The application of disturbance response decoupling to the vibration control of an electron beam lithography system (Englisch)
- Neue Suche nach: Wang, Fu-Cheng
- Neue Suche nach: Tsao, Yu-Chia
- Neue Suche nach: Yen, Jia-Yush
- Neue Suche nach: Wang, Fu-Cheng
- Neue Suche nach: Tsao, Yu-Chia
- Neue Suche nach: Yen, Jia-Yush
In:
Japanese Journal of Applied Physics, Part 1
;
48
, 6
;
06FB04/1-06FB04/5
;
2009
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ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:The application of disturbance response decoupling to the vibration control of an electron beam lithography system
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Beteiligte:
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Erschienen in:Japanese Journal of Applied Physics, Part 1 ; 48, 6 ; 06FB04/1-06FB04/5
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Verlag:
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Erscheinungsdatum:2009
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Format / Umfang:5 Seiten, 6 Quellen
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ISSN:
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Coden:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 48, Ausgabe 6
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Analysis of Basal Plane Bending and Basal Plane Dislocations in 4H-SiC Single Crystals (5 pages)Ohtani, N. / Katsuno, M. / Fujimoto, T. / Nakabayashi, M. / Tsuge, H. / Yashiro, H. / Aigo, T. / Hirano, H. / Hoshino, T. / Ohashi, W. et al. | 2009
- 066001
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Experimental and Theoretical Aspects of Aluminum Expanding Laser Plasma (7 pages)Nica, P. / Vizureanu, P. / Agop, M. / Gurlui, S. / Focsa, C. / Forna, N. / Ioannou, P.D. / Borsos, Z. et al. | 2009
- 066001/1
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Experimental and theoretical aspects of aluminum expanding laser plasmaNica, Petru / Vizureanu, Petrica / Agop, Maricel / Gurlui, Silviu / Focsa, Cristian / Forna, Norina / Ioannou, Pavlos D. / Borsos, Zoltan et al. | 2009
- 066002
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Radiography Simulation Based on Exposure Buildup Factors for Multilayer Structures (6 pages)Marinkovic, P. / Pesic, M. et al. | 2009
- 066501
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Auger Intensity from Si(001)2x2-Al Surface Excited by Wave-Field in Medium-Energy Electron Diffraction (5 pages)Horio, Y. / Sakai, D. et al. | 2009
- 066502
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Local Probing of Vortex Core Movement in a Ni-Fe Disk Using Magnetic Field Sweeping-Magnetic Force Microscopy (5 pages)Endo, Y. / Sasaki, I. / Nakatani, R. / Yamamoto, M. et al. | 2009
- 066503
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Improvement of Depth Resolution in Secondary Ion Mass Spectrometry Analysis Using Multiresolution Deconvolution (15 pages)Boulakroune, M. / Benatia, D. / Kezai, T. et al. | 2009
- 066503/1
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Improvement of depth resolution in secondary ion mass spectrometry analysis using multiresolution deconvolutionBoulakroune, Mhamed / Benatia, Djamel / Kezai, Tahar et al. | 2009
- 066504
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High-Pressure Water Vapor Heat Treatment for Enhancement of SiO~x or SiN~x Passivation Layers of Silicon Solar Cells (4 pages)Ogane, A. / Kitiyanan, A. / Uraoka, Y. / Fuyuki, T. et al. | 2009
- 066504/1
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High-pressure water vapor heat treatment for enhancement of SiOx or SiNx passivation layers of silicon solar cellsOgane, Akiyoshi / Kitiyanan, Athapol / Uraoka, Yukiharu / Fuyuki, Takashi et al. | 2009
- 066505
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Development of New Wireless Surface Acoustic Wave Sensor for Simultaneous Detection of Pressure-Temperature and Identification Tag (5 pages)Oh, H. / Wang, W. / Lee, K. / Yang, S.S. et al. | 2009
- 066506
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A Binder-Free Ag Paste Using a Chemically Adsorbed Monolayer (5 pages)Onishi, S. / Ohkubo, Y. / Soejima, K. / Ogawa, K. et al. | 2009
- 066507
