Interferometric precision with Fourier-based deflectometry (Englisch)
- Neue Suche nach: Beghuin, D.
- Neue Suche nach: Dubois, X.
- Neue Suche nach: Joannes, L.
- Neue Suche nach: Hutsebaut, X.
- Neue Suche nach: Antoine, P.
- Neue Suche nach: Beghuin, D.
- Neue Suche nach: Dubois, X.
- Neue Suche nach: Joannes, L.
- Neue Suche nach: Hutsebaut, X.
- Neue Suche nach: Antoine, P.
In:
Proc. SPIE
;
7718
; 77180B
;
2010
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ISBN:
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ISSN:
- Aufsatz (Konferenz) / Elektronische Ressource
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Titel:Interferometric precision with Fourier-based deflectometry
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Beteiligte:Beghuin, D. ( Autor:in ) / Dubois, X. ( Autor:in ) / Joannes, L. ( Autor:in ) / Hutsebaut, X. ( Autor:in ) / Antoine, P. ( Autor:in )
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Kongress:Optical Micro- and Nanometrology III ; 2010 ; Brussels,Belgium
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Erschienen in:Proc. SPIE ; 7718 ; 77180B
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Verlag:
- Neue Suche nach: SPIE
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Erscheinungsdatum:12.05.2010
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ISBN:
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ISSN:
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DOI:
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Medientyp:Aufsatz (Konferenz)
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Format:Elektronische Ressource
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Sprache:Englisch
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Datenquelle:
Inhaltsverzeichnis Konferenzband
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
- 77180A
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CCD-ARS set-up: a comprehensive and fast high-sensitivity characterisation tool for optical componentsZerrad, Myriam / Lequime, Michel / Deumié, Carole / Amra, Claude et al. | 2010
- 77180B
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Interferometric precision with Fourier-based deflectometryBeghuin, D. / Dubois, X. / Joannes, L. / Hutsebaut, X. / Antoine, P. et al. | 2010
- 77180C
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A deflectometric sensor for the on-machine surface form measurement and adaptive manufacturingKrey, Stefan / Erichsen, Iris / Mahns, Ilka / van Amstel, Wim D. / Vielhaber, Karl et al. | 2010
- 77180D
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Statistical signatures of random media: application to selective cancellation of scattered lightSorrentini, Jacques / Zerrad, Myriam / Amra, Claude et al. | 2010
- 77180E
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Object-adapted fringe projection technique on scattered data interpolationZhou, Wenjing / Peng, Junzheng / Chen, Mingyi / Yu, Yingjie et al. | 2010
- 77180F
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Next-generation test equipment for micro-productionGastinger, Kay / Johnsen, Lars / Kujawinska, Malgorzata / Jozwik, Michal / Zeitner, Uwe / Dannberg, Peter / Albero, Jorge / Bargiel, Sylwester / Schaeffel, Christoph / Beer, Stephan et al. | 2010
- 77180G
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Automated multiscale measurement system for MEMS characterisationLyda, W. / Burla, A. / Haist, T. / Zimmermann, J. / Osten, W. / Sawodny, O. et al. | 2010
- 77180H
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Simulation and in-plane movement characterization of 2D MEMS platformKrężel, Jerzy / Laszczyk, Karolina / Bargiel, Sylwester / Gorecki, Christophe / Kujawińska, Małgorzata / Parriaux, Olivier / Tonchev, Svetlen et al. | 2010
- 77180I
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Multiresolution analysis of 2D confocal microscope imagesBianchi, D. / Vernes, A. / Vorlaufer, G. / Betz, G. et al. | 2010
- 77180J
-
Comparability and uncertainty of shape measurements with white-light interferometersBoedecker, S. / Bauer, W. / Krüger-Sehm, R. / Lehmann, P. H. / Rembe, C. et al. | 2010
- 77180L
-
Modelling the colour of a coated rough-steel surfaceGoossens, V. / Stijns, E. / Van Gils, S. / Finsy, R. / Terryn, H. et al. | 2010
