Dispensing of cells for highly parallel production of living cell microarrays (Englisch)
- Neue Suche nach: Gutmann, Oliver
- Neue Suche nach: Wintermantel, Markus K.
- Neue Suche nach: Niekrawietz, Remigius
- Neue Suche nach: De Heij, Bas
- Neue Suche nach: Zengerle, Roland
- Neue Suche nach: Daub, Martina
- Neue Suche nach: Gutmann, Oliver
- Neue Suche nach: Wintermantel, Markus K.
- Neue Suche nach: Niekrawietz, Remigius
- Neue Suche nach: De Heij, Bas
- Neue Suche nach: Zengerle, Roland
- Neue Suche nach: Daub, Martina
In:
Transducers, International Conference on Solid-State Sensors, Actuators and Microsystems, 13
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449-452
;
2005
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ISBN:
- Aufsatz (Konferenz) / Print
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Titel:Dispensing of cells for highly parallel production of living cell microarrays
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Beteiligte:Gutmann, Oliver ( Autor:in ) / Wintermantel, Markus K. ( Autor:in ) / Niekrawietz, Remigius ( Autor:in ) / De Heij, Bas ( Autor:in ) / Zengerle, Roland ( Autor:in ) / Daub, Martina ( Autor:in )
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Erschienen in:
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Verlag:
- Neue Suche nach: IEEE Operations Center
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Erscheinungsort:Piscataway
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Erscheinungsdatum:2005
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Format / Umfang:4 Seiten, 7 Quellen
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ISBN:
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DOI:
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Medientyp:Aufsatz (Konferenz)
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Format:Print
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis Konferenzband
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
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The International Conference on Solid-State Sensors, Actuators and Microsystems| 2005
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Breaker page| 2005
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Front Inside Cover [blank]| 2005
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The 13th International Conference on Solid-State Sensors, Actuators and Microsystems| 2005
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Copyright| 2005
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Transducers'05 - Digest of Technical Papers| 2005
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The 14th International Conference on Solid-State Sensors and Actuators 2007| 2005
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Back Inside Cover [blank]| 2005
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ISBN:0-7803-8994-8 [Back Cover]| 2005
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A new age for MEMSPetersen, K. et al. | 2005
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1P1.1 A New Age for MEMSPetersen, K. et al. | 2005
- 5
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MEMS in RF-filter applications: thin film bulk-acoustic-wave technologyAigner, R. et al. | 2005
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1P2.1 MEMS in RF-Filter Applications:Thin Film Bulk-Acoustic-Wave TechnologyAigner, R. et al. | 2005
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Fusion of biomedical microcapsule endoscope and microsystem technologyTae Song Kim, / Byungkyu Kim, / Dongil Dan Cho, / Si Young Song, / Dario, P. / Sitti, M. et al. | 2005
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1P2.2 Fusion of Biomedical Microcapsule Endoscope and Microsystem TechnologyKim, T. S. / Kim, B. / Cho, D. / Song, S. Y. / Dario, P. / Sitti, M. et al. | 2005
- 15
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Three-dimensional nanosprings for electromechanical sensorsBell, D.J. / Sun, Y. / Zhang, L. / Dong, L.X. / Nelson, B.J. / Grutzmacher, D. et al. | 2005
- 15
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1A3.1 Three-Dimensional Nanosprings for Electromechanical SensorsBell, D. J. / Sun, Y. / Zhang, L. / Dong, L. X. / Nelson, B. J. / Gruzmacher, D. et al. | 2005
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3D self-assembling of SU-8 microstructures on silicon by plasma induced compressive stressBureau, J.-B. / Legrand, B. / Collard, D. / Buchaillot, L. et al. | 2005
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1A3.2 3D-Self-Assembling of SU-8 Microstructures on Silicon by Plasma Induced Compressive StressBureau, J.-B. / Legrand, B. / Collard, D. / Buchaillot, L. et al. | 2005
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1A3.3 Alkali Metal-Wax Micropackets for Chip-Scale Atomic ClocksRadhakrishnan, S. / Lal, A. et al. | 2005
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Alkali metal-wax micropackets for chip-scale atomic clocksRadhakrishnan, S. / Lal, A. et al. | 2005
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Fabrication of 3D nanowire frames by conventional micromachining technologySarajlic, E. / Berenschot, E. / Krijnen, G. / Elwenspoek, M. et al. | 2005
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1A3.4 Fabrication of 3D Nanowire Frames by Conventional Micromachining TechnologySarajlic, E. / Berenschot, E. / Krijnen, G. / Elwenspoek, M. et al. | 2005
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The 2D feedback conveyance with ciliary actuator arraysAtaka, M. / Legrand, B. / Buchaillot, L. / Collard, D. / Fujita, H. et al. | 2005
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1A3.5 The 2D Feedback Conveyance with Ciliary Actuator ArraysAtaka, M. / Legrand, B. / Buchaillot, L. / Collard, D. / Fujita, H. et al. | 2005
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Next generation pressure sensors in surface micromachining technologyLammel, G. / Armbruster, S. / Schelling, C. / Benzel, H. / Brasas, J. / Illing, M. / Gampp, R. / Senz, V. / Schafer, F. / Finkbeiner, S. et al. | 2005
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1B3.1 Next Generation Pressure Sensors in Surface Micromachining TechnologyLammel, G. / Armbruster, S. / Schelling, C. / Benzel, H. / Brasas, J. / Illing, M. / Gampp, R. / Senz, V. / Schaer, F. / Finkbeiner, S. et al. | 2005
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Fully CMOS compatible on-LSI capacitive pressure sensor fabricated using standard back-end-of-line processesFujimori, T. / Hanaoka, Y. / Fujisaki, K. / Yokoyama, N. / Fukuda, H. et al. | 2005
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1B3.2 Fully CMOS Compatible On-LSI Capacitive Pressure Sensor Fabricated using Standard Back-End-of-Line ProcessesFujimori, T. / Hanaoka, Y. / Fujisaki, K. / Yokoyama, N. / Fukuda, H. et al. | 2005
- 41
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1B3.3 A CMOS-Based Architecture for a Distributed Sensor Matrix in Underwater EnvironmentMagagni, L. / Sergio, M. / Nicolini, M. / Gennaretti, D. / Canegallo, R. / Guerrieri, R. et al. | 2005
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A CMOS-based architecture for a distributed sensor matrix in underwater environmentMagagni, L. / Sergio, M. / Nicolini, M. / Gennaretti, D. / Canegallo, R. / Guerrieri, R. et al. | 2005
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1B3.4 Multifunctional Smart Tactile-Image Sensor with Integrated Arrays of Strain and Temperature Sensors on Single Air-Pressurized Silicon DiaphragmTakao, H. / Sawada, K. / Ishida, M. et al. | 2005
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Multifunctional smart tactile-image sensor with integrated arrays of strain and temperature sensors on single air-pressurized silicon diaphragmTakao, H. / Sawada, K. / Ishida, M. et al. | 2005
- 49
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A capacitive pressure sensor with a novel multi-layered composite membrane structure fabricated by a three-mask processMin-Xin Zhou, / Qing-An Huang, / Ming Qin, et al. | 2005
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1B3.5 A Capacitve Pressure Sensor with a Novel Multi-Layered Composite Membrane Structre Fabricated by a Three-Mask ProcessZhou, M.-X. / Huang, Q.-A. / Qin, M. et al. | 2005
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1C3.1 High Performance Bidirectional Electrostatic Inchworm Motor Fabricated by Trench Isolation TechnologySarajlic, E. / Berenschot, E. / Tas, N. / Fujita, H. / Krijnen, G. / Elwenspoek, M. et al. | 2005
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High performance bidirectional electrostatic inchworm motor fabricated by trench isolation technologySarajlic, E. / Berenschot, E. / Tas, N. / Fujita, H. / Krijnen, G. / Elwenspoek, M. et al. | 2005
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1C3.2 Stiction Drive Operation of Micromotors: Direct and Reverse Rotation ControlLegrand, B. / Buchaillot, L. / Collard, D. et al. | 2005
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Stiction drive operation of micromotors: direct and reverse rotation controlLegrand, B. / Buchaillot, L. / Collard, D. et al. | 2005
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Long travel parallel plate electrostatic actuatorKrylov, V. / Bernstain, Y. et al. | 2005
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1C3.3 Long Travel Parallel Plate Electrostatic ActuatorKrylov, V. / Bernstain, Y. et al. | 2005
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1C3.4 Design and Fabrication of a Pure-Rotation Microscanner with Self-Aligned Electrostatic Vertical Combdrives in Double SOI WaferMizoguchi, Y. / Esashi, M. et al. | 2005
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Design and fabrication of a pure-rotation microscanner with self-aligned electrostatic vertical combdrives in double SOI waferMizoguchi, Y. / Esashi, M. et al. | 2005
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Micro XY-stages with spider-leg actuators for 2-dimensional optical scanningHo Nam Kwon, / Jong-Hyun Lee, / Takahashi, K. / Toshiyoshi, H. et al. | 2005
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1C3.5 Micro XY-Stages With Spider-Leg Actuators for 2-Dimensional Optical ScanningKwon, H. N. / Lee, J.-H. / Takahashi, K. / Toshiyoshi, H. et al. | 2005
