Improved wide erosion nickel magnetron sputtering using an eccentrically rotating tilted center magnet (English)
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In:
Vacuum
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82
, 11
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1162-1167
;
2008
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ISSN:
- Article (Journal) / Print
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Title:Improved wide erosion nickel magnetron sputtering using an eccentrically rotating tilted center magnet
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Contributors:
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Published in:Vacuum ; 82, 11 ; 1162-1167
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Publisher:
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Publication date:2008
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Size:6 Seiten, 7 Quellen
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ISSN:
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Coden:
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DOI:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
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Keywords:
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Source:
Table of contents – Volume 82, Issue 11
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 1151
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Leak calibration by comparison with reference standard leaksHidalgo, J.M. / de Segovia, J.L. et al. | 2008
- 1157
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Electrical diagnostics of laser ablated platinum plasmaBhatti, K.A. / Khaleeq-ur-Rahman, M. / Rafique, M.S. / Shahzad, M.I. / Latif, A. / Parveen, N. et al. | 2008
- 1162
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Improved wide erosion nickel magnetron sputtering using an eccentrically rotating tilted center magnetIseki, Takayuki / Maeda, Hiroaki / Itoh, Takashi et al. | 2008
- 1168
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Optical propagation modified by Cu nanoparticle grating fabricated by heavy ion implantationWang, Haisong / Pan, Jin / Takeda, Y. / Umeda, N. / Kono, K. / Amekura, H. / Kishimoto, N. et al. | 2007
- 1172
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Electronic behavior of calcined material obtained by microwave treatment of a tin-O-phenylene-O hybrid copolymerMatsui, H. / Kuroda, T. / Nishio, T. / Kawahara, T. / Karuppuchamy, S. / Yoshihara, M. et al. | 2007
- 1177
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Relational analysis between parameters and defects for electron beam welding of AZ-series magnesium alloysChi, Chao-Ting / Chao, Chuen-Guang / Liu, Tzeng-Feng / Wang, Che-Chung et al. | 2007
- 1183
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High frequency characteristics of tin oxide thin films on SiYüksel, Ö. Faruk / Ocak, S.B. / Selçuk, A.B. et al. | 2008
- 1187
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Structures and mechanical properties of TiN/SiNx multilayer films deposited by magnetron sputtering at different N2/Ar gas flow ratiosAn, T. / Tian, H.W. / Wen, M. / Zheng, W.T. et al. | 2008
- 1191
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Simulation of Si and SiO2 etching in CF4 plasmaKnizikevičius, R. et al. | 2008
- 1194
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Contribution study of properties of copper indium diselenide thin filmsMehdaoui, S. / Aissaoui, O. / Benslim, N. / Benabdesslem, M. / Bechiri, L. / Mahdjoubi, L. / Nouet, G. et al. | 2007
- 1198
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Etching characteristics of Al2O3 thin films in inductively coupled BCl3/Ar plasmaYun, Sun Jin / Efremov, Alexander / Kim, Mansu / Kim, Dae-Won / Lim, Jung Wook / Kim, Yong-Hae / Chung, Choong-Heui / Park, Dong Jin / Kwon, Kwang-Ho et al. | 2007
- 1203
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Characterization of interface states at Au/SnO2/n-Si (MOS) structuresTataroğlu, A. / Altındal, Ş. et al. | 2007
- 1208
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Sulfidation growth and characterization of nanocrystalline ZnS thin filmsZhang, Rengang / Wang, Baoyi / Wei, Long et al. | 2008
- 1212
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The influence of nanosecond pulse laser irradiation on the properties of a-C:H filmsGrigonis, A. / Rutkunienė, Ž. / Medvids, A. et al. | 2008
- 1216
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Variations of microstructure, conductivity and transparency of Al-doped ZnO thin films prepared by radio frequency magnetron sputtering with target–substrate distancesChen, Luo / Bi, Xiaofang et al. | 2008
- 1220
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Optical nonlinearities of Au nanocluster composite fabricated by 250keV ion implantationWang, Y.H. / Lu, J.D. / Wang, R.W. / Mao, Y.L. / Cheng, Y.G. et al. | 2008
- 1224
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Structure and optical spectrum of GaN nanorods produced on Si(111) substratesZhuang, Hui-Zhao / Li, Bao-Li / Xue, Cheng-Shan / Zhang, Shi-Ying / Wang, De-Xiao / Shen, Jia-Bin et al. | 2008
- 1229