- 77180M
-
Measurements of characteristic parameters of extremely small cogged wheels with low module by means of low-coherence interferometryPakula, Anna / Tomczewski, Slawomir / Skalski, Andrzej / Biało, Dionizy / Salbut, Leszek et al. | 2010
- 77180N
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Optical characterization of semiconductor microlenses using a Mach-Zehnder interferometer in the near-infrared regionOttevaere, H. / Vermeulen, N. / Gomez, V. / Thienpont, H. et al. | 2010
- 77180O
-
Sensitivity enhancement of bimaterial MOEMS thermal imaging sensor array using 2-λ wavelength readoutFerhanoĝlu, O. / Urey, H. et al. | 2010
- 77180P
-
Characterization and inspection of micro-lens array by SCBS microscopeQu, Weijuan / Chee, Oi Choo / Yu, Yingjie / Ng-Lee, Hooi Leng / Tian, Ailing / Asundi, Anand et al. | 2010
- 77180Q
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Multispectral characterization of diffractive micromirror arraysBerndt, Dirk / Heber, Jörg / Sinning, Steffen / Kunze, Detlef / Knobbe, Jens / Schmidt, Jan-Uwe / Bring, Martin / Rudloff, Dirk / Friedrichs, Martin / Rössler, Jana et al. | 2010
- 77180S
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Unification of approaches to optimization and metrological characterization of continuous-relief diffractive optical elementsKorolkov, V. P. / Ostapenko, S. V. / Nasyrov, R. K. / Gutman, A. S. / Sametov, A. R. et al. | 2010
- 77180T
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Multi-wavelength digital holographic microscopy for high-resolution inspection of surfaces and imaging of phase specimenKosmeier, Sebastian / Langehanenberg, Patrik / Przibilla, Sabine / von Bally, Gert / Kemper, Björn et al. | 2010
- 77180U
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Advances in the development of the LNE metrological atomic force microscopePoyet, Benoit / Ducourtieux, Sébastien et al. | 2010
- 77180V
-
Millimeter scale topographical image of highly integrated optical structures using enlarged metrological atomic-force microscopyTopsu, Suat / Chassagne, Luc / Sinno, Ahmad / Ruaux, Pascal / Alayli, Yasser / Lerondel, Gilles / Blaize, Stéphane / Bruyant, Auréline / Royer, Pascal et al. | 2010
- 77180X
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One-shot measurement of surface profile using an astigmatic microscope systemKang, C.-S. / Lee, J.-U. / Kim, J. W. / Kim, J.-A. / Jin, J. / Eom, T. B. et al. | 2010
- 77180Y
-
Test objects for calibration of SEMs and AFMs operating at the nanoscaleGavrilenko, V. P. / Novikov, Yu A. / Rakov, A. V. / Todua, P. A. et al. | 2010
- 77180Z
-
Digital reflection holography based systems development for MEMS testingSingh, Vijay Raj / Liansheng, Sui / Asundi, Anand et al. | 2010
- 77181B
-
Accuracy of ellipsometric measurements of Si-SiO2structuresGavrilenko, V. P. / Novikov, Yu. A. / Rakov, A. V. / Todua, P. A. et al. | 2010
- 77181C
-
An optical microform calibration system for ball-shaped hardness indentersLi, Zhi / Gao, Sai / Herrmann, Konrad et al. | 2010
- 77181D
-
Optical metrology for process control: modeling and simulation of sensors for a comparison of different measurement principlesFleischle, D. / Lyda, W. / Mauch, F. / Osten, W. et al. | 2010
- 77181E
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Scatterometric analysis of chatter marks occurring in industrial grinding processesBöhm, J. / Vernes, A. / Jech, M. / Vellekoop, M. et al. | 2010
- 77181F
-
An optically non-destructive, non-contact, and vibration-insensitive edge quality assessment system for semiconductor and harddisk drive industriesSumriddetchkajorn, Sarun / Chaitavon, Kosom et al. | 2010
- 77181G
-
Optical coherent sensor for monitoring and measurement of engineering structuresSałbut, Leszek / Dziuban, Jan A. et al. | 2010
- 77181H
-
Highly sensitive wavefront sensor for visual inspection of bare and patterned silicon wafersLazareva, I. / Nutsch, A. / Schellenberger, M. / Pfitzner, L. / Frey, L. et al. | 2010
- 77181I
-
Semi-derivative real filter for the measurement of the wavefront distortionKasztelanic, Rafał / Barański, Maciej et al. | 2010
- 77181J
-
