Fabrication process of a microstructures based on hydrogenated amorphous SiGe films for applications in MEMS devices (Englisch)
- Neue Suche nach: Galindo-Mentle, M.
- Neue Suche nach: López-Huerta, F.
- Neue Suche nach: Palomino-Merino, R.
- Neue Suche nach: Zúñiga-Islas, C.
- Neue Suche nach: Calleja-Arriaga, W.
- Neue Suche nach: Herrera-May, A. L.
- Neue Suche nach: Galindo-Mentle, M.
- Neue Suche nach: López-Huerta, F.
- Neue Suche nach: Palomino-Merino, R.
- Neue Suche nach: Zúñiga-Islas, C.
- Neue Suche nach: Calleja-Arriaga, W.
- Neue Suche nach: Herrera-May, A. L.
In:
Journal of Mechanical Science and Technology
;
29
, 4
;
1673-1679
;
2015
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:Fabrication process of a microstructures based on hydrogenated amorphous SiGe films for applications in MEMS devices
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Beteiligte:Galindo-Mentle, M. ( Autor:in ) / López-Huerta, F. ( Autor:in ) / Palomino-Merino, R. ( Autor:in ) / Zúñiga-Islas, C. ( Autor:in ) / Calleja-Arriaga, W. ( Autor:in ) / Herrera-May, A. L. ( Autor:in )
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Erschienen in:Journal of Mechanical Science and Technology ; 29, 4 ; 1673-1679
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Verlag:
- Neue Suche nach: Korean Society of Mechanical Engineers
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Erscheinungsort:Heidelberg
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Erscheinungsdatum:01.04.2015
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Format / Umfang:7 pages
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ISSN:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
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