Influence of modeling and simulation on the maturation of plasma technology: feature evolution and reactor design (Englisch)
- Neue Suche nach: Graves, D.B.
- Neue Suche nach: Kushner, M.J.
- Neue Suche nach: Graves, D.B.
- Neue Suche nach: Kushner, M.J.
In:
Journal of Vacuum Science and Technology, Part A (Vacuums, Surfaces, and Films)
;
21
, 5
;
S152-156
;
2003
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ISSN:
- Aufsatz (Zeitschrift) / Print
-
Titel:Influence of modeling and simulation on the maturation of plasma technology: feature evolution and reactor design
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Beteiligte:Graves, D.B. ( Autor:in ) / Kushner, M.J. ( Autor:in )
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Erschienen in:
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Verlag:
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Erscheinungsdatum:2003
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Format / Umfang:5 Seiten, 52 Quellen
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ISSN:
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Coden:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 21, Ausgabe 5
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