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In situ Observation of Grain Growth on Electroplated Cu Film by Electron Backscatter Diffraction (8 pages)Nemoto, T. / Fukino, T. / Tsurekawa, S. / Gu, X. / Teramoto, A. / Ohmi, T. et al. | 2009
- 066508
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Study of Strain Induction for Metal-Oxide-Semiconductor Field-Effect Transistors using Transparent Dummy Gates and Stress Liners (7 pages)Kosemura, D. / Takei, M. / Nagata, K. / Akamatsu, H. / Kohno, M. / Nishita, T. / Nakanishi, T. / Ogura, A. et al. | 2009
- 066509
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Hydrogenated Amorphous Silicon Layer Formation by Inductively Coupled Plasma Chemical Vapor Deposition and Its Application for Surface Passivation of p-Type Crystalline Silicon (4 pages)Dao, V.A. / Van Duy, N. / Heo, J. / Choi, H. / Kim, Y. / Lakshminarayan / Yi, J. et al. | 2009
- 066509/1
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Hydrogenated amorphous silicon layer formation by inductively coupled plasma chemical vapor deposition and its application for surface passivation of p-type crystalline siliconDao, Vinh-Ai / Nguyen, Van-Duy / Heo, Jongkyu / Choi, Hyungwook / Kim, YoungKuk / Lakshminarayan / Yi, Junsin et al. | 2009
- 066510
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Mobile-Ion-Induced Charge Loss Failure in Silicon-Oxide-Nitride-Oxide-Silicon Two-Bit Storage Flash Memory (6 pages)Imaoka, K. / Higashi, M. / Shiraiwa, H. / Inoue, F. / Kajita, T. / Sugawa, S. et al. | 2009
- 066511
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Effect of Physical Properties of Al-Si Electrode Films on the Deformation Behaviors and the Strength of Thick Al Wire Bonds during Thermal Cycle Test (4 pages)Shimizu, Y. / Tomota, Y. / Onuki, J. / Khoo, K.P. / Kurosu, T. et al. | 2009
- 066511/1
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Effect of physical properties of Al-Si electrode films on the deformation behaviors and the strength of thick al wire bonds during thermal cycle testShimizu, Yousuke / Tomota, Yo / Onuki, Jin / Khoo, Khyou-Pin / Kurosu, Toshiki et al. | 2009
- 066512
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Effect on Two-Step Polishing Process of Electrochemical Mechanical Planarization and Chemical-Mechanical Planarization on Planarization (6 pages)Jeong, S. / Joo, S. / Kim, H. / Kim, S. / Jeong, H. et al. | 2009
- 066513
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Anomalous Nickel Silicide Encroachment in n-Channel Metal-Oxide-Semiconductor Field-Effect Transitors on Si(110) Substrates and Its Suppression by Si^+ Ion-Implantation Technique (6 pages)Yamaguchi, T. / Kashihara, K. / Kudo, S. / Okudaira, T. / Tsutsumi, T. / Maekawa, K. / Asai, K. / Kojima, M. et al. | 2009
- 066513/1
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Anomalous nickel silicide encroachment in n-channel metal-oxide-semiconductor field-effect transitors on Si(110) substrates and its suppression by Si+ Ion-implantation techniqueYamaguchi, Tadashi / Kashihara, Keiichiro / Kudo, Shuichi / Okudaira, Tomonori / Tsutsumi, Toshiaki / Maekawa, Kazuyoshi / Asai, Koyu / Kojima, Masayuki et al. | 2009
- 066514
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Total Electron Yield Soft X-ray Absorption Spectroscopy in the C K Region of the Mixtures of Graphitic Carbons and Diamond for Quantitative Analysis of the sp^2/sp^3-Hybridized Carbon Ratio (4 pages)Muramatsu, Y. / Shimomura, K. / Katayama, T. / Gullikson, E.M. et al. | 2009
- 066515
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Atomic Layer Deposition of HfO~2 onto Si Using Hf(NMe~2)~4 (6 pages)Kim, J.C. / Cho, Y.S. / Moon, S.H. et al. | 2009
- 066516
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Thermal Etching of 4H-SiC(0001) Si Faces in the Mixed Gas of Chlorine and Oxygen (7 pages)Hatayama, T. / Shimizu, T. / Kouketsu, H. / Yano, H. / Uraoka, Y. / Fuyuki, T. et al. | 2009
- 067001
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Absorption of Microwave Energy by a Spherical Nonmagnetic Metal Particle (6 pages)Ignatenko, M. / Tanaka, M. / Sato, M. et al. | 2009
- 067001/1
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Absorption of microwave energy by a spherical nonmagnetic metal particleIgnatenko, Maxim / Tanaka, Motohiko / Sato, Motoyasu et al. | 2009
- 067002
