Effect of Vacuum Annealing on Orientation of Fluorite Films on Tilted-Axes Substrates (Englisch)
- Neue Suche nach: Mozhaev, P. B.
- Neue Suche nach: Hansen, J. B.
- Neue Suche nach: Jacobsen, C. S.
- Neue Suche nach: Mozhaev, P. B.
- Neue Suche nach: Hansen, J. B.
- Neue Suche nach: Jacobsen, C. S.
In:
Russian Microelectronics
;
52
, Suppl 1
;
S199-S208
;
2023
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:Effect of Vacuum Annealing on Orientation of Fluorite Films on Tilted-Axes Substrates
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Weitere Titelangaben:Russ Microelectron
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Beteiligte:
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Erschienen in:Russian Microelectronics ; 52, Suppl 1 ; S199-S208
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Verlag:
- Neue Suche nach: Pleiades Publishing
-
Erscheinungsort:Moscow
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Erscheinungsdatum:01.12.2023
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ISSN:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 52, Ausgabe Suppl 1
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