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Effects of sapphire substrates surface treatment on epitaxial ZnO thin films grown by MOCVDWang, Yinzhen / Chu, Benli / He, Qinyu et al. | 2008
- 1233
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Effect of external magnetic field on the deposition of BaFe12O19Rafique, M.S. / Khaleeq-ur-Rahman, M. / Saif-ur-Rehman / Anjum, Safia / Anwar, M. Shahbaz / Bhatti, K.A. / Saeed, Saba / Awan, M.S. et al. | 2008
- 1238
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Radiation damage of the metal surface as a possible reason for the secondary negative ion emission of pure metalsVeksler, V.I. et al. | 2007
- 1241
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Status and performance of MGC-20 cyclotron vacuum systemAbdel-Samad, S. et al. | 2008
- 1246
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The temperature profile and bias dependent series resistance of Au/Bi4Ti3O12/SiO2/n-Si (MFIS) structuresAltındal, Ş. / Parlaktürk, F. / Tataroğlu, A. / Parlak, M. / Sarmasov, S.N. / Agasiev, A.A. et al. | 2008
- 1251
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Formation of diffusion barrier on the Ni-based superalloy by low-pressure pre-oxidationXu, Zhenhua / He, Limin / Mu, Rende / Zhong, Xinghua / Cao, Xueqiang et al. | 2008
- 1259
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The effects of buffer growth parameters on heteroepitaxial ZnO films grown by pulsed laser depositionKim, H.S. / Lugo, F. / Pearton, S.J. / Norton, D.P. / Ren, F. et al. | 2008
- 1264
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Fabrication and electrical properties of Al/phenolsulfonphthalein/n-Si/AuSb structureGüllü, Ö. / Aydoğan, Ş. / Biber, M. / Türüt, A. et al. | 2008
- 1269
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Mass production of thick copper vacuum metalization on plastic partsAndritschky, Martin / Pischow, Kaj et al. | 2008
- 1274
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Optical and electrical properties of ZnO films deposited by activated reactive evaporationYuvaraj, D. / Rao, K. Narasimha et al. | 2008
- 1280
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Effect of the oxygen fraction on the structure and optical properties of HfOxNy thin filmsLiu, Wei / Su, Xiao-ping / Zhang, Shu-yu / Wang, Hong-bin / Liu, Jia-he / Yan, Lan-qin et al. | 2008
- 1285
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Surface modification and chemical sputtering of graphite induced by low-energy atomic and molecular deuterium ionsZhang, H. / Meyer, F.W. / Meyer, H.M. III / Lance, M.J. et al. | 2008
- 1291
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Electrical conductivity studies on carbazole thin filmsSreejith, K. Pisharady / Menon, C.S. / Sudarsanakumar, C. et al. | 2008
- 1296
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Microstructural and optical properties of BN films deposited by inductively coupled plasma CVDDalui, S. / Pal, A.K. et al. | 2008
- 1302
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Characteristics of traveling wave ultrasonic motor under atmosphere and vacuum cycle conditionQu, J.J. / Tian, X. / Zhou, N.N. et al. | 2008
- 1306
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Diffusion of Pb in carbon ion-implanted silicon: Discovery of a new crystalline phase after electron beam annealingMarkwitz, Andreas / Baumann, Horst / Davy, Perry / Johnson, Peter B. et al. | 2008
- 1312
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Novel TiAlCN/VCN nanoscale multilayer PVD coatings deposited by the combined high-power impulse magnetron sputtering/unbalanced magnetron sputtering (HIPIMS/UBM) technologyHovsepian, P. Eh. / Ehiasarian, A.P. / Deeming, A. / Schimpf, C. et al. | 2008
- 1318
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Temperature dependence of the magnetization of nanostructured Ni filmsQiu, Hong / Yu, Mingpeng / Shi, Ji / Nakamura, Yoshio / Nagayama, Sakyo / Hashimoto, Mituru et al. | 2008
- 1321
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Structural and physical properties of Mg-doped CuAlO2 thin filmsDong, Guobo / Zhang, Ming / Lan, Wei / Dong, Peiming / Yan, Hui et al. | 2008
- 1325
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Preparation of CVD diamond coatings on gamma titanium aluminide using MPECVD with various interlayersAbu Suilik, Saleh B. / Ohshima, Masayuki / Tetsui, Toshimitsu / Hasezaki, Kazuhiro et al. | 2008
- 1332
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Microstructures and corrosion behaviors of Zr modified CrN coatings deposited by DC magnetron sputteringZhang, Z.G. / Rapaud, O. / Bonasso, N. / Mercs, D. / Dong, C. / Coddet, C. et al. | 2008
- 1337
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Electron-beam-induced current evidence for room-temperature photoluminescence of silicon pn diodeYuan, Zhizhong / Li, Dongsheng / Wang, Minghua / Gong, Daoren / Fan, Ruixin / Yang, Deren et al. | 2007
- 1341
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Swagelok Ultra-Torr based feed-through design for coupling optical fibre bundles into vacuum systemsCowpe, J.S. / Pilkington, R.D. et al. | 2008
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Diary| 2008
- IFC
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Editorial Board & Publication Information| 2008