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Light Scattering Characteristics of Biological Tissues in Coaxial Ultrasound-Modulated Optical Tomography (6 pages)Hisaka, M. / Sasakura, Y. et al. | 2009
- 067002/1
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Light scattering characteristics of biological tissues in coaxial ultrasound-modulated optical tomographyHisaka, Masaki / Sasakura, Yu et al. | 2009
- 067003
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Multiwavelength Photosensor for On-Chip Real-Time Monitoring of Fluorescence and Turbidity (4 pages)Maruyama, Y. / Ishida, M. / Sawada, K. et al. | 2009
- 067003/1
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Multiwavelength photosensor for on-chip real-time monitoring of fluorescence and turbidityMaruyama, Yuki / Ishida, Makoto / Sawada, Kazuaki et al. | 2009
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Kernel Count Reduction in Model Based Optical Proximity Correction Process Models (5 pages)Li, J. / Li, X. / Lugg, R. / Melvin, L.S. et al. | 2009
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Study of Critical Dimensions of Printable Phase Defects Using an Extreme Ultraviolet Microscope (4 pages)Kamaji, Y. / Takase, K. / Yoshizumi, T. / Sugiyama, T. / Uno, T. / Watanabe, T. / Kinoshita, H. et al. | 2009
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Transport Properties of a DNA-Conjugated Single-Wall Carbon Nanotube Field-Effect Transistor (4 pages)Hwang, J. / Kim, D.S. / Ahn, D. / Hwang, S.W. et al. | 2009
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Hierarchically Organized Micro/Nano-Structures of TiO~2 (4 pages)Turkevych, I. / Pihosh, Y. / Hara, K. / Wang, Z.-S. / Kondo, M. et al. | 2009
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Deposition of Nanoparticle-Aggregated ZnO Thin Films by Drop Coating Method (3 pages)Senthilkumar, K. / Okamoto, H. / Tokunaga, M. / Senthilkumar, O. / Fujita, Y. et al. | 2009
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Microstructuring of 45-μm-Deep Dual Damascene Openings in SU-8/Si by UV-Assisted Thermal Imprinting with Opaque Mold (7 pages)Youn, S.-W. / Ueno, A. / Takahashi, M. / Maeda, R. et al. | 2009
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A Micromachined Flexible Hollow Cathode Discharge Device (4 pages)Kim, G. / Kim, K.-i. / Yang, S.S. / Oh, S.-g. et al. | 2009
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Effect of Molecular Structure on Depth Profile of Acid Generator Distribution in Chemically Amplified Resist Films (4 pages)Fukuyama, T. / Kozawa, T. / Okamoto, K. / Tagawa, S. / Irie, M. / Mimura, T. / Iwai, T. / Onodera, J. / Hirosawa, I. / Koganesawa, T. et al. | 2009
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Charge Trapping Characteristics of Variable Oxide Thickness Tunnel Barrier with SiO~2/HfO~2 or Al~2O~3/HfO~2 Stacks for Nonvolatile Memories (3 pages)Kim, K.-S. / Jung, M.-H. / Park, G.-H. / Jung, J. / Cho, W.-J. et al. | 2009
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Graphite Shell Film Formation Induced by Eduction Phenomenon of Ga Implanted by Focused Ion Beam (4 pages)Kometani, R. / Ichihashi, T. / Warisawa, S. / Ishihara, S. et al. | 2009
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Assessing Aptitude of Plated Ni-W Film as Mold Materials for Borosilicate Glass (5 pages)Yasui, M. / Motoizumi, Y. / Kaneko, S. / Hirai, K. / Sugimoto, K.-i. / Hirabayashi, Y. / Takahashi, M. / Maeda, R. et al. | 2009
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Fabrication of a Field Emitter Array with a Built-in Einzel Lens (4 pages)Nagao, M. / Yoshida, T. / Kanemaru, S. / Neo, Y. / Mimura, H. et al. | 2009
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Effect of Attenuated Phase Shift Mask Structure on Extreme Ultraviolet Lithography (4 pages)Shin, H.-D. / Jeoung, C.Y. / Kim, T.G. / Lee, S. / Park, I.-S. / Ahn, J. et al. | 2009
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Extreme Ultraviolet Resist Outgassing Quantification Verification by Resist Film Analysis (4 pages)Kobayashi, S. / Santillan, J.J. / Oizumi, H. / Itani, T. et al. | 2009
