Improved wide erosion nickel magnetron sputtering using an eccentrically rotating tilted center magnet (Englisch)
- Neue Suche nach: Iseki, T.
- Neue Suche nach: Maeda, H.
- Neue Suche nach: Itoh, T.
- Neue Suche nach: Iseki, T.
- Neue Suche nach: Maeda, H.
- Neue Suche nach: Itoh, T.
In:
Vacuum
;
82
, 11
;
1162-1167
;
2008
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ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:Improved wide erosion nickel magnetron sputtering using an eccentrically rotating tilted center magnet
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Beteiligte:
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Erschienen in:Vacuum ; 82, 11 ; 1162-1167
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Verlag:
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Erscheinungsdatum:2008
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Format / Umfang:6 Seiten, 7 Quellen
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ISSN:
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Coden:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 82, Ausgabe 11
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Diary| 2008
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Editorial Board & Publication Information| 2008