In situ control of roughness of processed surfaces by reflectometric methodFilatov, Yuriy D. / Filatov, Oleksandr Y. / Heisel, Uwe / Storchak, Michael / Monteil, Guy et al. | 2010
- 77181L
-
A micro-SPM head array for large-scale topography measurementGao, S. / Li, Z. / Herrmann, K. et al. | 2010
- 77181M
-
Simple methods for alignment of line distance sensor arraysBremer, H. / Schmähling, F. / Elster, C. / Krey, S. / Ruprecht, A. / Schulz, M. / Stavridis, M. / Wiegmann, A. et al. | 2010
- 77181P
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Optical testing of bifocal diffractive-refractive intraocular lenses using Shack-Hartmann wavefront sensorGutman, A. S. / Shchesyuk, I. V. / Korolkov, V. P. et al. | 2010
- 771801
-
Front Matter: Volume 7718| 2010
- 771803
-
Deep-ultraviolet digital holographic microscopy for nano-inspectionFaridian, Ahmad / Hopp, David / Pedrini, Giancarlo / Osten, Wolfgang et al. | 2010
- 771804
-
Digital holography from shadowgraphic phase estimatesEilenberger, Falk / Pliakis, Dimitris / Minardi, Stefano / Pertsch, Thomas et al. | 2010
- 771805
-
Fast noncontact surface roughness measurements up to the micrometer range by dual-wavelength digital holographic microscopyKühn, Jonas / Solanas, Eduardo / Bourquin, Sébastien / Blaser, Jean-François / Dorigatti, Luca / Keist, Thierry / Emery, Yves / Depeursinge, Christian et al. | 2010
- 771806
-
Managing the depth of focus in 3D imaging through controlled distortion of digital hologramsPaturzo, M. / Memmolo, P. / Finizio, A. / Ferraro, P. et al. | 2010
- 771808
-
Investigation of enhanced 2D field-stitching method as a simulation-tool for line-edge roughness in scatterometryBilski, Bartosz / Frenner, Karsten / Osten, Wolfgang et al. | 2010
- 771810
-
Measuring ultra-sonic in-plane vibrations with the scanning confocal heterodyne interferometerRembe, C. / Ur-Rehman, F. / Heimes, F. / Boedecker, S. / Dräbenstedt, A. et al. | 2010
- 771813
-
Motion detection using speckle photography and extended fractional Fourier transformBhaduri, B. / Tay, C. J. / Quan, C. et al. | 2010
- 771814
-
Electromagnetic prediction of multiscale depolarizationZerrad, Myriam / Sorrentini, Jacques / Soriano, Gabriel / Amra, Claude et al. | 2010
- 771816
-
Error analysis of 3D shearography using finite-element modellingGoto, D. T. / Groves, R. M. et al. | 2010
- 771817
-
Phase retrieval in ESPI from a dense phase fringe patternNiu, H. / Quan, C. / Tay, C. J. et al. | 2010
- 771818
-
Narrow-selection bandwith of femtosecond laser comb with application to changes in optical path distanceŠmíd, Radek / Ježek, Jan / Buchta, Zdenêk / Lazar, Josef et al. | 2010
- 771819
-
Investigations of fast-rotating bodies using an interferometric laser Doppler distance sensor systemGünther, P. / Dreier, F. / Pfister, T. / Czarske, J. / Haupt, T. / Gude, M. / Hufenbach, W. et al. | 2010
-
Measurements of characteristic parameters of extremely small cogged wheels with low module by means of low-coherence interferometry [7718-21]Pakula, A. / Tomczewski, S. / Skalski, A. / Bialo, D. / Salbut, L. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
Multispectral characterization of diffractive micromirror arrays [7718-25]Berndt, D. / Heber, J. / Sinning, S. / Kunze, D. / Knobbe, J. / Schmidt, J. / Bring, M. / Rudloff, D. / Friedrichs, M. / Rossler, J. et al. | 2010
-
Highly sensitive wavefront sensor for visual inspection of bare and patterned silicon wafers [7718-53]Lazareva, I. / Nutsch, A. / Schellenberger, M. / Pfitzner, L. / Frey, L. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
A deflectometric sensor for the on-machine surface form measurement and adaptive manufacturing [7718-11]Krey, S. / Erichsen, I. / Mahns, I. / van Amstel, W.D. / Vielhaber, K. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
Statistical signatures of random media: application to selective cancellation of scattered light [7718-12]Sorrentini, J. / Zerrad, M. / Amra, C. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
Multiresolution analysis of 2D confocal microscope images [7718-17]Bianchi, D. / Vernes, A. / Vorlaufer, G. / Betz, G. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