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Effect of Amine Additive in Photoacid Generator Bonded Resist for Extreme Ultraviolet and Electron Beam Lithography (5 pages)Nakahara, T. / Watanabe, T. / Kinoshita, H. / Mochizuki, T. / Takahara, Y. / Uozumi, Y. / Nakagawa, K. et al. | 2009
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Analysis of Quantum Effects on Backscattering from Drain Region of Double-Gate Metal-Oxide-Semiconductor Field-Effect Transistor (6 pages)Tsutsumi, T. / Tomizawa, K. et al. | 2009
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Continuous Synthesis of Carbon Nanotubes Using a Plasma-Enhanced Chemical Vapor Deposition System at Atmospheric Pressure (4 pages)Shin, S.S. / Choi, B.H. / Kim, Y.M. / Kim, Y.B. et al. | 2009
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Evaluation of Thermal-Mechanical Vibration Amplitude and Mechanical Properties of Carbon Nanopillars Using Scanning Electron Microscopy (5 pages)Nonaka, K. / Tamaru, K. / Nagase, M. / Yamaguchi, H. / Warisawa, S. / Ishihara, S. et al. | 2009
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[Review Paper] Fine Pattern Fabrication by the Molded Mask Method (Nanoimprint Lithography) in the 1970s (7 pages)Fujimori, S. et al. | 2009
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Replication of Three-Dimensional Rotary Micromechanism by Membrane-Assisted Transfer Molding (4 pages)Maruo, S. / Hasegawa, T. / Yoshimura, N. et al. | 2009
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Silicon Beam Resonator Utilizing the Third-Order Bending Mode (8 pages)Okada, M. / Nagasaki, H. / Tamano, A. / Niki, K. / Tanigawa, H. / Suzuki, K. et al. | 2009
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Simulation of Fogging Electrons in Electron Beam Lithography (4 pages)Kotera, M. / Maekawa, T. et al. | 2009
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Smooth and Vertical Profile Dry Etching of Si Using XeF~2 Plasma (3 pages)Matsutani, A. / Ohtsuki, H. / Koyama, F. et al. | 2009
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Ink-Jet Printing of a Single-Walled Carbon Nanotube Thin Film Transistor (4 pages)Okimoto, H. / Takenobu, T. / Yanagi, K. / Miyata, Y. / Kataura, H. / Asano, T. / Iwasa, Y. et al. | 2009
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Simulation and Experimental Study on Recovery of Polymer during Hot Embossing (4 pages)Jin, P. / Gao, Y. / Liu, T. / Tan, J. / Wang, Z. / Zhou, H. et al. | 2009
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Deformation Mechanisms of Bilayer Structures for Reducing Imprinting Force (3 pages)Yao, C.H. / Cheng, M.H. / Sung, C.K. et al. | 2009
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Grating Substrates Fabricated by Nanoimprint Lithography for Fluorescence Microscopy (7 pages)Akashi, N. / Tawa, K. / Tatsu, Y. / Kintaka, K. / Nishii, J. et al. | 2009
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Seamless Pattern Fabrication of Large-Area Nanostructures Using Ultraviolet Nanoimprint Lithography (3 pages)Kataza, S. / Ishibashi, K. / Kokubo, M. / Goto, H. / Mizuno, J. / Shoji, S. et al. | 2009
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Fabrication of Si Nanowire Field-Effect Transistor for Highly Sensitive, Label-Free Biosensing (4 pages)Kudo, T. / Kasama, T. / Ikeda, T. / Hata, Y. / Tokonami, S. / Yokoyama, S. / Kikkawa, T. / Sunami, H. / Ishikawa, T. / Suzuki, M. et al. | 2009
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Detection of Zearalenone Using a Metal-Oxide-Semiconductor Field-Effect-Transistor-Based Biosensor Employing a Pt Reference Electrode (4 pages)Lim, B. / Cho, B. / Shin, J.-K. / Choi, H.-J. / Seo, S.-H. / Choi, S.-W. / Chun, H.S. et al. | 2009
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Improvement of Specimen Preparation Process for Bulge Test Using the Combination of XeF~2 and Deep Reactive Ion Etching (6 pages)Wu, C.-L. / Yip, M.-C. / Fang, W. et al. | 2009
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Decomposition Analysis of Chemically Amplified Resists for Improving Critical Dimension Control (4 pages)Shiono, D. / Hada, H. / Hirayama, T. / Onodera, J. / Watanabe, T. / Kinoshita, H. et al. | 2009
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Electrical Characterization of Screen-Printed Conductive Circuit with Silver Nanopaste (6 pages)Kim, J.-W. / Jung, S.-B. et al. | 2009