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Beads actuation with kinesin on a microtubule immobilized in a nano fluidic channelYokokawa, R. / Yoshida, Y. / Takeuchi, S. / Kon, T. / Sutoh, K. / Fujita, H. et al. | 2005
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1D3.1 Beads Actuation with Kinesin on a Microtubule Immobilized in a Nano Fluidic ChannelYokokawa, R. / Yoshida, Y. / Takeuchi, S. / Kon, T. / Sutoh, K. / Fujita, H. et al. | 2005
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1D3.2 Two Dimensional Magnetic Manipulation of Microdroplets on a ChipLehmann, U. / Hadjidj, S. / Parashar, V. K. / Rida, A. / Gijs, M. A. M. et al. | 2005
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Two dimensional magnetic manipulation of microdroplets on a chipLehmann, U. / Hadjidj, S. / Parashar, V.K. / Rida, A. / Gijs, M.A.M. et al. | 2005
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Magnetic force-based immunoassay using superparamagnetic nanoparticles in microfluidic channelKyu Sung Kim, / Je-Kyun Park, et al. | 2005
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1D3.3 Magnetic Force-Based Immunoassay using Superparamagnetic Nanoparticles in Microfluidic ChannelKim, K. S. / Park, J.-K. et al. | 2005
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Trapping and manipulation of particles and droplets using micro-toroidal convection currentsBasu, A.S. / Gianchandani, Y.B. et al. | 2005
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1D3.4 Trapping and Manipulation of Particles and Droplets using Micro-Toroidal Convection CurrentsBasu, A. S. / Gianchandani, Y. B. et al. | 2005
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1D3.5 EWOD Actuation with Electrode-Free Cover PlateYi, U.-C. / Kim, C.-J. et al. | 2005
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EWOD actuation with electrode-free cover plateUi-Chong Yi, / Chang-Jin Kim, et al. | 2005
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Localized and CMOS compatible growth of carbon nanotubes on a 3 /spl times/ 3 /spl mu/m/sup 2/ microheater spotJungen, A. / Stampfer, C. / Tonteling, M. / Schiesser, S. / Sarangi, D. / Hierold, C. et al. | 2005
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Localized and CMOS compatible growth of carbon nanotubes on A 3 x 3 my m2 microheater spotJungen, Alain / Stampfer, Christoph / Tonteling, Marc / Schiesser, Sebastien / Sarangi, Debajyoti / Hierold, Christofer et al. | 2005
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1A4.1 Localized and CMOS Compatible Growth of Carbon Nanotubes on a 3x3 mum^2 Microheater SpotJungen, A. / Stampfer, C. / Tonteling, M. / Schiesser, S. / Sarangi, D. / Hierold, C. et al. | 2005
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Non-catalyst and low temperature growth of vertically aligned carbon nanotubes for nanosensor arraysPham, H.T.M. / de Boer, C.R. / Sarro, P.M. et al. | 2005
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1A4.2 Non-Catalyst and Low Temperature Growth of Vertically Aligned Carbon Nanotubes for Nanosensor ArraysPham, H. T. M. / de Boer, C. R. / Sarro, P. M. et al. | 2005
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Selective bridging of single-walled carbon nanotubes controlled with electric field applied to silicon structuresTakei, Y. / Hoshino, K. / Matsumoto, K. / Shimoyama, I. et al. | 2005
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1A4.3 Selective Bridging of Single-Walled Carbon Nanotubes Controlled with Electric Field Applied to Silicon StructuresTakei, Y. / Hoshino, K. / Matsumoto, K. / Shimoyama, I. et al. | 2005
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Novel process flow for the integration of carbon nanotubes into MEMSJungen, A. / Stampfer, C. / Hoetzel, J. / Hierold, C. et al. | 2005
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1A4.4 Novel Process Flow for the Integration of Carbon Nanotubes into MEMSJungen, A. / Stampfer, C. / Hoetzel, J. / Hierold, C. et al. | 2005
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1B4.1 Sub-mm Encapsulated Accelerometers: A Fully Implantable Sensor for Cochlear ImplantsPark, W.-T. / O Connor, K. N. / Mallon, J. R. / Maetani, T. / Candler, R. N. / Ayanoor-Vitikkate, V. / Roberson, J. B. / Puria, S. / Kenny, T. W. et al. | 2005
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Sub-mm encapsulated accelerometers: a fully implantable sensor for cochlear implantsWoo-Tae Park, / O'Connor, K.N. / Mallon, J.R. / Maetani, T. / Candler, R.N. / Ayanoor-Vitikkate V, / Roberson, J.B. / Puria, S. / Kenny, T.W. et al. | 2005
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1B4.2 A MEMS Hybrid Inertial Sensor Based on Convection Heat TransferZhu, R. / Su, Y. / Ding, H. et al. | 2005
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A MEMS hybrid inertial sensor based on convection heat transferRong Zhu, / Yan Su, / Henggao Ding, et al. | 2005
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A micromachined gyroscope with piezoresistance for both high performance Coriolis-effect detection and torsional vibration monitoringXuemeng Chen, / Xinxin Li, / Zhaohui Song, / Shusen Huang, / Yuelin Wang, / Jiwei Jiao, / Heng Yang, / Ying Zhang, et al. | 2005
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1B4.3 A Micromachined Gyroscope with Piezoresistance for both High Performance Coriolis-Effect Detection and Torsional Vibration MonitoringChen, X. / Li, X. / Song, Z. / Huang, S. / Wang, Y. / Jiao, J. / Yang, H. / Zhang, Y. et al. | 2005
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1B4.4 A Bulk Micromachined Lateral Axis Gyroscope with Vertical Sensing Comb CapacitorsYang, Z. / Wang, C. / Yan, G. / Hao, Y. / Wu, G. et al. | 2005
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A bulk micromachined lateral axis gyroscope with vertical sensing comb capacitorsZhenchuan Yang, / Congshun Wang, / Guizhen Yan, / Yilong Hao, / Guoying Wu, et al. | 2005
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1C4.1 A Distributed Actuation Method Based on Young-Laplace ForcesBorno, R. T. / Maharbiz, M. M. et al. | 2005
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A distributed actuation method based on Young-Laplace forcesBorno, R.T. / Maharbiz, M.M. et al. | 2005
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A micro particle sampler using electrowetting-actuated droplet sweepingYuejun Zhao, / Sung Kwon Cho, et al. | 2005
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1C4.2 A Micro Particle Sampler using Electrowetting-Actuated Droplet SweepingZhao, Y. / Cho, S. K. et al. | 2005
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Liquid loading of silicon-based cantilevers using electrowetting actuation for microspotting applicationsLeichle, T. / Saya, D. / Belaubre, P. / Pourciel, J.B. / Mathieu, F. / Laur, J.P. / Nicu, L. / Bergaud, C. et al. | 2005
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1C4.3 Liquid Loading of Silicon-Based Cantilevers using Electrowetting Actuation for Microspotting ApplicationsLeichle, T. / Saya, D. / Belaubre, P. / Pourciel, J. / Mathieu, F. / Laur, J. / Nicu, L. / Bergaud, C. et al. | 2005
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Using EWOD (electrowetting-on-dielectric) actuation in a micro conveyor systemIlju Moon, / Joonwon Kim, et al. | 2005
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1C4.4 Using EWOD (Electrowetting-On-Dielectric) Actuation in a Micro Conveyor SystemMoon, I. / Kim, J. et al. | 2005
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1D4.1 Invited Speaker Flat Fluidics: Acoustically Driven Planar Microfluidic Devices for Biological and Chemical ApplicationsWixforth, A. et al. | 2005
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Flat fluidics: acoustically driven planar microfluidic devices for biological and chemical applicationsWixforth, A. et al. | 2005
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Single potential electrophoresis on-chip using pressure pulse injectionLacharme, F. / Gijs, M.A.M. et al. | 2005
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1D4.2 Single Potential Electrophoresis on-Chip using Pressure Pulse InjectionLacharme, F. / Gijs, M. A. M. et al. | 2005
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1D4.3 Elcrochemical Bio-Lithography for in-situ Immobilization of Proteins and Cells within MicrochannelsNishizawa, M. / Kaji, H. / Tsukidate, K. / Hashimoto, M. / Abe, T. et al. | 2005
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Electrochemical bio-lithography for in-situ immobilization of proteins and cells within microchannelsNishizawa, M. / Kaji, H. / Tsukidate, K. / Hashimoto, M. / Abe, T. et al. | 2005
- 155
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1A5.1 A New Design of Knife Edged-AFM Probe for Chromosome Precision ManipulatingSaito, M. / Nakagawa, K. / Yamanaka, K. / Takamura, Y. / Hashiguchi, G. / Tamiya, E. et al. | 2005
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A new design of knife edged-AFM probe for chromosome precision manipulatingSaito, M. / Nakagawa, K. / Yamanaka, K. / Takamura, Y. / Hashiguchi, G. / Tamiya, E. et al. | 2005
- 159
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Multifunctional tool for expanding AFM-based applicationsDeladi, S. / Tas, N.R. / Krijnen, G.J.M. / Elwenspoek, M.C. et al. | 2005
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1A5.2 Multifunctional Tool for Expanding AFM-Based ApplicationsDeladi, S. / Tas, N. R. / Krijnen, G. J. M. / Elwenspoek, M. C. et al. | 2005
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Scanning probe parallel nanolithography using multi-probes cantilever array for silicon nanodevicesGandjar, H. / Takagi, Y. / Isono, Y. et al. | 2005
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1A5.3 Scanning Probe Parallel Nanolithography using Multi-Probes Cantilever Array for Silicon NanodevicesGandjar, H. / Takagi, Y. / Isono, Y. et al. | 2005
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Fabrication of silicon nanostructures with various sidewall profiles and sharp tipsChang-Hwan Choi, / Chang-Jin Kim, et al. | 2005
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1A5.4 Fabrication of Silicon Nanostructures with Various Sidewall Profiles and Sharp TipsChoi, C.-H. / Kim, C.-J. et al. | 2005
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1B5.1 Inertial-Grade Out-of-Plane and In-Plane Differential Resonant Silicon Accelerometers (DRXLs)Kim, H. C. / Seok, S. / Kim, I. / Choi, S.-D. / Chun, K. et al. | 2005
