Synthesis of nano-sized SiC precipitates in Si by simultaneous dual-beam implantation of C+ and Si+ ions (Englisch)
- Neue Suche nach: Kögler, R.
- Neue Suche nach: Eichhorn, F.
- Neue Suche nach: Kaschny, J.R.
- Neue Suche nach: Mücklich, A.
- Neue Suche nach: Reuther, H.
- Neue Suche nach: Skorupa, W.
- Neue Suche nach: Serre, C.
- Neue Suche nach: Perez-Rodriguez, A.
- Neue Suche nach: Kögler, R.
- Neue Suche nach: Eichhorn, F.
- Neue Suche nach: Kaschny, J.R.
- Neue Suche nach: Mücklich, A.
- Neue Suche nach: Reuther, H.
- Neue Suche nach: Skorupa, W.
- Neue Suche nach: Serre, C.
- Neue Suche nach: Perez-Rodriguez, A.
In:
Applied Physics A
;
76
, 5
;
827-835
;
2003
- Aufsatz (Zeitschrift) / Elektronische Ressource
-
Titel:Synthesis of nano-sized SiC precipitates in Si by simultaneous dual-beam implantation of C+ and Si+ ions
-
Beteiligte:Kögler, R. ( Autor:in ) / Eichhorn, F. ( Autor:in ) / Kaschny, J.R. ( Autor:in ) / Mücklich, A. ( Autor:in ) / Reuther, H. ( Autor:in ) / Skorupa, W. ( Autor:in ) / Serre, C. ( Autor:in ) / Perez-Rodriguez, A. ( Autor:in )
-
Erschienen in:Applied Physics A ; 76, 5 ; 827-835
-
Verlag:
- Neue Suche nach: Springer-Verlag
-
Erscheinungsort:Berlin/Heidelberg
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Erscheinungsdatum:01.03.2003
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Format / Umfang:9 pages
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ISSN:
-
DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 76, Ausgabe 5
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