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Effect of Reflow Oxidation on Si Surface Roughness during High-Temperature Annealing (4 pages)Araki, K. / Isogai, H. / Takeda, R. / Izunome, K. / Matsushita, Y. / Takahashi, N. / Zhao, X. et al. | 2009
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Formation and Characterization of Periodic Arrays of Nickel Silicide Nanodots on Si(111) Substrates (4 pages)Cheng, S.-L. / Wang, C.-H. / Chen, H. et al. | 2009
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Synthesis of Functionalized Carbon Nanotubes/Phenolic Nanocomposites and Its Electrical and Thermal Conductivity Measurements (4 pages)Gau, C. / Chen, S.-Y. / Tsai, H.-L. / Jenq, S.-T. / Lee, C.-C. / Chen, Y.-D. / Chien, T.-H. et al. | 2009
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Transmission-Electron-Microscopy Observation of Pt Pillar Fabricated by Electron-Beam-Induced Deposition (4 pages)Murakami, K. / Matsubara, N. / Ichikawa, S. / Kisa, T. / Nakayama, T. / Takamoto, K. / Wakaya, F. / Takai, M. / Petersen, S. / Amon, B. et al. | 2009
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Functionalization of a Polymer Using Nanoparticles Immobilized in Supercritical Carbon Dioxide (3 pages)Kuwahara, Y. / Morita, M. / Nagami, T. / Tanaka, A. / Iwanaga, T. / Kumamaru, K. / Sawada, T. / Sasaki, M. / Goto, M. / Sato, M. et al. | 2009
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Effect of Gaseous Dissipation of Oscillating Cantilevered Carbon Nanotubes (3 pages)Fukami, S. / Arie, T. / Akita, S. et al. | 2009
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Application of Nanoimprint Lithography to Fabrication of Distributed Feedback Laser Diodes (4 pages)Yanagisawa, M. / Tsuji, Y. / Yoshinaga, H. / Kono, N. / Hiratsuka, K. et al. | 2009
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Characteristics of Antisticking Layer Formed by CHF~3 Plasma Irradiation for Nanoimprint Molds (4 pages)Okada, M. / Nakamatsu, K.-i. / Kang, Y. / Kanda, K. / Haruyama, Y. / Matsui, S. et al. | 2009
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Homogeneity of Residual Layer thickness in UV Nanoimprint Lithography (4 pages)Hiroshima, H. / Atobe, H. et al. | 2009
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Fabrication of Three-Dimensional Transparent SiO~2 Microstructures by Microstereolithographic Molding (4 pages)Inada, M. / Hiratsuka, D. / Tatami, J. / Maruo, S. et al. | 2009
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Effect of Annealing on Mechanical Properties of Materials Formed by Focused Au or Si Ion-Beam-Induced Chemical Vapor Deposition Using Phenanthrene (4 pages)Yo, T. / Tanaka, H. / Nagata, T. / Fukata, N. / Chikyow, T. / Sakai, A. / Yanagisawa, J. et al. | 2009
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Micro Roll-to-Roll Patterning Process and Its Application on Flexible Display (5 pages)Lo, C.-Y. / Kiitola-Keinanen, J. / Huttunen, O.-H. / Petaja, J. / Hast, J. / Maaninen, A. / Kopola, H. / Fujita, H. / Toshiyoshi, H. et al. | 2009
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Dynamics of Radical Cation of Poly(4-hydroxystyrene) and Its Copolymer for Extreme Ultraviolet and Electron Beam Resists (4 pages)Okamoto, K. / Tanaka, M. / Kozawa, T. / Tagawa, S. et al. | 2009
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Nanomold Fabrication and Nanoimprint Devices Using Advanced Blu-ray Disc Technology (4 pages)Endoh, S. / Hayashibe, K. et al. | 2009
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Novel Nano-structured Metal-Semiconductor-Metal Photodetector with High Peak Voltage (5 pages)Borsa, T. / Williams, D.F. / Hale, P.D. / Van Zeghbroeck, B. et al. | 2009
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High-Brightness Spin-Polarized Electron Source Using Semiconductor Photocathodes (3 pages)Nishitani, T. / Tabuchi, M. / Takeda, Y. / Suzuki, Y. / Motoki, K. / Meguro, T. et al. | 2009
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Tunneling-Injection Single-Photon Emitter Using Charged Exciton State (4 pages)Miyazawa, T. / Nakaoka, T. / Takemoto, K. / Hirose, S. / Okumura, S. / Takatsu, M. / Usuki, T. / Yokoyama, N. / Arakawa, Y. et al. | 2009