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Inertial-grade out-of-plane and in-plane differential resonant silicon accelerometers (DRXLs)Hyeon Cheol Kim, / Seonho Seok, / Ilwhan Kim, / Soon-Don Choi, / Kukjin Chun, et al. | 2005
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1B5.2 Outrigger: Solid Outer Frame Lateral Accelerometer DesignO Brien, G. J. / Hammond, J. / Li, G. / Koury, D. / Monk, D. J. et al. | 2005
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Outrigger: solid outer frame lateral accelerometer designO'Brien, G.J. / Hammond, J. / Li, G. / Koury, D. / Monk, D.J. et al. | 2005
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The first sub-deg/hr bias stability, silicon-microfabricated gyroscopeByoung-doo Choi, / Sangjun Park, / Hyoungho Ko, / Seung-Joon Paik, / Yonghwa Park, / Geunwon Lim, / Ahra Lee, / Sang Chul Lee, / Carr, W. / Setiadi, D. et al. | 2005
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1B5.3 The First Sub-deg/hr Bias Stability, Silicon-Microfabricated GyroscopeChoi, B.-d. / Park, S. / Ko, H. / Paik, S.-J. / Park, Y. / Lim, G. / Lee, A. / Lee, S. C. / Carr, W. / etiadi, D. et al. | 2005
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New surface micromachined angular rate sensor for vehicle stabilizing systems in automotive applicationsGomez, U.-M. / Kuhlmann, B. / Classen, J. / Bauer, W. / Lang, C. / Veith, M. / Esch, E. / Frey, J. / Grabmaier, F. / Offterdinger, K. et al. | 2005
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1B5.4 New Surface Micromachined Angular Rate Sensor for Vehicle Stabilizing Systems in Automotive ApplicationsGoez, U.-M. / Kuhlmann, B. / Classen, J. / Bauer, W. / Lang, C. / Veith, M. / Esch, E. / Frey, J. / Grabmaier, F. / Offterdinger, K. et al. | 2005
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1C5.1 A High Performance Bidirectional Micropump for a Novel Artificial Sphincter SystemDoll, A. / Reimers, S. / Heinrichs, M. / Goldschmidtboeing, F. / Schrag, H.-J. / Hopt, U. T. / Woias, P. et al. | 2005
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A high performance bidirectional micropump for a novel artificial sphincter systemDoll, A. / Reimers, S. / Heinrichs, M. / Goldschmidtboeing, F. / Schrag, H.-J. / Hopt, U.T. / Woias, P. et al. | 2005
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Electromagnetically actuated ball valve micropumpsYamahata, C. / Lacharme, F. / Matter, J. / Schnydrig, S. / Burri, Y. / Gijs, M.A.M. et al. | 2005
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1C5.2 Electromagnetically Actuated Ball Valve MicropumpsYamahata, C. / Lacharme, F. / Matter, J. / Schnydrig, S. / Burri, Y. / Gijs, M. A. M. et al. | 2005
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An electrohydrodynamically driven microfabricated actuator for the study of miniature ion propulsion engine and electric wind devicesChua, B.L. / Logeeswaran, V.J. / Chan, M.L. / Park, H.K. / Horsley, D.A. / Tien, N.C. et al. | 2005
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1C5.3 An Electrohydrodynamically Driven Microfabricated Actuator for the Study of Miniature Ion Propulsion Engine and Electric Wind DevicesChua, B. L. / Logeeswaran, V. J. / Chan, M. L. / Park, H. K. / Horsley, D. A. / Tien, N. C. et al. | 2005
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A polymeric paraffin micropump with active valves for high-pressure microfluidicsBoden, R. / Lehto, M. / Simu, U. / Thornell, G. / Hjort, K. / Schweitz, J.-A. et al. | 2005
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1C5.4 A Polymeric Paraffin Micropump with Active Valves for High-Pressure MicrofluidicsBoden, R. / Lehto, M. / Simu, U. / Thornell, G. / Hjort, K. / Schweitz, J.-A. et al. | 2005
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1D5.1 MEMS-Based Sonoporation Devices for Intratumoral Gene TherapySiu, T. / Trivedi, D. M. / Chiao, M. / Rohling, R. et al. | 2005
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MEMS-based sonoporation devices for intratumoral gene therapySiu, T. / Trivedi, D.M. / Chiao, M. / Rohling, R. et al. | 2005
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1D5.2 Microdevice Components for a Cellular Microsurgery SuiteChang, W. C. / Keller, C. G. / Hawkes, E. A. / Sretavan, D. W. et al. | 2005
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Microdevice components for a cellular microsurgery suiteChang, W.C. / Keller, C.G. / Hawkes, E.A. / Sretavan, D.W. et al. | 2005
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Reliable in-vivo penetration and transdermal injection using ultra-sharp hollow microneedlesRoxhed, N. / Griss, P. / Stemme, G. et al. | 2005
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1D5.3 Reliable in-vivo Penetration and Transdermal Injection using Ultra-Sharp Hollow MicroneedlesRoxhed, N. / Griss, P. / Stemme, G. et al. | 2005
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A novel fabrication of ionic polymer-metal composites (IPMC) actuator with silver nano-powdersChung, C.K. / Hong, Y.Z. / Fung, P.K. / Ju, M.S. / Lin, C.C.K. / Wu, T.C. et al. | 2005
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1D5.4 A Novel Fabrication of Ionic Polymer-Metal Composites (IPMC) Actuator with Silver Nano-PowdersChung, C. K. / Hong, Y. Z. / Fung, P. K. / Ju, M. S. / Lin, C. C. K. / Wu, T. C. et al. | 2005
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2A1.1 Invited Speaker Smart Clothes and Associated Wearable Devices for Biomedical Ambulatory MonitoringDittmar, A. / Lymberis, A. et al. | 2005
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Smart clothes and associated wearable devices for biomedical ambulatory monitoringDittmar, A. / Lymberis, A. et al. | 2005
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2A1.2 Integrating Wireless ECG Monitoring in TextilesCoosemans, J. / Hermans, B. / Puers, R. et al. | 2005
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Integrating wireless ECG monitoring in textilesCoosemans, J. / Hermans, B. / Puers, R. et al. | 2005
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2A1.3 An Autonomous Microsystem for Environmental and Biological Data GatheringLemmerhirt, D. F. / Fick, D. A. / Wise, K. D. et al. | 2005
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An autonomous microsystem for environmental and biological data gatheringLemmerhirt, D.F. / Fick, D.A. / Wise, K.D. et al. | 2005
- 239
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CMOS-based tactile sensor for coronary artery identificationSalo, T. / Kirstein, K.-U. / Vancura, T. / Baltes, H. et al. | 2005
- 239
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2A1.4 CMOS-Based Tactile Sensor for Coronary Artery IdentificationSalo, T. / Kirstein, K.-U. / Vanura, T. / Baltes, H. et al. | 2005
- 243
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Vibrating RF MEMS technology: fuel for an integrated micromechanical circuit revolution?Nguyen, C.T.-C. et al. | 2005
- 243
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2B1.1 Invited Speaker Vibrating RF MEMS Technology: Fuel for an Integrated Micromechanical Circuit Revolution?Nguyen, C. T.-C. et al. | 2005
- 247
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Quartz-crystal cantilevered resonator for nanometric sensingYu-Ching Lin, / Ono, T. / Esashi, M. et al. | 2005
- 247
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2B1.2 Quartz-Crystal Cantilevered Resonator for Nanometric SensingLin, Y.-C. / Ono, T. / Esashi, M. et al. | 2005
- 252
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Feedback control of high-intensity silicon ultrasonic surgical actuatorIl-Seok Son, / Lal, A. et al. | 2005
- 252
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2B1.3 Feedback Control of High-Intensity Silicon Ultrasonic Surgical ActuatorSon, I.-S. / Lal, A. et al. | 2005
- 256
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Capacitive resonant mass sensor with LC resonant circuit for use in atmosphereSang-Jin Kim, / Ono, T. / Esashi, M. et al. | 2005
- 256
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2B1.4 Capacitive Resonant Mass Sensor with LC Resonant Circuit for use in AtmosphereKim, S.-J. / Ono, T. / Esashi, M. et al. | 2005
- 261
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"Semiconductor nanostructure devices: recent advances and their potentials for transducers applications"Sakaki, H. et al. | 2005
- 261
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2C1.1 Invited Speaker Semiconductor Nanostructure Devices: Recent Advances and Their Potentials for Transducers ApplicationsSakaki, H. et al. | 2005
- 263
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2C1.2 Terahertz Emission Properties from Palladium/Silicon InterfaceKiwa, T. / Tsukada, K. / Suzuki, M. / Tonouchi, M. / Migitaka, S. / Yokosawa, K. et al. | 2005
- 263
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Terahertz emission properties from palladium/silicon interfaceKiwa, T. / Tsukada, K. / Suzuki, M. / Tonouchi, M. / Migitaka, S. / Yokosawa, K. et al. | 2005
- 267
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Schottky emitters with carbon nanotubes as electron sourcePhan Ngoc Minh, / Nguyen Tuan Hong, / Ngo Quang Minh, / Phan Hong Khoi, / Nomura, Y. / Ono, T. / Esashi, M. et al. | 2005
- 267
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2C1.3 Schottky Emitters with Carbon Nanotubes as Electron SourceMinh, P. N. / Hong, N. T. / Minh, N. Q. / Khoi, P. H. / Nomura, Y. / Ono, T. / Esashi, M. et al. | 2005
- 271
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Semiconductivity of pyrolyzed polymer for MEMS applicationKonishi, S. / Nagae, H. / Sagawa, T. / Naka, K. / Yoshioka, K. et al. | 2005
- 271
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2C1.4 Semiconductivity of Pyrolyzed Polymer for MEMS ApplicationKonishi, S. / Nagae, H. / Sagawa, T. / Naka, K. / Yoshioka, K. et al. | 2005
- 275
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Micromachined endovascularly-implantable wireless aneurysm pressure sensors: from concept to clinicAllen, M.G. et al. | 2005
- 275
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2D1.1 Invited Speaker Micromachined Endovascularly-Implantable Wireless Aneurysm Pressure Sensors: from Concept to ClinicAllen, M. G. et al. | 2005
- 279
