Recent developments and applications of chemical mechanical polishing (Englisch)
- Neue Suche nach: Zhong, Zhao-Wei
- Neue Suche nach: Zhong, Zhao-Wei
In:
The International Journal of Advanced Manufacturing Technology
;
109
, 5-6
;
1419-1430
;
2020
- Aufsatz (Zeitschrift) / Elektronische Ressource
-
Titel:Recent developments and applications of chemical mechanical polishing
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Weitere Titelangaben:Int J Adv Manuf Technol
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Beteiligte:Zhong, Zhao-Wei ( Autor:in )
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Erschienen in:The International Journal of Advanced Manufacturing Technology ; 109, 5-6 ; 1419-1430
-
Verlag:
- Neue Suche nach: Springer London
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Erscheinungsort:London
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Erscheinungsdatum:01.07.2020
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Format / Umfang:12 pages
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ISSN:
-
DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 109, Ausgabe 5-6
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