Optical characterization of semiconductor microlenses using a Mach-Zehnder interferometer in the near-infrared region (Invited Paper) [7718-22]Ottevaere, H. / Vermeulen, N. / Gomez, V. / Thienpont, H. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
Test objects for calibration of SEMs and AFMs operating at the nanoscale [7718-32]Gavrilenko, V.P. / Novikov, Y.A. / Prokhorov, A.M. / Rakov, A.V. / Todua, P.A. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
Digital reflection holography based systems development for MEMS testing [7718-33]Singh, V.R. / Liansheng, S. / Asundi, A. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
Phase retrieval in ESPI from a dense phase fringe pattern [7718-42]Niu, H. / Quan, C. / Tay, C.J. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
Scatterometric analysis of chatter marks occurring in industrial grinding processes [7718-50]Bohm, J. / Vernes, A. / Jech, M. / Vellekoop, M. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
An optically non-destructive, non-contact, and vibration-insensitive edge quality assessment system for semiconductor and harddisk drive industries [7718-51]Sumriddetchkajorn, S. / Chaitavon, K. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
Digital holography from shadowgraphic phase estimates [7718-03]Eilenberger, F. / Pliakis, D. / Minardi, S. / Pertsch, T. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
Investigation of enhanced 2D field-stitching method as a simulation-tool for line-edge roughness in scatterometry [7718-07]Bilski, B. / Frenner, K. / Osten, W. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
An optical microform calibration system for ball-shaped hardness indenters [7718-48]Li, Z. / Gao, S. / Herrmann, K. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
Optical metrology for process control: modeling and simulation of sensors for a comparison of different measurement principles [7718-49]Fleischle, D. / Lyda, W. / Mauch, F. / Osten, W. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
Deep-ultraviolet digital holographic microscopy for nano-inspection [7718-02]Faridian, A. / Hopp, D. / Pedrini, G. / Osten, W. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
Fast noncontact surface roughness measurements up to the micrometer range by dual-wavelength digital holographic microscopy [7718-04]Kuhn, J. / Solanas, E. / Bourquin, S. / Blaser, J.-F. / Dorigatti, L. / Keist, T. / Emery, Y. / Depeursinge, C. / SPIE (Society) / B-PHOT--Brussels Photonics Team et al. | 2010
-
Managing the depth of focus in 3D imaging through controlled distortion of digital holograms [7718-05]Paturzo, M. / Memmolo, P. / Finizio, A. / Ferraro, P. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
Simulation and in-plane movement characterization of 2D MEMS platform [7718-16]Krezel, J. / Laszczyk, K. / Bargiel, S. / Gorecki, C. / Kujawinska, M. / Parriaux, O. / Tonchev, S. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
Electromagnetic prediction of multiscale depolarization [7718-39]Zerrad, M. / Sorrentini, J. / Soriano, G. / Amra, C. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
In situ control of roughness of processed surfaces by reflectometric method [7718-55]Filatov, Y.D. / Filatov, O.Y. / Heisel, U. / Storchak, M. / Monteil, G. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
Advances in the development of the LNE metrological atomic force microscope [7718-28]Poyet, B. / Ducourtieux, S. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
Semi-derivative real filter for the measurement of the wavefront distortion [7718-54]Kasztelanic, R. / Baranski, M. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
CCD-ARS set-up: a comprehensive and fast high-sensitivity characterisation tool for optical components [7718-09]Zerrad, M. / Lequime, M. / Deumie, C. / Amra, C. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
Automated multiscale measurement system for MEMS characterisation [7718-15]Lyda, W. / Burla, A. / Haist, T. / Zimmermann, J. / Osten, W. / Sawodny, O. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
Modelling the colour of a coated rough-steel surface [7718-20]Goossens, V. / Stijns, E. / Van Gils, S. / Finsy, R. / Terryn, H. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