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Smart microfuluidic electrochemical DNA sensors integrated signal processing circuitsSawada, Kazuaki / Oda, Chigusa / Takao, Hidekuni / Ishida, Makoto et al. | 2005
- 279
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2D1.2 Smart Microfuluidic Electrochemical DNA Sensors Integrated Signal Processing CircuitsSawada, K. / Oda, C. / Takao, H. / Ishida, M. et al. | 2005
- 279
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Smart microfluidic electrochemical DNA sensors integrated signal processing circuitsSawada, K. / Oda, C. / Takao, H. / Ishida, M. et al. | 2005
- 283
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Monitoring of yeast cell concentration using a micromachined impedance sensorKrommenhoek, E.E. / Gardeniers, J.G.E. / Bomer, J.G. / Van den Berg, A. / Li, X. / Ottens, M. / van der Wielen, L.A.M. / van Dedem, G.W.K. / Van Leeuwen, M. / van Gulik, W.M. et al. | 2005
- 283
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2D1.3 Monitoring of Yeast Cell Concentration using a Micromachined Impedance SensorKrommenhoek, E. E. / Gardeniers, J. G. E. / Bomer, J. G. / Van den Berg, A. / Li, X. / Ottens, M. / van der Wielen, L. A. M. / van Dedem, G. W. K. / Van Leeuwen, M. / van Gulik, W. M. et al. | 2005
- 287
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A microfabricated narrow gap biofuel cell with membraneless design flexibilityKorivi, N.S. / Jin-Woo Choi, et al. | 2005
- 287
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2D1.4 A Microfabricated Narrow Gap Biofuel Cell with Membraneless Design FlexibilityKorivi, N. S. / Choi, J.-W. et al. | 2005
- 291
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Thermoelectric MEMS generators as a power supply for a body area networkLeonov, V. / Fiorini, P. / Sedky, S. / Torfs, T. / Van Hoof, C. et al. | 2005
- 291
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2A2.1 Thermoelectric MEMS Generators as a Power Supply for a Body Area NetworkLeonov, V. / Fiorini, P. / Sedky, S. / Torfs, T. / Van Hoof, C. et al. | 2005
- 295
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2A2.2 Novel MEMS Power Generator with Integrated Thermoelectric and Vibrational DevicesSato, N. / Ishii, H. / Urano, M. / Sakata, T. / Terada, J. / Morimura, H. / Shigematsu, S. / Kudou, K. / Kamei, T. / Machida, K. et al. | 2005
- 295
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Novel MEMS power generator with integrated thermoelectric and vibrational devicesSato, N. / Ishii, H. / Urano, M. / Sakata, T. / Terada, J. / Morimura, H. / Shigematsu, S. / Kudou, K. / Kamei, T. / Machida, K. et al. | 2005
- 299
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2A2.3 Design and Implementation of an Integrated Floating-Gate Electrostatic Power Micro-GeneratorMa, W. / Rufer, L. / Zohar, Y. / Wong, M. et al. | 2005
- 299
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Design and implementation of an integrated floating-gate electrostatic power micro-generatorWei Ma, / Rufer, L. / Zohar, Y. / Man Wong, et al. | 2005
- 303
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2A2.4 A Micro Direct Methanol Fuel Cell using PDMS Assembly TechnologyJiang, Y. / Wang, X. / Xie, K. / Qiu, X. / Zhong, L. / Liu, L. et al. | 2005
- 303
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A micro direct methanol fuel cell using PDMS assembly technologyYingqi Jiang, / Xiaohong Wang, / Kewen Xie, / Xinping Qiu, / Lingyan Zhong, / Litian Liu, et al. | 2005
- 307
-
2B2.1 Pyroelectric Infrared Sensors with Fast Response Time and High Sensitivity using Epitaxial Pb(Zr,Ti)O~3 Films on Epitaxial gamma-Al~2O~3/Si SubstratesAkai, D. / Hirabayashi, K. / Yokawa, M. / Sawada, K. / Taniguchi, Y. / Murashige, S. / Nakayama, N. / Yamada, T. / Murakami, K. / Ishida, M. et al. | 2005
- 307
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Pyroelectric infrared sensors with fast response time and high sensitivity using epitaxial Pb(ZrTi)O/sub 3/ films on epitaxial /spl gamma/-Al/sub 2/O/sub 3//Si substratesAkai, D. / Hirabayashi, K. / Yokawa, M. / Sawada, K. / Taniguchi, Y. / Murashige, S. / Nakayama, N. / Yamada, T. / Murakami, K. / Ishida, M. et al. | 2005
- 311
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2B2.2 An Ultra-Low-Power Physics Package for a Chip-Scale Atomic ClockMescher, M. J. / Lutwakg, R. / Varghese, M. et al. | 2005
- 311
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An ultra-low-power physics package for a chip-scale atomic clockMescher, M.J. / Lutwak, R. / Varghese, M. et al. | 2005
- 317
-
2B2.3 First Fully CMOS-Integrated 3D Hall ProbeKejik, P. / Schurig, E. / Bergsma, F. / Popovic, R. S. et al. | 2005
- 317
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First fully CMOS-integrated 3D Hall probeKejik, P. / Schurig, E. / Bergsma, F. / Popovic, R.S. et al. | 2005
- 321
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Novel highly miniaturized multi-stress sensor field effect transistor with eight source/drain terminalsDoelle, M. / Bartholomeyczik, J. / Ruther, P. / Paul, O. et al. | 2005
- 321
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2B2.4 Novel Highly Miniaturized Multi-Stress Sensor Field Effect Transistor with Eight Source/Drain TerminalsDoelle, M. / Bartholomeyczik, J. / Ruther, P. / Paul, O. et al. | 2005
- 325
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2B2.5 2-D and 3-D Tactile Pin Display using SMA Micro-coil Actuator and Magnetic LatchMatsunaga, T. / Makishi, W. / Totsu, K. / Esashi, M. / Haga, Y. et al. | 2005
- 325
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2-D and 3-D tactile pin display using SMA micro-coil actuator and magnetic latchMatsunaga, T. / Makishi, W. / Totsu, K. / Esashi, M. / Haga, Y. et al. | 2005
- 329
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Small footprint knife gate microvalves for large flow controlBraun, S. / Haasl, S. / Sadoon, S. / Ridgeway, A.S. / van der Wijngaart, W. / Stemme, G. et al. | 2005
- 329
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2C2.1 Small Footprint Knife Gate Microvalves for Large Flow ControlBraun, S. / Haasl, S. / Sadoon, S. / Ridgeway, A. S. / van der Wijngaart, W. / Stemme, G. et al. | 2005
- 333
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2C2.2 Comparison of Two Seal Technologies for Hydraulic MicroactuatorsDe Volder, M. / Peirs, J. / Reynaerts, D. / Coosemans, J. / Puers, R. / Smal, O. / Raucent, B. et al. | 2005
- 333
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Comparison of two seal technologies for hydraulic microactuatorsDe Volder, M. / Peirs, J. / Reynaerts, D. / Coosemans, J. / Puers, R. / Smal, O. / Raucent, B. et al. | 2005
- 337
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2C2.3 Fuel and Air Supply System for Combustion Based Power SourcesSatoh, D. / Tanaka, S. / Esashi, M. et al. | 2005
- 337
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Fuel and air supply system for combustion based power sourcesSatoh, D. / Tanaka, S. / Esashi, M. et al. | 2005
- 342
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Characterization and modeling of a liquid-vapor phase change membrane actuator with an integrated SU-8 micro capillary wicking structureWhalen, S.A. / Won, S.Y. / Richards, R.F. / Bahr, D.F. / Richards, C.D. et al. | 2005
- 342
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2C2.4 Charaterization and Modeling of a Liquid-Vapor Phase Change Membrane Actuator with an Integrated SU-8 Micro Capillary Wicking StructureWhalen, S. A. / Won, S. Y. / Richards, R. F. / Bahr, D. F. / Richards, C. D. et al. | 2005
- 348
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2C2.5 A Lobster-Sniffing Inspired Actuator for Manipulation of Micro-Objects via Controlling Local FluidChiang, C.-F. / Liu, C.-H. / Chang, C. et al. | 2005
- 348
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A lobster-sniffing inspired actuator for manipulation of micro-objects via controlling local fluidChia-Fang Chiang, / Cheng-Hsiang Liu, / Chieh Chang, / Cheng-Hsien Liu, et al. | 2005
- 352
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Nanofluidic molecular filters for efficient protein separation and preconcentrationYing-Chih Wang, / Jianping Fu, / Pan Mao, / Jongyoon Han, et al. | 2005
- 352
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2D2.1 Nanofluidic Molecular Filters for Efficient Protein Separation and PreconcentrationWang, Y.-C. / Fu, J. / Mao, P. / Han, J. et al. | 2005
- 356
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Nanoliter liquid handling on a low cost disposable with embedded fluid actuatorsSamel, B. / Nock, V. / Russom, A. / Griss, P. / Stemme, G. et al. | 2005
- 356
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2D2.2 Nanoliter Liquid Handling on a Low Cost Disposable with Embedded Fluid ActuatorsSamel, B. / Nock, V. / Russom, A. / Griss, P. / Stemme, G. et al. | 2005
- 360
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2D2.3 Microfluidic Device for Immobilization of Bio-Vesicles Towards Controlled on-chip ElectrofusionZiegler, D. / Coquet, P. / Tixier-Mita, A. / Tresset, G. / Fujita, H. / Takeuchi, S. et al. | 2005
- 360
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Microfluidic device for immobilization of bio-vesicles towards controlled on-chip electrofusionZiegler, D. / Coquet, P. / Tixier-Mita, A. / Tresset, G. / Fujita, H. / Takeuchi, S. et al. | 2005
- 364
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An on-chip autonomous microfluidic cooling systemAgarwal, A.K. / Sridharamurthy, S.S. / Beebe, D.J. / Hongrui Jiang, et al. | 2005
- 364
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2D2.4 An on-chip Autonomous Microfluidic Cooling SystemAgarwal, A. K. / Sridharamurthy, S. S. / Beebe, D. J. / Jiang, H. et al. | 2005
- 368
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2D2.5 A Planar 2-Stage MicromixerStoeber, B. / Liepmann, D. / Muller, S. J. et al. | 2005
- 368
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A planar 2-stage micromixerStoeber, B. / Liepmann, D. / Muller, S.J. et al. | 2005
- 372
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Novel fabrication method of self positioned and focal length tuned microlensSei-Hwan Jung, / Kook-Nyung Lee, / Yun-Ho Jang, / Yong-Kweon Kim, et al. | 2005
- 372
