Electron beam lithography on nonplanar and irregular surfaces (Englisch)
Freier Zugriff
- Neue Suche nach: Zhu, Chenxu
- Weitere Informationen zu Zhu, Chenxu:
- https://orcid.org/http://orcid.org/0009-0008-0044-1072
- Neue Suche nach: Ekinci, Huseyin
- Weitere Informationen zu Ekinci, Huseyin:
- https://orcid.org/http://orcid.org/0000-0003-3774-599X
- Neue Suche nach: Pan, Aixi
- Neue Suche nach: Cui, Bo
- Neue Suche nach: Zhu, Xiaoli
- Neue Suche nach: Zhu, Chenxu
- Weitere Informationen zu Zhu, Chenxu:
- https://orcid.org/http://orcid.org/0009-0008-0044-1072
- Neue Suche nach: Ekinci, Huseyin
- Weitere Informationen zu Ekinci, Huseyin:
- https://orcid.org/http://orcid.org/0000-0003-3774-599X
- Neue Suche nach: Pan, Aixi
- Neue Suche nach: Cui, Bo
- Neue Suche nach: Zhu, Xiaoli
In:
Microsystems & Nanoengineering
;
10
, 1
;
2024
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ISSN:
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:Electron beam lithography on nonplanar and irregular surfaces
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Weitere Titelangaben:Microsyst Nanoeng
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Beteiligte:Zhu, Chenxu ( Autor:in ) / Ekinci, Huseyin ( Autor:in ) / Pan, Aixi ( Autor:in ) / Cui, Bo ( Autor:in ) / Zhu, Xiaoli ( Autor:in )
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Erschienen in:Microsystems & Nanoengineering ; 10, 1
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Verlag:
- Neue Suche nach: Nature Publishing Group UK
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Erscheinungsort:London
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Erscheinungsdatum:19.04.2024
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ISSN:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Schlagwörter:
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Lizenzbestimmungen:
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Datenquelle:
Inhaltsverzeichnis – Band 10, Ausgabe 1
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