Pitch variations of self-assembled cylindrical block copolymers in lithographically defined trenches (Unbekannt)
- Neue Suche nach: Boots, Henk
- Neue Suche nach: de Ruiter, Jessica M.
- Neue Suche nach: Nguyen, Thanh Trung
- Neue Suche nach: Brizard, Aurelie
- Neue Suche nach: Peeters, Emiel
- Neue Suche nach: Wuister, Sander F.
- Neue Suche nach: Druzhinina, Tamara S.
- Neue Suche nach: Wolterink, Joanne Klein
- Neue Suche nach: Fraaije, Johannes G. E. M. (Hans)
- Neue Suche nach: Boots, Henk
- Neue Suche nach: de Ruiter, Jessica M.
- Neue Suche nach: Nguyen, Thanh Trung
- Neue Suche nach: Brizard, Aurelie
- Neue Suche nach: Peeters, Emiel
- Neue Suche nach: Wuister, Sander F.
- Neue Suche nach: Druzhinina, Tamara S.
- Neue Suche nach: Wolterink, Joanne Klein
- Neue Suche nach: Fraaije, Johannes G. E. M. (Hans)
In:
Journal of Micro/Nanolithography, MEMS and MOEMS
;
13
, 3
;
033015
;
2014
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:Pitch variations of self-assembled cylindrical block copolymers in lithographically defined trenches
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Weitere Titelangaben:J. Micro/Nanolith. MEMS MOEMS
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Beteiligte:Boots, Henk ( Autor:in ) / de Ruiter, Jessica M. ( Autor:in ) / Nguyen, Thanh Trung ( Autor:in ) / Brizard, Aurelie ( Autor:in ) / Peeters, Emiel ( Autor:in ) / Wuister, Sander F. ( Autor:in ) / Druzhinina, Tamara S. ( Autor:in ) / Wolterink, Joanne Klein ( Autor:in ) / Fraaije, Johannes G. E. M. (Hans) ( Autor:in )
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Erschienen in:Journal of Micro/Nanolithography, MEMS and MOEMS ; 13, 3 ; 033015
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Verlag:
- Neue Suche nach: Society of Photo-Optical Instrumentation Engineers
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Erscheinungsdatum:15.09.2014
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ISSN:
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Coden:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Unbekannt
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 13, Ausgabe 3
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