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2A3.1 Novel Fabrication Method of Self Positioned and Focal Length Tuned MicrolensJung, S.-H. / Lee, K.-N. / Jang, Y.-H. / Kim, Y.-K. et al. | 2005
- 376
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2A3.2 Tunable Micro-Aspherical Lens Manipulated by 2D Electrostatic ForcesChen, C.-W. / Tseng, F.-G. et al. | 2005
- 376
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Tunable micro-aspherical lens manipulated by 2D electrostatic forcesChang-Wei Chen, / Fan-Gang Tseng, et al. | 2005
- 380
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2A3.3 Application of Flowing Thermal Lens to Flow Sensors for Microchemical ChipsKikutani, Y. / Morishima, K. / Tokeshi, M. / Yamaguchi, J. / Fukuzawa, T. / Hattori, A. / Yoshida, Y. / Kitaoka, M. / Kitamori, T. et al. | 2005
- 380
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Application of flowing thermal lens to flow sensors for microchemical chipsKikutani, Y. / Morishima, K. / Tokeshi, M. / Yamaguchi, J. / Fukuzawa, T. / Hattori, A. / Yoshida, Y. / Kitaoka, M. / Kitamori, T. et al. | 2005
- 384
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High aspect ratio nano-structures (HARNS) for photonic MEMS based on vertical DBR architectureMarty, F. / Saadany, B. / Bourouina, T. / Mita, Y. / Shibata, T. et al. | 2005
- 384
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2A3.4 High Aspect Ratio Nano-Structures (HAMS) for Photonic MEMS Based on Vertical DBR ArchitectureMarty, F. / Saadany, B. / Bourouina, T. / Mita, Y. / Shibata, T. et al. | 2005
- 388
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2A3.5 MEMS Injection-Locked LaserZhang, X. M. / Liu, A. Q. / Cai, H. / Lu, C. / Tang, D. Y. et al. | 2005
- 388
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MEMS injection-locked laserZhang, X.M. / Liu, A.Q. / Cai, H. / Lu, C. / Tang, D.Y. et al. | 2005
- 392
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2B3.1 Effects of Stress on the Temperature Coefficient of Frequency in Double Clamped ResonatorsMelamud, R. / Hopcroft, M. / Jha, C. / Kim, B. / Chandorkar, S. / Candler, R. / Kenny, T. W. et al. | 2005
- 392
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Effects of stress on the temperature coefficient of frequency in double clamped resonatorsMelamud, R. / Hopcroft, M. / Jha, C. / Bongsang Kim, / Chandorkar, S. / Candler, R. / Kenny, T.W. et al. | 2005
- 396
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2B3.2 Novel Integrated Shock Protection for MEMSYoon, S. W. / Yazdi, N. / Perkins, N. C. / Najafi, K. et al. | 2005
- 396
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Novel integrated shock protection for MEMSSang Won Yoon, / Yazdi, N. / Perkins, N.C. / Najafi, K. et al. | 2005
- 401
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2B3.3 A New Self-Test and Self-Calibration Concept for Micro-Machined GyroscopesLink, T. / Simon, I. / Trachtler, M. / Gaisser, A. / Braxmaier, M. / Manoli, Y. / Sandmaier, H. et al. | 2005
- 401
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A new self-test and self-calibration concept for micro-machined gyroscopesLink, T. / Simon, I. / Trachtler, M. / Gaisser, A. / Braxmaier, M. / Manoli, Y. / Sandmaier, H. et al. | 2005
- 405
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2B3.4 Design of a Micromachined CMOS CompassDumas, N. / Latorre, L. / Nouet, P. et al. | 2005
- 405
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Design of a micromachined CMOS compassDumas, N. / Latorre, L. / Nouet, P. et al. | 2005
- 409
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A hard-disk drive tracking servo microactuator driven by PZT with stroke amplification mechanismHirano, T. / Yang, H. et al. | 2005
- 409
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2B3.5 A Hard-Disk Drive Tracking Servo Microactuator Driven by PZT with Stroke Amplification MechanismHirano, T. / Yang, H. et al. | 2005
- 413
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2C3.1 Fabrication of Miniaturized Electron Beam SystemKim, H. / Han, C. / Kim, H. C. / Choi, S. / Chun, K. et al. | 2005
- 413
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Fabrication of miniaturized electron beam systemHak Kim, / Changho Han, / Hyeon Cheol Kim, / Soondon Choi, / Kukjin Chun, et al. | 2005
- 417
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2C3.2 Monolithic Integration of High Voltage Driver Circuits and MEMS Actuators by ASIC-Like PostprocessTakahashi, K. / Kwon, H. N. / Mita, M. / Fujita, H. / Toshiyoshi, H. / Suzuki, K. / Funaki, H. et al. | 2005
- 417
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Monolithic integration of high voltage driver circuits and MEMS actuators by ASIC-like postprocessTakahashi, K. / Kwon, H.N. / Mita, M. / Fujita, H. / Toshiyoshi, H. / Suzuki, K. / Funaki, H. et al. | 2005
- 421
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2C3.3 Microlens Array and Micro Clampers for High Performance Optoelectronic Devices PackagingNallani, A. K. / Chen, T. / Lee, J.-B. / Hayes, D. J. / Wallace, D. B. et al. | 2005
- 421
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Microlens array and micro clampers for high performance optoelectronic devices packagingNallani, A.K. / Ting Chen, / Lee, J.B. / Hayes, D.J. / Wallace, D.B. et al. | 2005
- 427
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Resonance-free HRS MEMS package for microwave and millimeter-waveYo-Tak Song, / Ono, T. / Hai-Young Lee, / Esashi, M. et al. | 2005
- 427
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2C3.4 Resonance-Free HRS MEMS Package for Microwave and Millimeter-WaveSong, Y.-T. / Ono, T. / Lee, H.-Y. / Esashi, M. et al. | 2005
- 433
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2C3.5 H~2/Air Self-Breathing Micro PEM Fuel Cell Stacks with MEMS Fabrication TechnologyChen, C. / Wang, T. / Dong, P. / Zhang, X. / Li, J. / Zheng, D. / Xia, B. / Li, X. et al. | 2005
- 433
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H/sub 2//air self-breathing micro PEM fuel cell stacks with MEMS fabrication technologyCong Chen, / Tao Wang, / Peitao Dong, / Xigui Zhang, / Jufeng Li, / Dan Zheng, / Baojia Xia, / Xinxin Li, et al. | 2005
- 437
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Disposable polymer "smart" lab-on-a-chip for point-of-care testing (POCT) in clinical diagnosticsAhn, C.H. et al. | 2005
- 437
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2D3.1 Invited Speaker Disposable Polymer "Smart" Lab-on-a-chip for Point-of-care Testing (POCT) in Clinical DiagnosticsAhn, C. H. et al. | 2005
- 441
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Design and operation of a micromachined bubble-jet cell sorterChung-Chu Chen, / Jen-Shiang Wang, / Zappe, S. / Xiaojing Zhang, / Solgaard, O. et al. | 2005
- 441
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2D3.2 Design and Operation of a Micromachined Bubble-Jet Cell SorterChen, C.-C. / Wang, J.-S. / Zappe, S. / Zhang, X. / Solgaard, O. et al. | 2005
- 445
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Multi particles and biomolecules sorting system using thermoreversible gelation controlled by DMD [digital mirror device]Watabe, S. / Tatsuoka, M. / Shimomae, T. / Shirasaki, Y. / Mizuno, J. / Funatsu, T. / Shoji, S. et al. | 2005
- 445
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2D3.3 Multi Particles and Biomolecules Sorting System using Thermoreversible Gelation Controlled by DMDWatabe, S. / Tatsuoka, M. / Shimomae, T. / Shirasaki, Y. / Mizuno, J. / Funatsu, T. / Shoji, S. et al. | 2005
- 449
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Dispensing of cells for highly parallel production of living cell microarraysGutmann, O. / Wintermantel, M.K. / Niekrawietz, R. / de Heij, B. / Zengerle, R. / Daub, M. et al. | 2005
- 449
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2D3.4 Dispensing of Cells for Highly Parallel Production of Living Cell MicroarraysGutmann, O. / Wintermantel, M. K. / Niekrawietz, R. / de Heij, B. / Zengerle, R. / Daub, M. et al. | 2005
- 453
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2E4.1 RF Smart-Sensor for Venous Ulcer TreatmentMeiners, M. / Sussenguth, M. / Missal, W. / Schary, T. / Benecke, W. / Lang, W. / Stucker, M. et al. | 2005
- 453
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RF smart-sensor for venous ulcer treatmentMeiners, M. / Sussenguth, M. / Missal, W. / Schary, T. / Benecke, W. / Lang, W. / Stucker, M. et al. | 2005
- 457
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"chip-size" antennas for implantable sensors and smart dustBasset, P. / Alfaro, F. / Novosel, D. / de la Plaza, A. / Stancil, D. / Fedder, G.K. et al. | 2005
- 457
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2E4.2 "Chip-Size" Antennas for Implantable Sensors and Smart DustBasset, P. / Alfaro, F. / Novosel, D. / de la Plaza, A. / Stancil, D. / Fedder, G. K. et al. | 2005
- 461
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Simplified circuit modeling and fabrication of intrabody communication devicesHachisuka, K. / Terauchi, Y. / Kishi, Y. / Hirota, T. / Sasaki, K. / Hosaka, H. / Ito, K. et al. | 2005
- 461
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2E4.3 Simplified Circuit Modeling and Fabrication of Intrabody Communication DevicesHachisuka, K. / Terauchi, Y. / Kishi, Y. / Hirota, T. / Sasaki, K. / Hosaka, H. / Ito, K. et al. | 2005
- 465
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A portable multi-sensor datalogger for heart rate variability (HRV) study during skydiver's free fallHermans, B. / Verheyden, B. / Beckers, F. / Aubert, A. / Puers, R. et al. | 2005
- 465
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2E4.4 A Portable Multi-Sensor Datalogger for Heart Rate Variability (HRV) Study During Skydiver's Free FallHermans, B. / Verheyden, B. / Beckers, F. / Aubert, A. / Puers, R. et al. | 2005
- 470
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2E4.5 SiC Pressure Sensor for Detection of Combustor Thermo-Acoustic InstabilitiesOkojie, R. S. / DeLaat, J. C. / Saus, J. R. et al. | 2005
- 470
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SiC pressure sensor for detection of combustor thermoacoustic instabilities [aircraft engine applications]Okojie, R.S. / DeLaat, J.C. / Saus, J.R. et al. | 2005
- 474
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Multipole marker and correlation image sensor for position and pose estimation in sensor networksNagai, Y. / Shimizu, T. / Kurihara, T. / Ono, N. / Nara, T. / Ando, S. et al. | 2005
