. / Ambacher, O. / Sinzinger, S. / Hoffmann, M. / SPIE (Society) et al. | 2013
-
Optical MEMS in space instruments for Earth observation and astronomy [8616-44]Zamkotsian, F. / Liotard, A. / Lanzoni, P. / Viard, T. / SPIE (Society) et al. | 2013
-
Development of a fully programmable MEMS diffraction grating [8616-18]Zamkotsian, F. / Timotijevic, B. / Lockhart, R. / Stanley, R.P. / Lanzoni, P. / Luetzelschwab, M. / Canonica, M. / Noel, W. / Tormen, M. / SPIE (Society) et al. | 2013
-
Spatial beam splitting for fully integrated MEMS interferometer [8616-22]Khirallah, K. / Ramsis, I. / Serry, M. / Swillam, M. / Sedky, S. / SPIE (Society) et al. | 2013
-
InGaAsP optical device integration on SOI platform by Ar/O~2 plasma assisted bonding [8616-32]Higo, A. / Li, L. / Higurashi, E. / Sugiyama, M. / Nakano, Y. / SPIE (Society) et al. | 2013
-
Optical scanners based on thermo-optical tuning of an integrated-optical waveguide mode [8616-7]Markweg, E. / Hoffmann, M. / SPIE (Society) et al. | 2013
-
Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning (Best Paper Award) [8616-9]Hofmann, U. / Aikio, M. / Janes, J. / Senger, F. / Stenchly, V. / Weiss, M. / Quenzer, H.-J. / Wagner, B. / Benecke, W. / SPIE (Society) et al. | 2013
-
Design and characterization of a hybrid-integrated MEMS scanning grating spectrometer (Invited Paper) [8616-19]Gruger, H. / Knobbe, J. / Pugner, T. / Schenk, H. / SPIE (Society) et al. | 2013
-
Fabrication and evaluation of a 500 W cladding-light stripper [8616-21]Kliner, A. / Hou, K.-C. / Plotner, M. / Hupel, C. / Stelzner, T. / Schreiber, T. / Eberhardt, R. / Tunnermann, A. / SPIE (Society) et al. | 2013
-
In-plane diffraction loss free optical cavity using coated optical fiber and silicon micromachined spherical mirror [8616-23]Sabry, Y. / Bourounia, T. / Saadany, B. / Khalil, D. / SPIE (Society) et al. | 2013
-
Development of a focusing micromirror device with an in-plane stress relief structure in SOI technology [8616-34]Kronast, W. / Mescheder, U. / Muller, B. / Huster, R. / SPIE (Society) et al. | 2013
-
Liquid lens based on electrowetting: actual developments on larger aperture and multiple electrodes design for image stabilization or beam steering [8616-38]Berge, B. / Broutin, J. / Gaton, H. / Malet, G. / Simon, E. / Thieblemont, F. / SPIE (Society) et al. | 2013
-
MOEMS-based time-of-flight camera for 3D video capturing (Invited Paper) [8616-40]You, J.-W. / Park, Y.-H. / Cho, Y.-C. / Park, C.-Y. / Yoon, H. / Lee, S.-H. / Lee, S.-W. / SPIE (Society) et al. | 2013
-
Batch fabrication of micro-optical sensing and imaging devices [8616-42]Wippermann, F.C. / Reimann, A. / Oelschlager, A. / Dannberg, P. / Blohbaum, F. / Koburg, C. / Kohler, T. / SPIE (Society) et al. | 2013
-
Diffraction and photometric limits in today's miniature digital camera systems [8616-43]Bruckner, A. / Schoberl, M. / SPIE (Society) et al. | 2013
-
MOEMS pressure sensors for geothermal well monitoring (Plenary Paper) [8616-102]Challener, W. / Palit, S. / Jones, R. / Airey, L. / Craddock, R. / Knobloch, A. / SPIE (Society) et al. | 2013
-
Arrayed beam steering device for advanced 3D displays (Invited Paper) [8616-15]Bae, J. / Choi, Y.-S. / Choi, K. / Kim, Y. / Kwon, Y. / Song, H. / Kim, E. / Choi, S. / Lee, J. / Lee, S. et al. | 2013