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Synthesis of Brushlike Carbon Nanotubes Using Wet-Processed Catalyst (4 pages)Nagasaka, T. / Yamamura, M. / Kondo, M. / Watanabe, Y. / Akasaka, K. / Hirahara, K. / Nakayama, Y. et al. | 2009
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Fabrication and Characteristics of Micro-Electro-Mechanical-System-Based Tilt Sensor (5 pages)Choi, J.C. / Kong, S.H. et al. | 2009
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Molecular Dynamics Study of Nanoimprint Lithography for Glass Materials (3 pages)Tada, K. / Kimoto, Y. / Yasuda, M. / Kawata, H. / Hirai, Y. et al. | 2009
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Optical Characteristics of Moth-Eye Structures on Poly(methyl methacrylate) and Polycarbonate Sheets Fabricated by Thermal Nanoimprinting Processes (4 pages)Tsai, H.-Y. / Ting, C.-J. et al. | 2009
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Microfluidic and Label-Free Multi-Immunosensors Based on Carbon Nanotube Microelectrodes (4 pages)Tsujita, Y. / Maehashi, K. / Matsumoto, K. / Chikae, M. / Takamura, Y. / Tamiya, E. et al. | 2009
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Fabrication of Photonic Bandgap Fiber Gas Cell Using Focused Ion Beam Cutting (5 pages)Li, X. / Pawlat, J. / Liang, J. / Xu, G. / Ueda, T. et al. | 2009
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The Application of Disturbance Response Decoupling to the Vibration Control of an Electron Beam Lithography System (5 pages)Wang, F.-C. / Tsao, Y.-C. / Yen, J.-Y. et al. | 2009
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Pattern Freezing Process Free Litho-Litho-Etch Double Patterning (10 pages)Ando, T. / Takeshita, M. / Takasu, R. / Yoshii, Y. / Iwashita, J. / Matsumaru, S. / Abe, S. / Iwai, T. et al. | 2009
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Reactivity of Halogenated Resist Polymer with Low-Energy Electrons (3 pages)Yamamoto, H. / Kozawa, T. / Saeki, A. / Tagawa, S. / Mimura, T. / Yukawa, H. / Onodera, J. et al. | 2009
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Evaluation Method of the Quality Factor of Micromechanical Resonators Using Electron Beams (5 pages)Ashiba, H. / Warisawa, S. / Ishihara, S. et al. | 2009
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Direct Imprinted Conductive Patterns using Nanosilver Colloid-Applied UV Curable Resist (4 pages)Choi, J.-H. / Lee, S.-W. / Jeong, J.-H. / Choi, D.-G. / Lee, J.-H. / Lee, E.-S. et al. | 2009
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Design and Fabrication of Structural Color Filters with Polymer-Based Guided-Mode Resonant Gratings by Nanoimprint Lithography (4 pages)Kanamori, Y. / Katsube, H. / Furuta, T. / Hasegawa, S. / Hane, K. et al. | 2009
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Thermal Nanoimprint of a Polystyrene and Poly(4-vinylpyridine) Double-Layer Thin Film and Visualization Determination of Its Internal Structure by Transmission Electron Microscopy (6 pages)Nakagawa, M. / Kamata, N. / Iyoda, T. / Matsui, S. et al. | 2009
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Continuous-Stage-Movement Blankingless Electron-Beam Lithography for Patterned Media Template Fabrication (6 pages)Miyazaki, T. / Hayashi, K. / Kobayashi, K. / Kuba, Y. / Morita, H. / Nita, H. / Ohyi, H. et al. | 2009
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Transmission Measurement Using Extreme Ultraviolet Light for the Development of Extreme Ultraviolet Resist (4 pages)Ohnishi, R. / Watanabe, T. / Fukushima, Y. / Osugi, M. / Kinoshita, H. et al. | 2009
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Boolean Logic Gates Utilizing GaAs Three-Branch Nanowire Junctions Controlled by Schottky Wrap Gates (4 pages)Rahman, S.F.B.A. / Nakata, D. / Shiratori, Y. / Kasai, S. et al. | 2009
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Effects of Geometrical Fin Parameters on Transfer Characteristics in Triple-Gate Fin Field Effect Transistors (5 pages)Song, J.-J. / Moon, D.-h. / Kim, O. et al. | 2009
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Silicon Crystal Nanowires Produced by Metal-Induced Lateral Crystallization (5 pages)Nakagawa, G. / Asano, T. et al. | 2009
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Fabrication of a Spin-Polarized Electron Source with a Single Magnetite Whisker (5 pages)Okada, M. / Nagai, S. / Neo, Y. / Hata, K. / Mimura, H. et al. | 2009