- 474
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2E4.6 Multipole Marker and Correlation Image Sensor for Position and Pose Estimation in Sensor NetworksNagai, Y. / Shimizu, T. / Kurihara, T. / Ono, N. / Nara, T. / Ando, S. et al. | 2005
- 479
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A locally autocompensating image sensorFriedrich, N. / Boehm, M. et al. | 2005
- 479
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2E4.7 A Locally Autocompensating Image SensorFriedrich, N. / Boehm, M. et al. | 2005
- 483
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2E4.8 A Micromachined Polyurethane/Stainless-Steel Capacitive Pressure Sensor without Cavity and DiaphragmTakahata, K. / Gianchandani, Y. B. et al. | 2005
- 483
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A micromachined polyurethane/stainless-steel capacitive pressure sensor without cavity and diaphragmTakahata, K. / Gianchandani, Y.B. et al. | 2005
- 487
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2E4.9 Diaphragm-Type Miniature Optical Fiber Pressure Sensor with a SleeveWatanabe, T. / Kaneko, Y. / Shimada, M. / Takahashi, K. et al. | 2005
- 487
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Diaphragm-type miniature optical fiber pressure sensor with a sleeveWatanabe, T. / Kaneko, Y. / Shimada, M. / Takahashi, K. et al. | 2005
- 491
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Liquid-core, piezoresistive, fully polymer-based pressure sensorLichtenberg, J. / Hierlemann, A. et al. | 2005
- 491
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2E4.10 Liquid-Core, Piezoresistive, Fully Polymer-Based Pressure SensorLichtenberg, J. / Hierlemann, A. et al. | 2005
- 495
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2E4.11 Proposal of a New Magneto-Transistor with a Recombination Region in the Base of the Bipolar TransistorKimura, M. / Takahashi, S. et al. | 2005
- 495
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Proposal of a new magneto-transistor with a recombination region in the base of the bipolar transistorKimura, M. / Takahashi, S. et al. | 2005
- 499
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2E4.12 A Thin Film Strip for Aerodynamic Body Pressure Profile MonitoringZagnoni, M. / Rossetti, A. / Proli, P. / Golfarelli, A. / Callegari, S. / Talamelli, A. / Sangiorgi, E. / Tartagni, M. et al. | 2005
- 499
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A thin film strip for aerodynamic body pressure profile monitoringZagnoni, M. / Rossetti, A. / Proli, P. / Golfarelli, A. / Callegari, S. / Talamelli, A. / Sangiorgi, E. / Tartagni, M. et al. | 2005
- 503
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Sapphire-based capacitance diaphragm gauge for high temperature applicationsIshihara, T. / Sekine, M. / Ishikura, Y. / Kimura, S. / Harada, H. / Nagata, M. / Masuda, T. et al. | 2005
- 503
-
2E4.13 Sapphire-based Capacitance Diaphragm Gauge for High Temperature ApplicationsIshihara, T. / Sekine, M. / Ishikura, Y. / Kimura, S. / Harada, H. / Nagata, M. / Masuda, T. et al. | 2005
- 507
-
2E4.14 Two-Chip Implemented, Wafer-Level Hermetic Packaged Accelerometer for Tactical and Inertial ApplicationsKo, H. / Park, S. / Choi, B.-d. / Park, Y. / Lim, G. / Paik, S.-J. / Lee, A. / Yoo, K. / Lee, S. / Lim, J. et al. | 2005
- 507
-
Two-chip implemented, wafer-level hermetic packaged accelerometer for tactical and inertial applicationsHyoungho Ko, / Sangjun Park, / Byoung-doo Choi, / Yonghwa Park, / Geunwon Lim, / Seung-Joon Paik, / Ahra Lee, / Kwangho Yoo, / Sangmin Lee, / Jaesang Lim, et al. | 2005
- 511
-
SOI micromachined 5-axis motion sensor using resonant electrostatic drive and non-resonant capacitive detection modeWatanabe, Y. / Mitsui, T. / Mineta, T. / Matsu, Y. / Okada, K. et al. | 2005
- 511
-
2E4.15 SOI Micromachined 5-Axis Motion Sensor using Resonant Electrostatic Drive and Non-Resonant Capacitive Detection ModeWatanabe, Y. / Mitsui, T. / Mineta, T. / Matsu, Y. / Okada, K. et al. | 2005
- 515
-
2E4.16 Sub-Micro-Gravity Capacitive SOI MicroaccelerometersAmini, B. V. / Abdolvand, R. / Ayazi, F. et al. | 2005
- 515
-
Sub-micro-gravity capacitive SOI microaccelerometersAmini, B.V. / Abdolvand, R. / Ayazi, F. et al. | 2005
- 519
-
2E4.17 A Novel Thermal-Bubble-Based Micromachined AccelerometerLiao, K.-M. / Chen, R. / Chou, B. C. S. et al. | 2005
- 519
-
A novel thermal-bubble-based micromachined accelerometerKe-Min Liao, / Rongshun Chen, / Chou, B.C.S. et al. | 2005
- 523
-
Fabrication of nano-gap accelerometer using photo-assisted electrochemical etchingHyeon Cheol Kim, / Dae Hyun Kim, / Jinwoo Jeong, / Kukjin Chun, et al. | 2005
- 523
-
2E4.18 Fabrication of Nano-Gap Accelerometer using Photo-Assisted Electrochemical EtchingKim, H. C. / Kim, D. H. / Jeong, J. / Chun, K. et al. | 2005
- 527
-
2E4.19 Polysilicon Packaging and a New Anchoring Technology for Thick SOI MEMS - Dynamic Response Model and Application to Over-Damped Inertial SensorsDiem, B. / Barbee, J. C. / de Creecy, F. / Giroud, S. / Renaud, D. / Grange, H. / Hammond, J. / Vandemeer, J. / Roop, R. / Gogoi, B. et al. | 2005
- 527
-
Polysilicon packaging and a new anchoring technology for thick SOI mems - Dynamic response model and application to over-damped inertial sensorsDiem, B. / Barbe, J.C. / De Crecy, F. / Giroud, S. / Renaud, D. / Grange, H. / Hammond, J. / Vandemeer, J. / Roop, R. / Gogoi, B. et al. | 2005
- 527
-
Polysilicon packaging and a new anchoring technology for thick SOI MEMS /sub y/namic response model and application to over-damped inertial sensorsDiem, B. / Barbe, J.C. / de Crecy, F. / Giroud, S. / Renaud, D. / Grange, H. / Hammond, J. / Vandemeer, J. / Roop, R. / Gogoi, B. et al. | 2005
- 531
-
2E4.20 Vacuum Packaged Single Crystal Silicon Gyroscope with Sub mdeg/s/√ Hz ResolutionLee, J.-Y. / Jeon, S.-H. / Jung, H.-K. / Chang, H.-K. / Kim, Y.-K. et al. | 2005
- 531
-
Vacuum packaged single crystal silicon gyroscope with sub mdeg/s//spl radic/Hz resolutionJune-Young Lee, / Seung-Hoon Jeon, / Hyoung-Kyoon Jung, / Hyun-Kee Chang, / Yong-Kweon Kim, et al. | 2005
- 535
-
A digitally controlled MEMS gyroscope with 3.2 deg/hr stabilityRodjegard, H. / Sandstrom, D. / Pelin, P. / Hedenstierna, N. / Eckerbert, D. / Andersson, G.I. et al. | 2005
- 535
-
2E4.21 A Digitally Controlled MEMS Gyroscope with 3.2 deg/hr StabilityRodjegard, H. / Sandstrom, D. / Pelin, P. / Hedenstierna, N. / Eckerbert, D. / Andersson, G. I. et al. | 2005
- 539
-
2E4.22 Two-Mass System with Wide Bandwidth for SiOG (Silicon on Glass) Vibratory GyroscopesJeon, S.-H. / Lee, J.-Y. / Jung, H.-K. / Chang, H.-K. / Kim, Y.-K. et al. | 2005
- 539
-
Two-mass system with wide bandwidth for SiOG (silicon on glass) vibratory gyroscopesSeung-Hoon Jeon, / June-Young Lee, / Hyoung-Kyoon Jung, / Hyun-Kee Chang, / Yong-Kweon Kim, et al. | 2005
- 543
-
Technology and integration of poly-crystalline diamond piezoresistive position sensor for cochlear implant probeYuxing Tang, / Aslam, D.M. / Jianbai Wang, / Wise, K.D. et al. | 2005
- 543
-
2E4.23 Technology and Integration of Poly-Crystalline Diamond Piezoresistive Position Sensor for Cochlear Implant ProbeTang, Y. / Aslam, M. / Wang, J. / Wise, K. D. et al. | 2005
- 547
-
2E4.24 A Dynamic Millinewton Thrust Vector Measurement System in SiliconEriksson, A. B. / Lindegren, R. / Kohler, J. et al. | 2005
- 547
-
A dynamic millinewton thrust vector measurement system in siliconEriksson, A.B. / Lindegren, R. / Kohler, J. et al. | 2005
- 551
-
Micro force sensor with piezoresistive amorphous carbon strain gaugePeiner, E. / Tibrewala, A. / Bandorf, R. / Biehl, S. / Luthje, H. / Doering, L. et al. | 2005
- 551
-
2E4.25 Micro Force Sensor with Piezoresistive Amorphous Carbon Strain GaugePeiner, E. / Tibrewala, A. / Bandorf, R. / Biehl, S. / Luhje, H. / Doering, L. et al. | 2005
- 555
-
2E4.26 Multidirectional Force and Torque Sensor for Insect Flight ResearchNasir, M. / Dickinson, M. / Liepmann, D. et al. | 2005
- 555
-
Multidirectional force and torque sensor for insect flight researchNasir, M. / Dickinson, M. / Liepmann, D. et al. | 2005
- 559
-
A new capacitive displacement sensor with high accuracy and long rangeMoojin Kim, / Wonkyu Moon, / Euisung Yoon, / Kwang-ryeol Lee, et al. | 2005
- 559
-
2E4.27 A New Capacitive Displacement Sensor with High Accuracy and Long RangeKim, M. / Moon, W. / Yoon, E. / Lee, K.-r. et al. | 2005
- 563
-
Thin film NiTi fluidic-thermostat arrayShin, D.D. / Dong-Gun Lee, / Mohanchandra, K.P. / Carman, G.P. et al. | 2005
- 563
-
2E4.28 Thin Film NiTi Fluidic-Thermostat ArrayShin, D. D. / Lee, D.-G. / Mohanchandra, K. P. / Carman, G. P. et al. | 2005
- 567
-
Characteristics of improved thin-film multijunction thermal convertersLee, Y.H. / Kwon, S.W. / Kim, K.J. / Lee, K.C. / Park, S.I. / Ihm, Y.E. et al. | 2005
- 567
-
2E4.29 Characteristics of Improved Thin-Film Multijunction Thermal ConvertersLee, Y. H. / Kwon, S. W. / Kim, K. J. / Lee, K. C. / Park, S. I. / Ihm, Y. E. et al. | 2005
- 571
-
2E4.30 Micromachined Thermal Conductivity Sensor for the Liquid PhaseKuntner, J. / Kohl, F. / Jakoby, B. et al. | 2005
- 571
-
Micromachined thermal conductivity sensor for the liquid phaseKuntner, J. / Kohl, F. / Jakoby, B. et al. | 2005
- 575
-
A high-temperature thermopile fabrication process for thermal flow sensorsBuchner, R. / Rohloff, K. / Benecke, W. / Lang, W. et al. | 2005
- 575
-
2E4.31 A High-Temperature Thermopile Fabrication Process for Thermal Flow SensorsBuchner, R. / Rohloff, K. / Benecke, W. / Lang, W. et al. | 2005
- 579
-
Thermal flexible foil-fingerprint sensorSchippers, P. / Dobmeier, M.P. / Kuehlewein, R. / Bustgens, B. / Urban, G. et al. | 2005
- 579
-
2E4.32 Thermal Flexible Foil-FingerprintsensorSchippers, P. / Dobmeier, M. P. / Kuehlewein, R. / Bustgens, B. / Urban, G. et al. | 2005
- 581
-
2E4.33 Highly Sensitive Electron-Emission-Type Infrared Sensor using a Single Crystalline LiNbO~3Takamuro, D. / Takao, H. / Sawada, K. / Ishida, M. et al. | 2005
- 581
-
Highly sensitive electron-emission-type infrared sensor using a single crystalline LiNbO3Takamuro, Daisuke / Takao, Hidekuni / Sawada, Kazuaki / Ishida, Makoto et al. | 2005
- 581
-
Highly sensitive electron-emission-type infrared sensor using a single crystalline LiNbO/sub 3/Takamuro, D. / Takao, H. / Sawada, K. / Ishida, M. et al. | 2005
- 585
-