-
A new fabrication method for nano-gratings based on the high flexibility of PDMS [8616-33]Cui, M. / Zhang, Y. / Zhang, B. / Wang, W. / SPIE (Society) et al. | 2013
-
SWIFTS: a groundbreaking integrated technology for high-performance spectroscopy and optical sensors (Invited Paper) [8616-20]Bonneville, C. / Thomas, F. / de Mengin Poirier, M. / Le Coarer, E. / Benech, P. / Gonthiez, T. / Morand, A. / Coutant, O. / Morino, E. / Puget, R. et al. | 2013
-
Development of adaptive liquid microlenses and microlens arrays [8616-35]Berry, S.R. / Stewart, J.B. / Thorsen, T.A. / Guha, I. / SPIE (Society) et al. | 2013
-
Simultaneous multispectral imaging using lenslet arrays [8616-41]Hinnrichs, M. / Jensen, J. / SPIE (Society) et al. | 2013
-
Wide steering angle microscanner based on curved surface (Best Student Paper Award) [8616-13]Sabry, Y. / Khalil, D. / Saadany, B. / Bourounia, T. / SPIE (Society) et al. | 2013
-
Towards future systems with nano-optics contributions (Plenary Paper) [8616-101]Kaminska, B. / Najiminaini, M. / Chuo, Y. / Landrock, C. / Omrane, B. / Carson, J.J.L. / SPIE (Society) et al. | 2013
-
A water-immersible two-axis scanning mirror microsystem for ultrasound and photoacoustic microscopic imaging applications [8616-4]Huang, C.-H. / Yao, J. / Wang, L.V. / Zou, J. / SPIE (Society) et al. | 2013
-
The fabrication of out of plane aspherical microlens arrays [8616-39]Zhang, Y. / Wang, W. / SPIE (Society) et al. | 2013
-
Optical probe design with extended depth-of-focus for optical coherence microscopy and optical coherence tomography [8616-1]Lee, S. / Choi, M. / Lee, E. / Jung, K.-D. / Chang, J. / Kim, W. / SPIE (Society) et al. | 2013
-
3D micro-optical lens scanner made by multi-wafer bonding technology [8616-2]Bargiel, S. / Gorecki, C. / Baranski, M. / Passilly, N. / Wiemer, M. / Jia, C. / Fromel, J. / SPIE (Society) et al. | 2013
-
Electrostatic MEMS resonating micro-polygonal scanner for circumferential endoscopic bio-imaging [8616-3]Mu, X. / Zhou, G. / Yu, H. / Tsai, J.M.-L. / Neo, W.K. / Kumar, A.S. / Chau, F.S. / SPIE (Society) et al. | 2013
-
Tunable MEMS diffraction gratings with improved displacement profile of the fixed-fixed beams [8616-28]Suresh, V.G. / Bhattacharya, S. / Dasgupta, N. / SPIE (Society) et al. | 2013
-
Optimization of biogas production using MEMS based near infrared inline-sensor [8616-30]Saupe, R. / Seider, T. / Stock, V. / Kujawski, O. / Otto, T. / Gessner, T. / SPIE (Society) et al. | 2013
-
Fabrication of vertical moving micro-optical switch for display applications [8616-17]Shim, D. / Kim, W. / Choi, H. / SPIE (Society) et al. | 2013
-
A tunable split-ladder photonic crystal cavity by nanoelectromechanical actuator [8616-24]Tian, F. / Zhou, G. / Chau, F.S. / Deng, J. / Akkipeddi, R. / Tang, X. / Teo, S.L. / Loke, Y.C. / SPIE (Society) et al. | 2013
-
Innovative approach to high stroke electrostatic actuators [8616-27]Lange, N. / Wippermann, F. / Beckert, E. / Eberhardt, R. / Tunnermann, A. / SPIE (Society) et al. | 2013
-
Closed-loop control driver for quasi-static MOEMS mirrors [8616-45]Tortschanoff, A. / Holzmann, D. / Lenzhofer, M. / Sandner, T. / Kenda, A. / SPIE (Society) et al. | 2013