Comparability and uncertainty of shape measurements with white-light interferometers [7718-18]Boedecker, S. / Bauer, W. / Kruger-Sehm, R. / Lehmann, P.H. / Rembe, C. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
Unification of approaches to optimization and metrological characterization of continuous-relief diffractive optical elements [7718-27]Korolkov, V.P. / Ostapenko, S.V. / Nasyrov, R.K. / Gutman, A.S. / Sametov, A.R. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
Optical coherent sensor for monitoring and measurement of engineering structures [7718-52]Lukaszewski, D. / Salbut, L. / Dziuban, J.A. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
Simple methods for alignment of line distance sensor arrays [7718-58]Bremer, H. / Schmahling, F. / Elster, C. / Krey, S. / Ruprecht, A. / Schulz, M. / Stavridis, M. / Wiegmann, A. / SPIE (Society) / B-PHOT--Brussels Photonics Team et al. | 2010
-
Next-generation test equipment for micro-production (Invited Paper) [7718-14]Gastinger, K. / Johnsen, L. / Kujawinska, M. / Jozwik, M. / Zeitner, U. / Dannberg, P. / Albero, J. / Bargiel, S. / Schaeffel, C. / Beer, S. et al. | 2010
-
Error analysis of 3D shearography using finite-element modelling [7718-41]Goto, D.T. / Groves, R.M. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
A micro-SPM head array for large-scale topography measurement [7718-57]Gao, S. / Li, Z. / Herrmann, K. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
Object-adapted fringe projection technique on scattered data interpolation [7718-13]Zhou, W. / Peng, J. / Chen, M. / Yu, Y. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
Characterization and inspection of micro-lens array by SCBS microscope [7718-24]Qu, W. / Chee, O.C. / Yu, Y. / Ng-Lee, H.L. / Tian, A. / Asundi, A. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
Multi-wavelength digital holographic microscopy for high-resolution inspection of surfaces and imaging of phase specimen (Invited Paper) [7718-47]Kosmeier, S. / Langehanenberg, P. / Przibilla, S. / von Bally, G. / Kemper, B. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
Motion detection using speckle photography and extended fractional Fourier transform [7718-38]Bhaduri, B. / Tay, C.J. / Quan, C. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
Narrow-selection bandwith of femtosecond laser comb with application to changes in optical path distance [7718-43]Smid, R. / Jezek, J. / Buchta, Z. / Cizek, M. / Lazar, J. / Cip, O. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
Optical testing of bifocal diffractive-refractive intraocular lenses using Shack-Hartmann wavefront sensor [7718-61]Gutman, A.S. / Shchesyuk, I.V. / Korolkov, V.P. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
One-shot measurement of surface profile using an astigmatic microscope system [7718-31]Kang, C.-S. / Lee, J.-U. / Kim, J.W. / Kim, J.-A. / Jin, J. / Eom, T.B. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
Investigations of fast-rotating bodies using an interferometric laser Doppler distance sensor system [7718-44]Gunther, P. / Dreier, F. / Pfister, T. / Czarske, J. / Haupt, T. / Gude, M. / Hufenbach, W. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
Interferometric precision with Fourier-based deflectometry [7718-10]Beghuin, D. / Dubois, X. / Joannes, L. / Hutsebaut, X. / Antoine, P. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
Sensitivity enhancement of bimaterial MOEMS thermal imaging sensor array using 2-λ wavelength readout [7718-23]Ferhanoglu, O. / Urey, H. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
Millimeter scale topographical image of highly integrated optical structures using enlarged metrological atomic-force microscopy [7718-29]Topsu, S. / Chassagne, L. / Sinno, A. / Ruaux, P. / Alayli, Y. / Lerondel, G. / Blaize, S. / Bruyant, A. / Royer, P. / SPIE (Society) et al. | 2010
-
Measuring ultra-sonic in-plane vibrations with the scanning confocal heterodyne interferometer [7718-35]Rembe, C. / Ur-Rehman, F. / Heimes, F. / Boedecker, S. / Drabenstedt, A. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010
-
Accuracy of ellipsometric measurements of Si-SiO~2 structures [7718-46]Gavrilenko, V.P. / Novikov, Y.A. / Rakov, A.V. / Todua, P.A. / SPIE (Society) / B-PHOT--Brussels Photonics Team / Comite belge d'optique et al. | 2010