A floated absorbing structure for uncooled microbolometerAhn, M.S. / Han, Y.H. / Shin, H.J. / Kim, K.T. / Lee, S.H. / Moon, S. / Oh, M.H. et al. | 2005
- 585
-
2E4.34 A Floated Absorbing Structure for Uncooled MicrobolometerAhn, M. S. / Han, Y. H. / Shin, H. J. / Kim, K. T. / Lee, S. H. / Moon, S. / Oh, M. H. et al. | 2005
- 589
-
2E4.35 Development of a Moems Sun Sensor for Space ApplicationsBohnke, T. / Stenmark, L. et al. | 2005
- 589
-
Development of a MOEMS sun sensor for space applicationsBohnke, T. / Stenmark, L. et al. | 2005
- 593
-
Novel high Q-factor resonant microsensor platform for chemical and biological applicationsJae Hyeong Seo, / Brand, O. et al. | 2005
- 593
-
2E4.36 Novel High Q-Factor Resonant Microsensor Platform for Chemical and Biological ApplicationsSeo, J. H. / Brand, O. et al. | 2005
- 597
-
Impact of slot location on thermoelastic dissipation in micromechanical resonatorsCandler, R.N. / Hopcroft, M. / Low, C.W. / Chandorkar, S. / Bongsang Kim, / Varghese, M. / Duwel, A. / Kenny, T.W. et al. | 2005
- 597
-
2E4.37 Impact of Slot Location on Thermoelastic Dissipation in Micromechanical ResonatorsCandler, R. N. / Hopcroft, M. / Low, C. W. / Chandorkar, S. / Kim, B. / Varghese, M. / Duwel, A. / Kenny, T. W. et al. | 2005
- 601
-
A new height-adjustable aeroMEMS surface fence probe fabricated in SOI technology for high resolution wall shear stress measurement in turbulent flowsSchiffer, M. / Obermeier, E. / Grewe, F. / Ebner, A. / Fernholz, H.H. et al. | 2005
- 601
-
2E4.38 A New Height-Adjustable Aeromems Surface Fence Probe Fabricated in SOI Technology for High Resolution Wall Shear Stress Measurement in Turbulent FlowsSchiffer, M. / Obermeier, E. / Grewe, F. / Ebner, A. / Fernholz, H. H. et al. | 2005
- 605
-
Particle cytometer utilizing rotating flexural plate modes and capacitive sensingSathaye, A. / Lal, A. et al. | 2005
- 605
-
2E4.39 Particle Cytometer Utilizing Rotating Flexural Plate Modes and Capacitive SensingSathaye, A. / Lal, A. et al. | 2005
- 609
-
2E4.40 An Injection Quantity Sensor for Automotive ApplicationsSchmid, U. / Seidel, H. et al. | 2005
- 609
-
An injection quantity sensor for automotive applicationsSchmid, U. / Seidel, H. et al. | 2005
- 613
-
2E4.41 Degradation Level Monitoring Sensor for Insulating Oil of Power Transformer using Capacitive High Aspect Ratio of ElectrodesKim, S. / Kim, Y. / Yang, J. / Kwon, S. / Park, S. et al. | 2005
- 613
-
Degradation level monitoring sensor for insulating oil of power transformer using capacitive high aspect ratio of electrodesSunghyun Kim, / Yiseok Kim, / Jooran Yang, / Sangjin Kwon, / Sekwang Park, et al. | 2005
- 617
-
2E4.42 Fabrication and Characteristics of the Suppressed Sidewall Injection Magnetotransistor using a CMOS ProcessSong, Y.-G. / Ryu, J.-G. / Choi, Y.-S. / Kim, N.-H. et al. | 2005
- 617
-
Fabrication and characteristics of the suppressed sidewall injection magnetotransistor using a CMOS processYoun-Gui Song, / Ji-Goo Ryu, / Young-Shig Choi, / Nam-Ho Kim, et al. | 2005
- 621
-
The AFM tweezers: integration of a tweezers function with an AFM probeTakekawa, T. / Nakagawa, K. / Hashiguchi, G. et al. | 2005
- 621
-
2E4.43 The AFM Tweezers: Integration of a Tweezers Function With an AFM ProbeTakekawa, T. / Nakagawa, K. / Hashiguchi, G. et al. | 2005
- 625
-
Optimization of the piezoresistive AFM cantilever design for use at cryogenic temperaturesSeung Seoup Lee, / Miyatake, Y. / Shiraki, I. / Nagamura, T. / Miki, K. / Ono, T. / Esashi, M. et al. | 2005
- 625
-
2E4.44 Optimization of the Piezoresistive AFM Cantilever Design for use at Cryogenic TemperaturesLee, S. S. / Miyatake, Y. / Shiraki, I. / Nagamura, T. / Miki, K. / Ono, T. / Esashi, M. et al. | 2005
- 630
-
2E4.45 Frequency and Transient Analysis of Micromachined U-Shaped Cantilever Devices for Magnetic Field MeasurementKeplinger, F. / Beigelbeck, R. / Kohl, F. / Kvasnica, S. / Jachimowicz, A. / Jakoby, B. et al. | 2005
- 630
-
Frequency and transient analysis of micromachined U-shaped cantilever devices for magnetic field measurementKeplinger, F. / Beigelbeck, R. / Kohl, F. / Kvasnica, S. / Jachimowicz, A. / Jakoby, B. et al. | 2005
- 636
-
Enhanced functionality of cantilever based mass sensors using higher modes and functionalized particlesDohn, S. / Sandberg, R. / Svendsen, W. / Boisen, A. et al. | 2005
- 636
-
2E4.46 Enhanced Functionality of Cantilever Based Mass Sensors using Higher Modes and Functionalized ParticlesDohn, S. / Sandberg, R. / Svendsen, W. / Boisen, A. et al. | 2005
- 640
-
2E4.47 Fully Integrated CMOS Resonant Cantilever Sensor for Biochemical Detection in Liquid EnvironmentsVancura, C. / Li, Y. / Kirstein, K.-U. / Josse, F. / Hierlemann, A. / Lichtenberg, J. et al. | 2005
- 640
-
Fully integrated CMOS resonant cantilever sensor for biochemical detection in liquid environmentsVancura, C. / Yue Li, / Kirstem, K.-U. / Josse, F. / Hierlemann, A. / Lichtenberg, J. et al. | 2005
- 644
-
A piezoelectric micro-cantilever bio-sensor using the mass-micro-balancing technique with self-excitationYeolho Lee, / Geunbae Lim, / Wonkyu Moon, et al. | 2005
- 644
-
2E4.48 A Piezoelectric Micro-Cantilever Bio-Sensor using the Mass-Microbalancing Technique with Self-ExcitationLee, Y. / Lim, G. / Moon, W. et al. | 2005
- 648
-
First step towards a fully automated trim control for liquid deposition device at the microscale using piezoresistive cantilevers rowBelaubre, P. / Pourciel, J.-B. / Saya, D. / Leichle, T. / Mathieu, F. / Nicu, L. / Bergaud, C. et al. | 2005
- 648
-
2E4.49 First Step Towards a Fully Automated Trim Control for Liquid Deposition Device at the Microscale using Piezoresistive Cantilevers RowBelaubre, P. / Pourciel, J.-B. / Saya, D. / Leichle, T. / Mathieu, F. / Nicu, L. / Bergaud, C. et al. | 2005
- 652
-
Micro valves using nanoparticle-based giant electrorheological fluidXize Niu, / Weijia Wen, / Yi-Kuen Lee, et al. | 2005
- 652
-
2E4.50 Micro Valves Using Nanoparticle-Based Giant Electrorheological FluidNiu, X. / Wen, W. / Lee, Y.-K. et al. | 2005
- 656
-
Buckled-type valves integrated by parylene micro-tubesJiun-Min Wang, / Kuan-Chun Liu, / Kai-Chung Ko, / Lung-Jieh Yang, / Wen-Pin Shih, et al. | 2005
- 656
-
2E4.51 Buckeld-Type Valves Integrated by Parylene Micro-TubesWang, J.-M. / Liu, K.-C. / Ko, K.-C. / Yang, L.-J. / Shih, W.-P. et al. | 2005
- 660
-
A capillary system with thermal-bubble-actuated 1/spl times/N micro flow switch via time-sequence power control for continuous liquid handlingChih-Ming Cheng, / Cheng-Hsien Liu, et al. | 2005
- 660
-
2E4.52 A Capillary System with Thermal-Bubble-Actuated 1xN Micro Flow Switch via Time-Sequence Power Ontrol for Continuous Liquid HandlingCheng, C.-M. / Liu, C.-H. et al. | 2005
- 664
-
2E4.53 Thermopneumatic-Actuated PDMS Microvalve and Micropump Integrated with the Same Fabrication ProcessYoo, J.-C. / Moon, M.-C. / Kang, C. J. / Kim, Y.-S. et al. | 2005
- 664
-
Thermopneumatic-actuated PDMS microvalve and micropump integrated with the same fabrication processJong-Chul Yoo, / Min-Chul Moon, / Kang, C.J. / Yong-Sang Kim, et al. | 2005
- 668
-
2E4.54 A Micro Diaphragm Air Pump for Air Supply of Micro Fuel CellYang, X. / Zhou, Z. / Ye, X. et al. | 2005
- 668
-
A micro diaphragm air pump for air supply of micro fuel cellXing Yang, / Zhaoying Zhou, / Xiongying Ye, et al. | 2005
- 672
-
2E4.55 A Low Temperature Co-Fired Ceramic Solid Propellant Microthruster for Micropropulsion ApplicationsZhang, K. / Chou, S. K. / Ang, S. S. et al. | 2005
- 672
-
A low temperature co-fired ceramic solid propellant microthruster for micropropulsion applicationsKaili Zhang, / Siaw Kiang Chou, / Ang, S.S. et al. | 2005
- 676
-
Micromachined array microjet for inhalation drug therapyJunhua Zhu, / Zhaoying Zhou, / Yanying Feng, / Dong Lin, / Guibing Du, et al. | 2005
- 676
-
2E4.56 Micromachined Array Microjet for Inhalation Drug TherapyZhu, J. / Zhou, Z. / Feng, Y. / Lin, D. / Du, G. et al. | 2005
- 680
-
Foxtail actuatorsMita, M. / Kakushima, K. / Ataka, M. / Toshiyoshi, H. / Fujita, H. et al. | 2005
- 680
-
2E4.57 Foxtail ActuatorsMita, M. / Kakushima, K. / Ataka, M. / Toshiyoshi, H. / Fujita, H. et al. | 2005
- 684
-
2E4.58 Out of Plane Motion of Assembled Microstructures using a Singlemask SOI ProcessLast, M. / Subramaniam, V. / Pister, K. S. J. et al. | 2005
- 684
-
Out of plane motion of assembled microstructures using a single-mask SOI processLast, M. / Subramaniam, V. / Pister, K.S.J. et al. | 2005
- 688
-
Resonant drive for stabilizing parallel-plate actuators beyond the pull-in pointCagdaser, B. / Boser, B.E. et al. | 2005
- 688
-
2E4.59 Resonant Drive for Stabilizing Parallel-Plate Actuators Beyond the Pull-in PointCagdaser, B. / Boser, B. E. et al. | 2005
- 693
-
2E4.60 A Microball-Bearing-Supported Linear Electrostatic Micromotor with Benzocyclobutene Polymer Insulating LayersModafe, A. / Ghalichechian, N. / Frey, A. / Lang, J. H. / Ghodssi, R. et al. | 2005
- 693
-
A microball-bearing-supported linear electrostatic micromotor with benzocyclobutene polymer insulating layersModafel, A. / Ghalichechian, N. / Frey, A. / Lang, J.H. / Ghodssi, R. et al. | 2005
- 697
-
2E4.61 2-D Scanning Mirror using Plastically Deformed Angular Vertical Comb Drive ActuatorKim, J. / Christensen, D. / Lin, L. et al. | 2005
- 697
-
2-D scanning mirror using plastically deformed angular vertical comb drive actuatorJongbaeg Kim, / Christensen, D. / Liwei Lin, et al. | 2005
- 701
-
2E4.62 High-Speed Characterization and Mechanical Modeling of Microscale, Axial-Flux, Permanent-Magnet GeneratorsArnold, D. P. / Joung, Y.-H. / Zana, I. / Park, J.-W. / Das, S. / Lang, J. H. / Veazie, D. / Allen, M. G. et al. | 2005
- 701
-
High-speed characterization and mechanical modeling of microscale, axial-flux, permanent-magnet generatorsArnold, D.P. / Yeun-Ho Joung, / Zana, I. / Jin-Woo Park, / Das, S. / Lang, J.H. / Veazie, D. / Allen, M.G. et al. | 2005
- 705
-
Electrostatic fringe-field actuation for liquid-metal dropletsSen, P. / Chang-Jin Kim, et al. | 2005
- 705
-
2E4.63 Electrostatic Fringe-Field Actuation for Liquid-Metal DropletsSen, P. / Kim, C.-J. et al. | 2005
- 709
-
High power electrostatic motor with micropatterned electret on shrouded turbineGenda, T. / Tanaka, S. / Esashi, M. et al. | 2005
- 709
-
2E4.64 High Power Electrostatic Motor with Micropatterned Electret on Shrouded TurbineGenda, T. / Tanaka, S. / Esashi, M. et al. | 2005
- 713
-