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Thermal Imprint Lithography onto Filler Incorporated Composite Resin (6 pages)Lee, S. / Kwak, J. / Oh, Y. / Lee, H.-S. et al. | 2009
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Analysis and Fabrication of Ampere-Force Actuated Bistable Curved Beam (4 pages)Pane, I.Z. / Asano, T. et al. | 2009
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Actinic Mask Blank Inspection and Signal Analysis for Detecting Phase Defects Down to 1.5 nm in Height (6 pages)Terasawa, T. / Yamane, T. / Tanaka, T. / Iwasaki, T. / Suga, O. / Tomie, T. et al. | 2009
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Simulation of Nanoscale Two-Bit Not-And-type Silicon-Oxide-Nitride-Oxide-Silicon Nonvolatile Memory Devices with a Separated Double-Gate Fin Field Effect Transistor Structure Containing Different Tunneling Oxide Thicknesses (4 pages)Oh, S.W. / Park, S.S. / Kim, D.H. / Kim, H.W. / Kim, T.W. et al. | 2009
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Band Gap Variation of Mn Doped ZnO Films Prepared by Spray Pyrolysis Technique (4 pages)Subramanian, M. / Selvaraj, V. / Ilanchezhiyan, P. / Kumar, G.M. / Jayavel, R. / Soga, T. et al. | 2009
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Self-Assembled Two-Dimensional Array of Gold Nanoparticles with Different Size for the Sensing Application (5 pages)Li, W.-C. / Park, S.-E. / Kim, J. / Lee, S.-W. et al. | 2009
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In-situ Visualization and Two Dimensional Mapping of Local Electric Field at Probe Apex Using Scanning Electron Optical System (5 pages)Fujita, J.-i. / Ikeda, Y. / Suzuki, I. et al. | 2009
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Direct Actuation of GaAs Membrane with the Microprobe of Scanning Probe Microscopy (5 pages)Tamaru, K. / Nonaka, K. / Nagase, M. / Yamaguchi, H. / Warisawa, S. / Ishihara, S. et al. | 2009
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First-Principles Simulation on Orientation Dependence of Piezoresistance Properties in Silicon Nanowires (5 pages)Nakamura, K. / Isono, Y. / Toriyama, T. / Sugiyama, S. et al. | 2009
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Development of Ni-P-Plated Inconel Alloy Mold for Imprinting on Pyrex Glass (10 pages)Mekaru, H. / Okuyama, C. / Tsuchida, T. / Yasui, M. / Kitadani, T. / Yamashita, M. / Uegaki, J.-i. / Takahashi, M. et al. | 2009
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Wirelessly Driven and Battery-Free Love Wave Biosensor Based on Dinitrophenyl Immobilization (7 pages)Oh, H. / Wang, W. / Lee, K. / Yoon, H.C. / Yang, S. et al. | 2009
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Enhanced Sensitivity of Novel Surface Acoustic Wave Microelectromechanical System-Interdigital Transducer Gyroscope (8 pages)Wang, W. / Oh, H. / Lee, K. / Yoon, S. / Yang, S. et al. | 2009
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Progress in Extending Immersion Lithography for the 32 nm Node and Beyond (6 pages)Sewell, H. / Chen, A. / Finders, J. / Dusa, M. et al. | 2009
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Focus Monitor Using Asymmetric Diffraction Rays by Off-Axis Monopole Illumination (4 pages)Sato, T. / Inoue, S. / Kasa, K. / Nakajima, Y. / Nagai, S. / Sato, K. et al. | 2009
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Studies of the Photo Acid Generator Material Design for Chemically Amplified Photoresists (5 pages)Utsumi, Y. / Seshimo, T. / Komuro, Y. / Kawaue, A. / Ishiduka, K. / Matsuzawa, K. / Hada, H. / Onodera, J. et al. | 2009
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Unipolar Resistance Switching in Polymeric Resistance Random Access Memories (3 pages)Kim, M. / Kim, O. et al. | 2009
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Smart Gas Sensor and Noise Properties of Single ZnO Nanowire (4 pages)Choi, S.-H. / Yee, S.-M. / Ji, H.-J. / Choi, J.-W. / Cho, Y.-S. / Kim, G.-T. et al. | 2009
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Solution Conductivity as a Key Factor for Thin Silica Coating on Colloidal Silver (4 pages)Nomura, K.-i. / Fujii, S. / Ohki, Y. / Awazu, K. / Fujimaki, M. / Fukuda, N. / Hirakawa, T. et al. | 2009
