Design and modeling of a single-mass biaxial capacitive accelerometer based on the SUMMiT V process (Englisch)
- Neue Suche nach: Serrano-Vázquez, F. X.
- Neue Suche nach: Herrera-May, A. L.
- Neue Suche nach: Bandala-Sánchez, M.
- Neue Suche nach: Serrano-Vázquez, F. X.
- Neue Suche nach: Herrera-May, A. L.
- Neue Suche nach: Bandala-Sánchez, M.
In:
Microsystem Technologies
;
19
, 12
;
1997-2009
;
2013
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:Design and modeling of a single-mass biaxial capacitive accelerometer based on the SUMMiT V process
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Beteiligte:Serrano-Vázquez, F. X. ( Autor:in ) / Herrera-May, A. L. ( Autor:in ) / Bandala-Sánchez, M. ( Autor:in )
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Erschienen in:Microsystem Technologies ; 19, 12 ; 1997-2009
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Verlag:
- Neue Suche nach: Springer Berlin Heidelberg
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Erscheinungsort:Berlin/Heidelberg
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Erscheinungsdatum:02.07.2013
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Format / Umfang:13 pages
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ISSN:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 19, Ausgabe 12
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