2E4.65 A Piezoelectric Micro-Actuator with Three Dimensional Structure and its Micro-FabricationGao, P. / Yao, K. / Tang, X. / He, X. / Shannigrahi, S. / Lou, Y. / Zhang, J. / Okada, K. et al. | 2005
- 713
-
A piezoelectric micro-actuator with three dimensional structure and its micro-fabricationPeng Gao, / Kui Yao, / Xiaosong Tang, / Xujiang He, / Shannigrahi, S. / Yaolong Lou, / Jian Zhang, / Okada, K. et al. | 2005
- 717
-
Development of monolithic PZT microstage for the application of ultra high-density data storageXu, H.G. / Okamoto, K. / Zhang, D.Y. / Ono, T. / Esashi, M. et al. | 2005
- 717
-
2E4.66 Development of Monolithic PZT Microstage for the Application of Ultra High-Density Data StorageXu, H. G. / Okamoto, K. / Zhang, D. Y. / Ono, T. / Esashi, M. et al. | 2005
- 721
-
A cylindrical micro ultrasonic motor using micro-machined piezoelectric vibratorKanda, T. / Makino, A. / Oomori, Y. / Suzumori, K. et al. | 2005
- 721
-
2E4.67 A Cylindrical Micro Ultrasonic Motor using Micro-Machined Piezoelectric VibratorKanda, T. / Makino, A. / Omori, Y. / Suzumori, K. et al. | 2005
- 725
-
A self-limited large-displacement-ratio micromechanical amplifierLi, J. / Liu, Z.S. / Lu, C. / Zhang, Q.X. / Liu, A.Q. et al. | 2005
- 725
-
2E4.68 A Self-Limited Large-Displacement-Ratio Micromechanical AmplifierLi, J. / Liu, Z. S. / Lu, C. / Zhang, Q. X. / Liu, A. Q. et al. | 2005
- 729
-
2E4.69 Shape Memory Thin Film Actuator for Holding a Fine Blood VesselSugawara, T. / Hirota, K.-i. / Watanabe, M. / Mineta, T. / Makino, E. / Toh, S. / Shibata, T. et al. | 2005
- 729
-
Shape memory thin film actuator for holding a fine blood vesselSugawara, T. / Hirota, K. / Watanabe, M. / Mineta, T. / Makino, E. / Toh, S. / Shibata, T. et al. | 2005
- 733
-
2E4.70 Ti-Ni SMA Film Actuated Si Cantilever Beams for MEMS Probe CardNamazu, T. / Inoue, S. / Tashiro, Y. / Okamura, Y. / Koterazawa, K. et al. | 2005
- 733
-
Ti-Ni SMA film actuated Si cantilever beams for MEMS probe cardNamazu, T. / Inoue, S. / Tashiro, Y. / Okamura, Y. / Koterazawa, K. et al. | 2005
- 737
-
2E4.71 Design and Fabrication of Multi-Degrees-of-reedom Single Crystal Silicon Moveable Platforms on SOI WaferChu, H.-Y. / Lee, S.-W. / Fang, W. et al. | 2005
- 737
-
Design and fabrication of multi-degrees-of-freedom single crystal silicon moveable platforms on SOI waferHuai-Yuan Chu, / Shih-Wei Lee, / Weileun Fang, et al. | 2005
- 741
-
2E4.72 Fabrication and Testing of Three-Dimensional Stages Providing Displacement of up to 8 mumAndo, Y. et al. | 2005
- 741
-
Fabrication and testing of three-dimensional stages providing displacement of up to 8 /spl mu/mAndo, Y. et al. | 2005
- 745
-
2E4.73 Development of Intelligent Mckibben Actuator with Built-In Soft Conductive Rubber SensorWakimoto, S. / Suzumori, K. / Kanda, T. et al. | 2005
- 745
-
Development of intelligent McKibben actuator with built-in soft conductive rubber sensorWakimoto, S. / Suzumori, K. / Kanda, T. et al. | 2005
- 749
-
2E4.74 A Reversible Thermo-Sensitive Hydrogel Clamper of Locomotive Mechanism in Gastrointestinal TractKim, J. / Kim, B. / Kim, S. / Kim, H. C. / Chun, K. et al. | 2005
- 749
-
A reversible thermo-sensitive hydrogel clamper of locomotive mechanism in gastrointestinal tractJinseok Kim, / Byungkyu Kim, / Soohyun Kim, / Hyeon Cheol Kim, / Kukjin Chun, et al. | 2005
- 753
-
A membrane actuator based on piezo-polymer-composite technology [microvalve application example]Just, E. / Pustan, D. / Woias, P. et al. | 2005
- 753
-
A membrane actuator based on piezo-polymer-composite technologyJust, Elmar / Pustan, David / Woias, Peter et al. | 2005
- 753
-
2E4.75 A Membrane Actuator Based on Piezo-Polymer-Composite TechnologyJust, E. / Pustan, D. / Woias, P. et al. | 2005
- 757
-
Magnetic planar micro generatorRaisigel, H. / Cugat, O. / Delamare, M. / Wiss, O. / Rostaing, H. et al. | 2005
- 757
-
2E4.76 Magnetic Planar Micro GeneratorRaisigel, H. / Cugat, O. / Delamare, J. / Wiss, O. / Rostaing, H. et al. | 2005
- 762
-
2E4.77 A Unique Reliability Data Point: The Start-Stop Operation of a Polysilicon Micromotor at the Eight Year MarkIzad, A. / Rajgopal, S. / Mehregany, M. et al. | 2005
- 762
-
A unique reliability data point: the start-stop operation of a polysilicon micromotor at the eight year markIzad, A. / Rajgopal, S. / Mehregany, M. et al. | 2005
- 764
-
Analysis and modeling of curvature in copper-based MEMS structures fabricated using CMOS interconnect technologyMarie-Ange Eyoum, / Hoivik, N. / Jahnes, C. / Cotte, J. / Xiao-Hu Liu, et al. | 2005
- 764
-
2E4.78 Analysis and Modeling of Curvature in Copper-Based MEMS Structures Fabricated using CMOS Interconnect TechnologyEyoum, M.-A. / Hoivik, N. / Jahnes, C. / Cotte, J. / Liu, X.-H. et al. | 2005
- 768
-
2E4.79 Nonlinear Dynamics of Micro Impact Oscillators in High Frequency MEMS Switch ApplicationZhang, W. / Turner, K. L. et al. | 2005
- 768
-
Nonlinear dynamics of micro impact oscillators in high frequency MEMS switch applicationWeibin Zhang, / Wenhua Zhang, / Turner, K.L. et al. | 2005
- 772
-
2E4.80 Air Damping of Microbeam Rsonators in a Low VacuumYe, W. / Hutcherson, S. et al. | 2005
- 772
-
Air damping of microbeam resonators in a low vacuumWenjing Ye, / Hutcherson, S. et al. | 2005
- 776
-
2E4.81 Parametric Model Extraction for MEMS Based on Variational Finite Element TechniquesMehner, J. E. / Schaporin, A. / Kolchuzhin, V. / Doetzel, W. / Gessner, T. et al. | 2005
- 776
-
Parametric model extraction for MEMS based on variational finite element techniquesMehner, J.E. / Schaporin, A. / Kolchuzhin, V. / Doetzel, W. / Gessner, T. et al. | 2005
- 780
-
Design and performance of a microelectromagnetic vibration powered generatorBeeby, S.P. / Tudor, M.J. / Koukharenko, E. / White, N.M. / O'Donnell, T. / Saha, C. / Kulkarni, S. / Roy, S. et al. | 2005
- 780
-
2E4.82 Design and Performance of a Microelectromagnetic Vibrationpowered GeneratorBeeby, S. P. / Tudor, M. J. / Koukharenko, E. / White, N. M. / O Donnell, T. / Saha, C. / Kulkarni, S. / Roy, S. et al. | 2005
- 784
-
Scavenging energy from human body: design of a piezoelectric transducerRenaud, M. / Sterken, T. / Fiorini, P. / Puers, R. / Baert, K. / van Hoof, C. et al. | 2005
- 784
-
2E4.83 Scavenging Energy from Human Body: Design of a Piezoelectric TransducerRenaud, M. / Sterken, T. / Fiorini, P. / Puers, R. / Baert, K. / van Hoof, C. et al. | 2005
- 788
-
Closed form analysis of piezoelectric multilayer bending actuators using constituent equationsBallas, R.G. / Schlaak, H.F. / Schmid, A.J. et al. | 2005
- 788
-
2E4.84 Closed form Analysis of Piezoelectric Multilayer Bending Actuators using Constituent EquationsBallas, R. G. / Schlaak, H. F. / Schmid, A. J. et al. | 2005
- 792
-
Directivity steering principle for biomimicry silicon microphoneOno, N. / Arita, T. / Senjo, Y. / Ando, S. et al. | 2005
- 792
-
2E4.85 Directivity Steering Principle for Biomimicry Silicon MicrophoneOno, N. / Arita, T. / Senjo, Y. / Ando, S. et al. | 2005
- 796
-
2E4.86 Analysis and Design of Differential Electromagnetic Transducer for Implantable Middle ear using Finite Element MethodKim, M.-K. / Yoon, Y.-H. / Lim, H.-G. / Song, B.-S. / Park, I.-Y. / Cho, J.-H. et al. | 2005
- 796
-
Analysis and design of differential electromagnetic transducer for implantable middle ear using finite element methodMin-Kyu Kim, / Young-Ho Yoon, / Hyung-Gyu Lim, / Byung-Seop Song, / Il-Yong Park, / Jin-Ho Cho, et al. | 2005
- 800
-
2E4.87 Improvement of Thermal Response in Temperature Controlled Precise Three-Axis Accelerometer with Stabilized Characteristics over a Wide Temperature RangeLee, K. I. / Takao, H. / Sawada, K. / Seo, H. D. / Ishida, M. et al. | 2005
- 800
-
Improvement of thermal response in temperature controlled precise three-axis accelerometer with stabilized characteristics over a wide temperature rangeKyung Il Lee, / Takao, H. / Sawada, K. / Hee Don Seo, / Ishida, M. et al. | 2005
- 804
-
2E4.88 MEMS Littman Tunable Laser using Curve-Shaped Blazed GratingZhang, X. M. / Cai, H. / Liu, A. Q. / Hao, J. Z. / Tang, D. Y. / Lu, C. et al. | 2005
- 804
-
MEMS Littman tunable laser using curve-shaped blazed gratingZhang, X.M. / Cai, H. / Liu, A.Q. / Hao, J.Z. / Tang, D.Y. / Lu, C. et al. | 2005
- 808
-
The frequency design of nozzles layout of the piezoelectrically actuated micro droplet generator based on a fluid-solid interaction modal analysisYanying Feng, / Zhaoying Zhou, / Guibin Du, / Junhua Zhu, et al. | 2005
- 808
-
2E4.89 The Frequency Design Nozzles Layout of the Piezoelectrically Actuated Micro Droplet Generator Based on a Fluid-Solid Interaction Modal AnalysisFeng, Y. / Zhou, Z. / Du, G. / Zhu, J. et al. | 2005
- 812
-
2E4.90 Evaporation Evolution of Volatile Liquid Droplets in Nanoliter Well ArrayChen, C.-T. / Tseng, F.-G. / Chieng, C.-C. et al. | 2005
- 812
-
Evaporation evolution of volatile liquid droplets in nanoliter well arrayChin-Tai Chen, / Fan-Gang Tseng, / Ching-Chang Chieng, et al. | 2005
- 816
-
Silicon anisotropic wet etching simulation using molecular dynamicsKakinaga, T. / Hatai, A. / Tabata, O. / Isono, Y. et al. | 2005
- 816
-
2E4.91 Silicon Anisotropic Wet Etching Simulation using Molecular DynamicsKakinaga, T. / Hatai, A. / Tabata, O. / Isono, Y. et al. | 2005
- 820
-
2E4.92 Elimination of Stress-Induced Curvature in Microbolometer Focal Plane ArraysHuang, S. / Li, B. / Zhang, X. et al. | 2005
- 820
-
Elimination of stress-induced curvature in microbolometer focal plane arraysShusen Huang, / Biao Li, / Xin Zhang, et al. | 2005
- 824
-
2E4.93 Modifying Residual Stress and Stress Gradient in LPCVD Si~3N~4 Film with Ion ImplantationShi, W. / Zhang, H. / Wang, S. / Zhang, G. / Li, Z. et al. | 2005
- 824
-
Modifying residual stress and stress gradient in LPCVD Si/sub 3/N/sub 4/ film with ion implantationWendian Shi, / Haixia Zhang, / Shasha Wang, / Guobing Zhang, / Zhihong Li, et al. | 2005
- 828
-
2E4.94 Tensile Stress Determination in Silicon Nitride Membrane by AFM CharacterizationRollier, A.-S. / Legrand, B. / Deresmes, D. / Lagouge, M. / Collardand, D. / Buchaillot, L. et al. | 2005
- 828
-
Tensile stress determination in silicon nitride membrane by AFM characterizationRollier, A.-S. / Legrand, B. / Deresmes, D. / Lagouge, M. / Collard, D. / Buchaillot, L. et al. | 2005
- 832
-
Temperature-dependent fracture toughness of single-crystal-silicon filmNakao, S. / Ando, T. / Shikida, M. / Sato, K. et al. | 2005