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Nanohole Arrays Fabricated on Gold Surfaces by Total Wet Nanopatterning through Block Copolymer Masks (4 pages)Watanabe, R. / Ito, K. / Iyoda, T. / Sakaguchi, H. et al. | 2009
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Application of Carbon-Nanotube-Composite Japanese Washi Paper to Authentication Systems (4 pages)Watanabe, K. / Oya, T. et al. | 2009
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Fine and Large Coulomb Diamonds in a Silicon Quantum Dot (4 pages)Kodera, T. / Ferrus, T. / Nakaoka, T. / Podd, G. / Tanner, M. / Williams, D. / Arakawa, Y. et al. | 2009
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Study on Molding of a Nanostructured Plastic Plate and Its Surface Properties (6 pages)Yoo, Y.-E. / Kim, T.H. / Choi, D.-S. / Lee, H.-J. / Choi, S.J. / Kim, S.K. et al. | 2009
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Development of an All-Fluoroplastic Microfluidic Device Applied as a Nanoliter Sample Injector (4 pages)Sato, T. / Kawai, K. / Kanai, M. / Shoji, S. et al. | 2009
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Lithographic Performance of Extreme Ultravolet Full-Field Exposure Tool at Selete (6 pages)Tawarayama, K. / Aoyama, H. / Kamo, T. / Magoshi, S. / Tanaka, Y. / Shirai, S. / Tanaka, H. et al. | 2009
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Characteristics of Pentacene Organic Field-Effect Transistors with Self-Assembled-Monolayer-Treated HfO~2 Gate Oxide (5 pages)Lee, S. / Lee, S.S. / Park, J.H. / Park, I.-S. / Ahn, J. et al. | 2009
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Conduction Path Fluctuation in Silicon Two-Dimensional Tunnel Junction Array (4 pages)Matsushita, K. / Nakajima, A. et al. | 2009
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Formation of Planar Magic Ag Nanostructures (4 pages)Chiu, Y.-P. / Huang, B.-C. et al. | 2009
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Adhesion Control between Resist and Photomask Blank (5 pages)Kurihara, M. / Hatakeyama, S. / Yoshida, K. / Abe, M. / Totsukawa, D. / Morikawa, Y. / Mohri, H. / Hoga, M. / Hayashi, N. / Ohtani, H. et al. | 2009
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Mold Design and Fabrication for Surface Relief Gratings by Glass Nanoimprint (4 pages)Mori, T. / Kimoto, Y. / Kasa, H. / Kintaka, K. / Hotou, N. / Nishii, J. / Hirai, Y. et al. | 2009
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Development of Multibeam Electron Beam Direct Writing System Using Third-Order Imaging Technique (5 pages)Fuse, T. / Kotsugi, T. / Takeya, K. / Kinoshita, H. / Parker, N.W. et al. | 2009
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Correlation between C~3~7 Parameters and Acid Yields in Chemically Amplified Resists upon Exposure to 75 keV Electron Beam (4 pages)Natsuda, K. / Kozawa, T. / Okamoto, K. / Saeki, A. / Tagawa, S. et al. | 2009
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Deep-Etched Photonic Crystal Laser Structure of InP-Based Asymmetric Multiple Quantum Wells (3 pages)Bai, J.-C. / Chen, C.-Y. / Chiu, C.-L. / Hsin, J.-Y. / Lin, E.-Y. / Lay, T.-S. et al. | 2009
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Carrier Dynamics of Deep-Level States in InGaN/GaN Multiquantum Wells (3 pages)Song, H. / Kim, J.S. / Kim, E.K. / Seo, Y.G. / Hwang, S.-M. / Song, K.M. et al. | 2009
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Molecular Dynamics Simulations for Molecular Linear Motor Inside Nanotube (3 pages)Ueno, Y. / Somada, H. / Hirahara, K. / Nakayama, Y. / Akita, S. et al. | 2009
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Molecular Dynamics Study to Identify Mold Geometry Effect on the Pattern Transfer in Thermal Nanoimprint Lithography (7 pages)Yang, S. / Yu, S. / Cho, M. et al. | 2009
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Noise Reduction of Carbon Nanotube Field-Effect Transistor Biosensors by Alternating Current Measurement (4 pages)Yamamoto, Y. / Ohno, Y. / Maehashi, K. / Matsumoto, K. et al. | 2009
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Fabrication of Cantilevers by Two-Step Transfer Process without Lithography (5 pages)Kawata, H. / Ryugou, K. / Ohta, S. / Yasuda, M. / Hirai, Y. et al. | 2009