Photoreflectance characterization of ultrashallow junction activation in millisecond annealing (Englisch)
- Neue Suche nach: Chism, Will
- Neue Suche nach: Current, Michael
- Neue Suche nach: Vartanian, Victor
- Neue Suche nach: Chism, Will
- Neue Suche nach: Current, Michael
- Neue Suche nach: Vartanian, Victor
In:
Journal of Vacuum Science and Technology, Part B (Microelectronics and Nanometer Structures)
;
28
, 1
;
241-246
;
2010
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ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:Photoreflectance characterization of ultrashallow junction activation in millisecond annealing
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Beteiligte:
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Erschienen in:
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Verlag:
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Erscheinungsdatum:2010
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Format / Umfang:6 Seiten, 13 Quellen
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ISSN:
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Coden:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 28, Ausgabe 1
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